초록 ▼

A process for producing a waveguide, wherein a first layer is deposited on a silicon or glass substrate, a core structure is subsequently structured, and the core structure is protected by a protective layer. Prior to each step for depositing a new layer, the layer that has just been applied is fluo

A process for producing a waveguide, wherein a first layer is deposited on a silicon or glass substrate, a core structure is subsequently structured, and the core structure is protected by a protective layer. Prior to each step for depositing a new layer, the layer that has just been applied is fluorinated.

대표청구항 ▼

1. A process for producing planar waveguide structures, comprising the steps of:depositing a first lower layer (2) on a silicon or glass substrate (1); etching the first lower layer (2) to provide a first fluoride layer; depositing a core structure (3) on the first fluoride layer of the first lower

1. A process for producing planar waveguide structures, comprising the steps of:depositing a first lower layer (2) on a silicon or glass substrate (1); etching the first lower layer (2) to provide a first fluoride layer; depositing a core structure (3) on the first fluoride layer of the first lower layer (2); etching the core structure (3) to provide a second fluoride layer; and depositing a cover layer (5) to protect the core structure (3), wherein the etching steps are effected by applying a fluoride-containing liquid.