초록 ▼

A vibromotor (10) includes a polysilicon surface-micromachined substrate. A movable guided element is slidably mounted on the substrate. At least one thermal actuator (20) has an impact head (40) and an anchoring end. The anchoring end pivotally disposed on the substrate external to a side of the mo

A vibromotor (10) includes a polysilicon surface-micromachined substrate. A movable guided element is slidably mounted on the substrate. At least one thermal actuator (20) has an impact head (40) and an anchoring end. The anchoring end pivotally disposed on the substrate external to a side of the movable guided element controls the movement of the movable guided element by electrothermally biasing the impact head (40) to tap against the movable guided element.

대표청구항 ▼

1. An apparatus to provide impact actuation in a micro-electromechanical system (MEMS), the apparatus comprising:an electrothermal linear vibromotor having at least one vibrating thermal element pivotally attached for providing oblique impact actuation between a space opening position and a space cl

1. An apparatus to provide impact actuation in a micro-electromechanical system (MEMS), the apparatus comprising:an electrothermal linear vibromotor having at least one vibrating thermal element pivotally attached for providing oblique impact actuation between a space opening position and a space closing position; and a movable guided element slidable in response to the oblique impact actuation of the electrothermal linear vibromotor wherein the movable guided element is directly coupled to the electrothermal linear vibromotor when the vibromotor is in the space closing position.