초록 ▼

A structure comprising a thin layer (2) that can be integral with a support (3), the thin layer being a layer of a semiconductor material made insulating by ion implantation except for at least one zone that permits a vertical electrical connection through the entire thickness of the thin layer (2).

A structure comprising a thin layer (2) that can be integral with a support (3), the thin layer being a layer of a semiconductor material made insulating by ion implantation except for at least one zone that permits a vertical electrical connection through the entire thickness of the thin layer (2). A method of manufacturing such a structure is also disclosed.

대표청구항 ▼

1. Method of manufacturing a thin layer which operates as at least one vertical electrical connection through its entire thickness, the thin layer comprising a conductive or semiconductive material whose electrical properties are disruptable by ion implantation using a predetermined implantation spe

1. Method of manufacturing a thin layer which operates as at least one vertical electrical connection through its entire thickness, the thin layer comprising a conductive or semiconductive material whose electrical properties are disruptable by ion implantation using a predetermined implantation species, the method comprising:masking one face of a substrate comprising said material by masking means that define at least one masked area, the size of said masked area not exceeding a predetermined limiting dimension beyond which crack propagation is modified such that proper cleavage is inhibited; performing ion implantation of the substrate through said masked face by means of said predetermined implantation species to thereby create, within a non-masked volume of the substrate and at a depth close to a mean depth of penetration of said predetermined implantation species, a layer of micro-cavities demarcating said thin layer; removing the masking means; and cleaving the substrate at the depth of the layer of micro-cavities in order to obtain said thin layer.