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Low pressure vapor phase deposition of organic thin films 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-014/06
출원번호 US-0972156 (1997-11-17)
발명자 / 주소
  • Stephen R. Forrest
  • Paul E. Burrows
  • Vladimir S. Ban
출원인 / 주소
  • The Trustees of Princeton University
대리인 / 주소
    Kenyon & Kenyon
인용정보 피인용 횟수 : 613  인용 특허 : 36

초록 ▼

Methods for preparing organic thin films on substrates, the method comprising the steps of providing a plurality of organic precursors in the vapor phase, and reacting the plurality or organic precursors at a sub-atmospheric pressure. Also included are thin films made by such a method and apparatuse

대표청구항 ▼

1. A method for fabricating organic films comprising:providing a first carrier gas stream; volatilizing a first organic small molecule material into the first carrier gas stream; passing the first carrier gas stream through an apparatus; maintaining the wall temperature of the apparatus at a suffici

이 특허에 인용된 특허 (36)

  1. Iwasaki Masanobu (Hyogo JPX) Itoh Hiromi (Hyogo JPX) Tokui Akira (Hyogo JPX) Mitsui Katsuyoshi (Hyogo JPX) Tsukamoto Katsuhiro (Hyogo JPX), Apparatus for forming a thin film on surface of semiconductor substrate.
    상세보기
  2. Bean John C. (New Providence NJ), Apparatus for simultaneous molecular beam deposition on a plurality of substrates.
    상세보기
  3. Thompson Mark ; You Yujian ; Petasis Nicos A. ; Burrows Paul E. ; Forrest Stephen R., Azlactone-related dopants in the emissive layer of an OLED.
    상세보기
  4. Staring Aemilianus G. J. (Eindhoven NLX) Broer Dirk J. (Eindhoven NLX) Demandt Robert J. C. E. (Eindhoven NLX), CVD method of providing a film of conjugated, substituted or unsubstituted poly(p-phenylene vinylene) on a substrate.
    상세보기
  5. Wadley Haydn N. G. (Keswick VA) Groves James F. (Charlottesville VA), Directed vapor deposition of electron beam evaporant.
    상세보기
  6. Forrest Stephen R. ; Burrows Paul ; Garbuzov Dmitri Z., Displays having mesa pixel configuration.
    상세보기
  7. Forrest Stephen R. ; Burrows Paul, Driving circuit for stacked organic light emitting devices.
    상세보기
  8. Thompson Mark E., Electron transporting and light emitting layers based on organic free radicals.
    상세보기
  9. Thompson Mark E. ; Forrest Stephen R. ; Burrows Paul, High contrast transparent organic light emitting device display.
    상세보기
  10. Bulovic Vladimir ; Forrest Stephen R. ; Burrows Paul ; Garbuzov Dmitri Z., High efficiency organic light emitting devices with light directing structures.
    상세보기
  11. Bulovic Vladimir ; Forrest Stephen R. ; Burrows Paul ; Garbuzov Dmitri Z., High reliability, high efficiency, integratable organic light emitting devices and methods of producing same.
    상세보기
  12. Garbuzov Dmitri Z. ; Forrest Stephen R. ; Burrows Paul, Light emitting device with stack of OLEDS and phosphor downconverter.
    상세보기
  13. Forrest Stephen R. ; Burrows Paul ; Garbuzov Dimitri Z., Light emitting devices having high brightness.
    상세보기
  14. Thompson Mark E. ; Cronin Jon A. ; Forrest Stephen R. ; Burrows Paul, Materials for multicolor light emitting diodes.
    상세보기
  15. Desu Seshu B. (Blacksburg VA) Peng Chien-Hsiung (Blacksburg VA), Metalorganic chemical vapor deposition of ferroelectric thin films.
    상세보기
  16. Schmitt Jerome J. (265 College St. (12N) New Haven CT 06510), Method and apparatus for the deposition of solid films of a material from a jet stream entraining the gaseous phase of s.
    상세보기
  17. Forrest Stephen R. (Princeton NJ) Ban Vladimir S. (Princeton NJ) Burrows Paul E. (Princeton NJ) Schwartz Jeffrey (Princeton NJ), Method and apparatus using organic vapor phase deposition for the growth of organic thin films with large optical non-li.
    상세보기
  18. Burrows Paul ; Forrest Stephen R. ; Shen Zilan, Method for depositing indium tin oxide layers in organic light emitting devices.
    상세보기
  19. Klinedinst Keith A. (Marlboro MA) Gary Richard A. (Everett MA) Lichtensteiger Silvia E. (Acton MA), Method for making moisture insensitive zinc sulfide based luminescent materials.
    상세보기
  20. Ashizawa Yasuo (Yokohama JPX) Sugiyama Naoharu (Yokohama JPX), Molecular beam epitaxial growth apparatus.
    상세보기
  21. Thompson Mark E. ; Forrest Stephen R., Multicolor display devices.
    상세보기
  22. Forrest Stephen Ross ; Thompson Mark Edward ; Burrows Paul Edward ; Sapochak Linda Susan ; McCarty Dennis Matthew, Multicolor organic light emitting devices.
    상세보기
  23. Forrest Stephen Ross ; Thompson Mark Edward ; Burrows Paul Edward ; Sapochak Linda Susan ; McCarty Dennis Matthew, Multicolor organic light emitting devices.
    상세보기
  24. Namiki Tohru (Tsurugashima JPX) Sato Hitoshi (Tsurugashima JPX) Nagayama Kenichi (Tsurugashima JPX) Watanabe Teruichi (Tsurugashima JPX), Organic electroluminescent device.
    상세보기
  25. Forrest Stephen ; Burrows Paul ; Thompson Mark E. ; Bulovic Vladimir, Organic light emitting device containing a hole injection enhancement layer.
    상세보기
  26. Thompson Mark E. ; Forrest Stephen R. ; Burrows Paul E. ; You Yujian ; Shoustikov Andrei, Organic light emitting devices containing a metal complex of 5-hydroxy-quinoxaline as a host material.
    상세보기
  27. Kozlov Vladimir ; Forrest Stephen R. ; Burrows Paul ; Bulovic Vladimir, Organic semiconductor laser.
    상세보기
  28. Goldman Allen M. (Mendota Heights MN) Berkley Dale D. (Minneapolis MN) Johnson Burgess R. (Minneapolis MN), Preparation of superconducting oxide films by reactive evaporation using ozone.
    상세보기
  29. Toyotama Hideki (Saitama JPX), Process for preparing ultrafine particles of organic compounds.
    상세보기
  30. Burrows Paul ; Forrest Stephen R. ; Thompson Mark E., Red-emitting organic light emitting devices (OLED's).
    상세보기
  31. Shen Zilan ; Forrest Stephen R. ; Burrows Paul, Saturated full color stacked organic light emitting devices.
    상세보기
  32. Burrows Paul ; Forrest Stephen R., Stacked organic light emitting devices.
    상세보기
  33. Forrest Stephen R. (Princeton NJ) Thompson Mark E. (Anaheim Hills CA) Burrows Paul E. (Princeton NJ) Bulovic Vladimir (Metuchen NJ) Gu Gong (Princeton NJ), Transparent contacts for organic devices.
    상세보기
  34. Gu Gong ; Burrows Paul ; Forrest Stephen R., Vacuum deposited, non-polymeric flexible organic light emitting devices.
    상세보기
  35. Mikami Akiyoshi (Yamatotakada JPX) Ogura Takashi (Nara JPX) Terada Kousuke (Tenri JPX) Yoshida Masaru (Nara JPX) Yamashita Takuo (Tenri JPX) Tanaka Koichi (Nara JPX) Okibayashi Katsushi (Sakurai JPX), Vapor deposition apparatus for using solid starting materials.
    상세보기
  36. Miyagi Katsushin (Sagamihara JPX) Ohsawa Tetsu (Sagamihara JPX), Vertical treating apparatus having a restricting means for avoiding misalignment.
    상세보기

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  1. Ma, Bin; Kwong, Raymond C., 2-azatriphenylene materials for organic light emitting diodes.
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  2. Thompson, Mark; Djurovich, Peter; Krylova, Valentina, 3-coordinate copper(I)-carbene complexes.
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  4. Forrest, Stephen R.; Yang, Fan; Lunt, Richard, Apparatus and method for deposition for organic films.
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  5. Forrest, Stephen R.; Yang, Fan; Lunt, Richard, Apparatus and method for deposition for organic thin films.
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  6. Dmitriev, Vladimir A.; Kovalenkov, Oleg V.; Ivantsov, Vladimir; Shapovalov, Lisa; Syrkin, Alexander L.; Volkova, Anna; Sizov, Vladimir; Usikov, Alexander; Soukhoveev, Vitali A., Apparatus and methods for controlling gas flows in a HVPE reactor.
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  7. Tsvetkov, Denis V.; Nikolaev, Andrey E.; Dmitriev, Vladimir A., Apparatus for epitaxially growing semiconductor device structures with sharp layer interfaces utilizing HVPE.
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  8. Cheon, Kwang-Ohk; Dong, Angang; Inbasekaran, Michael; Layek, Suman, Aryloxyalkylcarboxylate solvent compositions for inkjet printing of organic layers.
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  9. Dyatkin, Alexey; Zeng, Lichang; Xia, Chuanjun, Asymmetric hosts with triaryl silane side chains.
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  10. Muller, Richard A.; Weinstock, Neal I.; Hack, Michael, Autostereoscopic displays.
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  11. Kottas, Gregg; Kwong, Raymond C., Azaborine compounds as host materials and dopants for PHOLEDs.
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  12. Harikrishna Mohan, Siddharth; Quinn, William E., Barrier composition and properties.
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  13. Ma, Ruiqing; Brown, Julia J.; Hack, Michael; Harikrishna Mohan, Siddharth; McGraw, Gregory, Barrier covered microlens films.
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  14. Ma, Bin; Wu, Yonggang; Lin, Chun; Kwong, Raymond, Benzo-fused thiophene / triphenylene hybrid materials.
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  15. Ma, Bin; Wu, Yonggang; Lin, Chun; Kwong, Raymond, Benzo-fused thiophene or benzo-fused furan compounds comprising a triphenylene group.
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  16. Xia, Chuanjun; Kwong, Raymond; Wong, Ken-Tsung; Kuo, Ming-Cheng, Bicarbazole compounds for OLEDs.
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  18. Thompson, Mark E.; Alleyne, Bert; Djurovich, Peter, Binuclear compounds.
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  19. Thompson,Mark E.; Alleyne,Bert; Djurovich,Peter, Binuclear compounds.
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  20. Hack, Michael; Ma, Ruiqing; Krall, Emory; Brown, Julia J., Biosensing electronic devices.
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  21. Forrest,Stephen R.; Xue,Jiangeng, Bipolar organic devices.
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  22. Tsai, Jui-Yi; Yeager, Walter; Brooks, Jason; Beers, Scott; Kottas, Gregory S.; Barron, Edward; Kwong, Raymond, Blue emitter with high efficiency based on imidazo[1,2-f] phenanthridine iridium complexes.
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  23. Beers, Scott; Mackenzie, Peter B.; Tsai, Jui-Yi; Lin, Chun; Yeager, Walter; Barron, Edward; Knowles, David B.; Walters, Robert W.; Brown, Cory S., Blue phosphorescent imidazophenanthridine materials.
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  24. Melnik, Yuri V.; Soukhoveev, Vitali; Ivantsov, Vladimir; Tsvetkov, Katie; Dmitriev, Vladimir A., Bulk GaN and ALGaN single crystals.
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  25. Lin, Chun; Dyatkin, Alexey Borisovich; Elshenawy, Zeinab, Carbazole-containing materials in phosphorescent light emitting diodes.
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  26. Tsai, Jui Yi; Barone, Michael S.; Tamayo, Arnold; Thompson, Mark E., Carbene containing metal complexes as OLEDs.
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  27. Djurovich, Peter; Tsai, Jui Yi; Lin, Chun; Brooks, Jason; Alleyne, Bert; Thompson, Mark E.; MacKenzie, Peter B.; Ma, Bin, Carbene metal complexes as OLED materials.
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  28. Djurovich, Peter; Tsai, Jui-Yi; Lin, Chun; Brooks, Jason; Alleyne, Bert; Thompson, Mark E.; MacKenzie, Peter B.; Ma, Bin, Carbene metal complexes as OLED materials.
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  31. Djurovich, Peter; Tsai, Jui-Yi; Lin, Chun; Brooks, Jason; Alleyne, Bert; Thompson, Mark E.; Mackenzie, Peter B.; Ma, Bin, Carbene metal complexes as OLED materials.
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  32. Mackenzie,Peter B.; Walters,Robert; Brooks,Jason; Thompson,Mark E., Cationic metal-carbene complexes.
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  33. Ma, Ruiqing; Paynter, Jason; Silvernail, Jeffrey; Brown, Julia J.; Premutico, Mauro, Close illumination system.
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  34. Thompson, Mark E.; Liu, Zhiwei; Wu, Chao, Co-deposition methods for the fabrication of organic optoelectronic devices.
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  37. Walters, Robert W.; Tsai, Jui-Yi; MacKenzie, Peter Borden; Beers, Scott, Complexes with tridentate ligands.
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  40. Xia, Chuanjun, Compounds for triplet-triplet annihilation upconversion.
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  44. Brooks,Jason; Li,Xiao Chang; Alleyne,Bert; Thompson,Mark E.; Djurovich,Peter; Tamayo,Arnold, Cyclometallated iridium carbene complexes for use as hosts.
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  45. Bhattacharya,Rabin; Wagner,Sigurd, Deformable organic devices.
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  47. Marcus,Michael A.; Grace,Jeremy; Klug,Justin H.; Van Slyke,Steven A., Depositing layers in OLED devices using viscous flow.
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  50. McGraw, Gregory; Burrows, Paul E.; Harikrishna Mohan, Siddharth, Deposition of patterned organic thin films.
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  51. Shtein, Max; Forrest, Stephen R.; Benzinger, Jay B., Device and method for organic vapor jet deposition.
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  52. Shtein, Max; Forrest, Stephen R.; Benzinger, Jay B., Device and method for organic vapor jet deposition.
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  149. Krall, Emory; Paynter, Jason, Integrated LED/OLED lighting system.
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  150. Krall, Emory; Ma, Ruiqing; Hack, Michael; Billings, Eoin; Jackson, Duncan, Intelligent dimming lighting.
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  151. Krall, Emory; Ma, Ruiqing; Hack, Michael; Billings, Eoin; Jackson, Duncan, Intelligent dimming lighting.
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  152. Thompson, Mark E.; Wu, Chao; Chen, Hsiao-Fan, Ion-pairing soft salts based on organometallic complexes and their applications in organic light emitting diodes.
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  156. Burrows, Paul E.; Ma, Ruiqing; Paynter, Jason; O'Connor, Michael; Brown, Julia J., Large area lighting system with wireless control.
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  157. Hack, Michael; Brown, Julia J.; Weaver, Michael Stuart; Premutico, Mauro, Lifetime OLED display.
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  158. Hack, Michael; Brown, Julia J.; Weaver, Michael Stuart; Premutico, Mauro, Lifetime OLED display.
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  168. Hack, Michael; Ma, Ruiqing; Jackson, Duncan; Billings, Eoin, Lighting devices including transparent organic light emitting device light panels and having independent control of direct to indirect light.
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  169. Adamovich, Vadim I; Weaver, Michael Stuart; D'Andrade, Brian W., Long lifetime phosphorescent organic light emitting device (OLED) structures.
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  170. Weaver, Michael Stuart; Hack, Michael; Brown, Julia J.; Premutico, Mauro, Low image sticking OLED display.
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  171. Golda, Dariusz; Kim, Hyeun-Su; Gassend, Valerie, Low-profile MEMS thermal printhead die having backside electrical connections.
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  173. Burrows, Paul E.; Krall, Emory; Pang, Huiqing; Paynter, Jason; Rajan, Kamala; Ma, Ruiqing; McGraw, Gregory, Luminaire and individually replaceable components.
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  175. Thompson, Mark E.; Tamayo, Arnold; Djurovich, Peter; Sajoto, Tissa, Luminescent compounds with carbene ligands.
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  192. Chin, Yem; Barbato, Louis J., Medical device with OLED illumination light source.
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  217. Forrest, Stephen R., Method and system for creating photosensitive array with integrated backplane.
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  218. Burrows, Paul E.; Silvernail, Jeffrey; Brown, Julie J., Method and system for high-throughput deposition of patterned organic thin films.
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  219. Levermore, Peter; Pang, Huiqing; Michalski, Lech; Weaver, Mike, Method for accelerated lifetesting of large area OLED lighting panels.
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  220. Grace,Jeremy M.; Long,Michael; Boroson,Michael L.; Zhang,Jinmei; Koppe,Bruce E.; Palone,Thomas W.; Redden,Neil P., Method for controlling the deposition of vaporized organic material.
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  221. So, Woo-Young, Method for driving quad-subpixel display.
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  225. Alleyne, Bert, Method for synthesis of iriduim (III) complexes with sterically demanding ligands.
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  228. Hack, Michael; Krall, Emory; Ma, Ruiqing, Method of fabricating flexible devices.
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  229. Hack, Michael; Ma, Ruiqing; Krall, Emory; Quinn, William E., Method of fabricating organic light emitting device (OLED) panel of arbitrary shape.
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  230. Pang, Huiqing; Levermore, Peter; Krall, Emory; Rajan, Kamala; Ma, Ruiqing (Ray); Burrows, Paul E., Method of forming bus line designs for large-area OLED lighting.
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  233. Joseph, Scott; Xia, Chuanjun; Dyatkin, Alexey Borisovich, Method of making sulfide compounds.
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  234. Shtein, Max; Forrest, Stephen R., Method of manufacturing high-mobility organic thin films using organic vapor phase deposition.
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  237. Won,Tae Kyung, Method to improve water-barrier performance by changing film surface morphology.
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  242. M철ller,Sven; Forrest,Stephen R., Micro-lens arrays for display intensity enhancement.
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