초록 ▼

The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relates to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present

The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relates to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.

대표청구항 ▼

1. A system for mixing a first liquid chemical with a second liquid chemical and delivering the mixture, comprising:a multi-reservoir load cell assembly, including a main reservoir with a load cell and means for mixing the first liquid chemical with the second liquid chemical; a buffer reservoir; me

1. A system for mixing a first liquid chemical with a second liquid chemical and delivering the mixture, comprising:a multi-reservoir load cell assembly, including a main reservoir with a load cell and means for mixing the first liquid chemical with the second liquid chemical; a buffer reservoir; means for sealing and unsealing the buffer reservoir from the main reservoir; means for supplying a first liquid chemical to the main reservoir until the multi-reservoir load cell assembly determines the main reservoir has a sufficient amount of the first liquid chemical; means for supplying a second liquid chemical to the main reservoir until the multi-reservoir load cell assembly determines the main reservoir has a sufficient amount of the second liquid chemical; and wherein the system is adapted to mix the first liquid chemical with the second liquid chemical in the main reservoir and transport the mixture from the main reservoir to the buffer reservoir.