초록 ▼

The invention provides a temperature control device with excellent temperature uniformity and thermal response, which can be manufactured easily, and a manufacturing method for the same. A thermoelectric device 21 is arranged between a substrate mounting plate 1 and a cooling plate 3. Copper foil el

The invention provides a temperature control device with excellent temperature uniformity and thermal response, which can be manufactured easily, and a manufacturing method for the same. A thermoelectric device 21 is arranged between a substrate mounting plate 1 and a cooling plate 3. Copper foil electrodes 5, 5, . . . on the upper side of the thermoelectric device 21 are adhered to a lower surface of the substrate mounting plate 1 with an adhesive sheet 17 covering substantially the entire lower surface of the substrate mounting plate 1, and copper foil electrodes 7, 7, . . . on the lower side of the thermoelectric device 21 are adhered to an upper surface of the cooling plate 3 with an adhesive sheet 19 covering substantially the entire upper surface of the substrate mounting plate 1. The total thickness of the adhesive sheet 17 and the copper foil electrodes 5 adhering to it, and the total thickness of the adhesive sheet 19 and the copper foil electrodes 7 adhering to it, is each set approximately 25 to 1000 .mu.m thin, so as to make the thermal resistance sufficiently low. Thermoelectric conversion elements 9 and 13 are distributed across a large area covering at least the entire area corresponding to the substrate 2.

대표청구항 ▼

1. A temperature control device comprising:a mounting plate for mounting an object to be temperature-controlled; a heat exchange plate for the exchange of heat; a heat exchange device having a multitude of thermoelectric conversion elements that are sandwiched between said two plates and arranged in

1. A temperature control device comprising:a mounting plate for mounting an object to be temperature-controlled; a heat exchange plate for the exchange of heat; a heat exchange device having a multitude of thermoelectric conversion elements that are sandwiched between said two plates and arranged in two-dimensional arrangement, and a multitude of electrodes that are electrically connected to the thermoelectric conversion elements and that constitute heat exchange surfaces on both sides thereof; wherein said multitude of thermoelectric conversion elements is distributed across substantially an entire temperature control region that covers the region corresponding to the object to be temperature-controlled that is mounted on the mounting plate, wherein the electrical connections among said multitude of thermoelectric elements in said substantially entire temperature control region are solely made by said multitude of electrodes which constitute the heat exchange surfaces.