초록 ▼

The system and method for molecular contamination control permits purging a SMIF pod to desired levels of relative humidity, oxygen, or particulates. The SMIF pod includes an inlet port including a check valve and filter assembly for supplying a clean, dry gaseous working fluid to maintain low level

The system and method for molecular contamination control permits purging a SMIF pod to desired levels of relative humidity, oxygen, or particulates. The SMIF pod includes an inlet port including a check valve and filter assembly for supplying a clean, dry gaseous working fluid to maintain low levels of moisture, oxygen, and particulate content around materials contained in the SMIF pod. The SMIF pod outlet port, which also includes a check valve and filter assembly, is connected with an evacuation system. Flow of purge gas inside the SMIF pod can be directed with one or more nozzle towers to encourage laminar flow inside the pod, and one or more outlet towers., having a function similar to that of the inlet tower, may also be provided. The purge gas can be dried by exposure to a desiccant, heated to temperatures between about 100.degree. C. and about 120.degree. C., and can be tested for baseline constituent levels prior to or after introduction into a SMIF pod. Multiple SMIF pods can also be purged by a single contamination control base unit.

대표청구항 ▼

1. Apparatus for removing a gaseous working fluid from a modular isolation capsule for purging of the modular isolation capsule, comprising:an outlet tower adapted to be mounted to the modular isolation capsule for removing the gaseous working fluid from the modulation isolation chamber; and a check

1. Apparatus for removing a gaseous working fluid from a modular isolation capsule for purging of the modular isolation capsule, comprising:an outlet tower adapted to be mounted to the modular isolation capsule for removing the gaseous working fluid from the modulation isolation chamber; and a check valve disposed in said outlet tower for permitting one-way flow of said gaseous working fluid from the modular isolation capsule.