|국가/구분||United States(US) Patent 등록|
|미국특허분류(USC)||438/455; 438/106; 438/107; 438/149; 438/456; 438/459; 438/460|
|우선권정보||JP-0225643 (1996-08-27); JP-0300371 (1996-11-12); JP-0300373 (1996-11-12); JP-0315590 (1996-11-12); JP-0193081 (1997-07-03); JP-0193082 (1997-07-03)|
|§371/§102 date||19980424 (19980424)|
|발명자 / 주소|
|출원인 / 주소|
|대리인 / 주소||
|인용정보||피인용 횟수 : 603 인용 특허 : 3|
A method for transferring a thin film device on a substrate onto a transfer member, includes a step for forming a separation layer on the substrate, a step for forming a transferred layer including the thin film device on the separation layer, a step for adhering the transferred layer including the thin film device to the transfer member with an adhesive layer therebetween, a step for irradiating the separation layer with light so as to form internal and/or interfacial exfoliation of the separation layer, and a step for detaching the substrate from the s...
1. An exfoliating method for detaching a detached member disposed on a substrate with a separation layer therebetween, comprising:irradiating said separation layer with incident light from a side of said substrate causing exfoliation in said separation layer and/or at an interface of said separation layer and said substrate, and detaching said detached member from said substrate.