초록 ▼

A gas manifold for a modular gas box system for delivering contaminant-free, precisely metered quantities of process and purge gases to a semiconductor process reaction chamber. The manifold provides the benefit of allowing the use of standard annular gaskets or o-rings for providing seals between t

A gas manifold for a modular gas box system for delivering contaminant-free, precisely metered quantities of process and purge gases to a semiconductor process reaction chamber. The manifold provides the benefit of allowing the use of standard annular gaskets or o-rings for providing seals between the manifold and gas components, such as filters, valves, and pressure transducers and regulators, mounted on the manifold. The manifold includes a surface, a manifold port in the surface, and at least one station in the surface for receiving gas controlling and gas monitoring components. The station includes an inwardly facing side wall extending into the manifold from the surface to a base of the station. The base is divided into a central portion and an outer portion, the central portion having a first station port, and one of the outer portion of the base and the side wall having a second station port. An internal gas passageway of the manifold connects the manifold port to one of the first and the second station ports.

대표청구항 ▼

1. A manifold for a gas box comprising:a surface; a manifold port in the surface; at least one station in the surface for receiving gas controlling and gas monitoring components, the station including an inwardly facing side wall extending into the manifold from the surface to a base of the station,

1. A manifold for a gas box comprising:a surface; a manifold port in the surface; at least one station in the surface for receiving gas controlling and gas monitoring components, the station including an inwardly facing side wall extending into the manifold from the surface to a base of the station, the base divided into a central portion and an outer portion, the central portion including a first station port, and one of the outer portion of the base and the side wall including a second station port; and an internal gas passageway connecting the manifold port to one of the first and the second station ports.