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System and method for generating coherent radiation at ultraviolet wavelengths

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01S-003/10
출원번호 US-0364171 (1999-07-29)
발명자 / 주소
  • James J. Jacob
출원인 / 주소
  • Actinix
대리인 / 주소
    Fenwick & West LLP
인용정보 피인용 횟수 : 57  인용 특허 : 4

초록

An optical system for producing ultraviolet radiation includes an optical source, an optical parametric oscillator (OPO), a frequency doubler, and a mixer. The optical source produces a first beam of radiation. The OPO receives a first portion of the first beam of radiation and produces a second bea

대표청구항

1. An optical system for producing a coherent beam of ultraviolet radiation comprising:an optical source for producing a first beam of coherent radiation at a first wavelength; an optical splitter disposed to receive the first beam for splitting the first beam into portions including a first portion

이 특허에 인용된 특허 (4)

  1. Sanders Steven ; Lang Robert J. ; Waarts Robert G., High power pumped mid-IR wavelength systems using nonlinear frequency mixing (NFM) devices.
  2. Trutna ; Jr. William R. (Palo Alto CA), Multipath Raman cell for wavelength conversion.
  3. Lin J. T. (Winter Springs FL), Multiwavelength solid state laser using frequency conversion techniques.
  4. Mead Roy D. ; Miyake Charles I. ; Lowenthal Dennis D., Ultraviolet solid state laser, method of using same and laser surgery apparatus.

이 특허를 인용한 특허 (57)

  1. Chuang, Yung-Ho Alex; Lu, Xiaoxu; Zhang, Baigang; Fielden, John; Dribinski, Vladimir, 183 nm CW laser and inspection system.
  2. Chuang, Yung-Ho Alex; Armstrong, J. Joseph; Deng, Yujun; Dribinski, Vladimir; Fielden, John; Zhang, Jidong, 183NM laser and inspection system.
  3. Chuang, Yung-Ho Alex; Armstrong, J. Joseph; Deng, Yujun; Dribinski, Vladimir; Fielden, John; Zhang, Jidong, 183NM laser and inspection system.
  4. Chuang, Yung-Ho; Armstrong, J. Joseph; Liou, Justin Dianhuan; Dribinski, Vladimir; Fielden, John, 193 nm laser and an inspection system using a 193 nm laser.
  5. Chuang, Yung-Ho; Armstrong, J. Joseph; Deng, Yujun; Liou, Justin Dianhuan; Dribinski, Vladimir; Fielden, John, 193nm laser and inspection system.
  6. Chuang, Yung-Ho; Armstrong, J. Joseph; Deng, Yujun; Liou, Justin Dianhuan; Dribinski, Vladimir; Fielden, John, 193nm laser and inspection system.
  7. Chuang, Yung-Ho; Armstrong, J. Joseph; Dribinski, Vladimir; Deng, Yujun; Fielden, John, 193nm laser and inspection system.
  8. Muramatsu, Masaharu; Suzuki, Hisanori; Yoneta, Yasuhito; Otsuka, Shinya; Chem, Jehn-Huar; Brown, David L.; Chuang, Yung-Ho Alex; Fielden, John; Iyer, Venkatraman, Anti-reflection layer for back-illuminated sensor.
  9. Gelernt,Barry, Apparatus and method for optical data storage and retrieval.
  10. Chern, Jehn-Huar; Ehsani, Ali R.; Delgado, Gildardo; Brown, David L.; Chuang, Yung-Ho Alex; Fielden, John, Back-illuminated sensor with boron layer.
  11. Chern, Jehn-Huar; Ehsani, Ali R.; Delgado, Gildardo; Brown, David L.; Chuang, Yung-Ho Alex; Fielden, John, Back-illuminated sensor with boron layer.
  12. Chern, Jehn-Huar; Ehsani, Ali R.; Delgado, Gildardo; Brown, David L.; Chuang, Yung-Ho Alex; Fielden, John, Back-illuminated sensor with boron layer.
  13. Kafka, James D.; Chien, Ching-Yuan; Deng, Yujun; Florean, Andrei C.; Spence, David E.; Zhou, Jianping, Broadly tunable optical parametric oscillator.
  14. Kafka, James D.; Clark, James; Chien, Ching-Yuan; Deng, Yujun; Florean, Andrei C.; Spence, David E., Broadly tunable optical parametric oscillator.
  15. Lenzner, Matthias; Korn, Georg; Kittelmann, Olaf, Device and procedure for refractive laser surgery.
  16. Lenzner, Matthias; Korn, Georg; Kittelmann, Olaf, Device and procedure for refractive laser surgery.
  17. Chuang, Yung-Ho Alex; Liu, Xuefeng; Fielden, John; Brown, David L., Electron-bombarded charge-coupled device and inspection systems using EBCCD detectors.
  18. Suenaga, Yutaka; Omura, Yasuhiro, Exposure apparatus and method.
  19. Suenaga, Yutaka; Omura, Yasuhiro, Exposure apparatus and method.
  20. Yutaka Suenaga JP; Yasuhiro Omura JP, Exposure apparatus and method.
  21. Chuang, Yung-Ho Alex; Zhang, Jingjing; Fielden, John, Image sensor, an inspection system and a method of inspecting an article.
  22. Chuang, Yung-Ho Alex; Zhang, Jingjing; Fielden, John, Image sensor, an inspection system and a method of inspecting an article.
  23. Deng, Yujun; Armstrong, J. Joseph; Chuang, Yung-Ho Alex; Dribinski, Vladimir; Fielden, John, Laser assembly and inspection system using monolithic bandwidth narrowing apparatus.
  24. Cook,Gary, Laser effects and laser devices.
  25. Brown, Daniel J. W.; Partlo, William N.; Sandstrom, Richard L., Laser system.
  26. Brown, Daniel J. W.; Partlo, William N.; Sandstrom, Richard L., Laser system.
  27. Brown, Daniel J. W.; Partlo, William N.; Sandstrom, Richard L., Laser system.
  28. Ershov, Alexander I.; Partlo, William N.; Brown, Daniel J. W.; Fomenkov, Igor V., Laser system.
  29. Ershov, Alexander I.; Partlo, William N.; Brown, Daniel J. W.; Fomenkov, Igor V., Laser system.
  30. Ershov, Alexander I.; Partlo, William N.; Brown, Daniel J. W.; Fomenkov, Igor V.; Bergstedt, Robert A., Laser system.
  31. Ershov, Alexander I.; Partlo, William N.; Brown, Daniel J. W.; Fomenkov, Igor V.; Bergstedt, Robert A., Laser system.
  32. Ershov, Alexander I.; Partlo, William N.; Brown, Daniel J. W.; Fomenkov, Igor V.; Bergstedt, Robert A., Laser system.
  33. Ershov, Alexander I.; Partlo, William N.; Brown, Daniel J. W.; Fomenkov, Igor V.; Bergstedt, Robert A.; Lalovic, Ivan, Laser system.
  34. Ershov, Alexander I.; Partlo, William N.; Brown, Daniel J. W.; Fomenkov, Igor V.; Bergstedt, Robert A.; Sandstrom, Richard L.; Lalovic, Ivan, Laser system.
  35. Ershov, Alexander I.; Partlo, William N.; Brown, Daniel J. W.; Fomenkov, Igor V.; Bergstedt, Robert A.; Sandstrom, Richard L.; Lalovic, Ivan, Laser system.
  36. Wolters, Christian; Vazhaeparambil, Jijen; Woll, Dirk; Romanovsky, Anatoly; Whiteside, Bret; Biellak, Stephen; Zhao, Guoheng, Laser with integrated multi line or scanning beam capability.
  37. Brown, David L.; Chuang, Yung-Ho; Fielden, John, Low-noise sensor and an inspection system using a low-noise sensor.
  38. Mead,Roy M.; Miyake,Charles I., Method and apparatus for fiber Bragg grating production.
  39. Brown, David L.; Chuang, Yung-Ho; Yuditsky, Yury, Method and apparatus for high speed acquisition of moving images using pulsed illumination.
  40. Luo, Ningyi; Zhu, Sheng Bai, Method and apparatus for producing UV laser from all-solid-state system.
  41. Dribinski, Vladimir; Chuang, Yung-Ho Alex; Armstrong, J. Joseph, Multi-stage ramp-up annealing for frequency-conversion crystals.
  42. Imai, Shinichi, Pattern inspection apparatus.
  43. Imai,Shinichi, Pattern inspection apparatus.
  44. Chuang, Yung-Ho Alex; Fielden, John, Photocathode including silicon substrate with boron layer.
  45. Chuang, Yung-Ho Alex; Fielden, John, Photocathode including silicon substrate with boron layer.
  46. Chuang, Yung-Ho Alex; Brown, David L.; Fielden, John, Photomultiplier tube, image sensor, and an inspection system using a PMT or image sensor.
  47. Chuang, Yung-Ho; Brown, David L.; Fielden, John, Photomultiplier tube, image sensor, and an inspection system using a PMT or image sensor.
  48. Sakuma, Jun, Radiation source apparatus and DUV beam generation method.
  49. Spuler, Scott, Raman cell for high power applications.
  50. Brown, David L.; Chuang, Yung-Ho Alex; Fielden, John; Trimpl, Marcel; Zhang, Jingjing; Contarato, Devis; Iyer, Venkatraman, Scanning electron microscope and methods of inspecting and reviewing samples.
  51. Chuang, Yung-Ho Alex; Liou, Justin Dianhuan; Armstrong, J. Joseph; Deng, Yujun, Semiconductor inspection and metrology system using laser pulse multiplier.
  52. Chuang, Yung-Ho; Armstrong, J. Joseph; Liou, Justin Dianhuan; Dribinski, Vladimir; Brown, David L., Semiconductor inspection and metrology system using laser pulse multiplier.
  53. Chuang, Yung-Ho; Armstrong, J. Joseph; Liou, Justin Dianhuan; Dribinski, Vladimir; Brown, David L., Semiconductor inspection and metrology system using laser pulse multiplier.
  54. Chuang, Yung-Ho; Armstrong, J. Joseph; Liou, Justin Dianhuan; Dribinski, Vladimir; Brown, David L., Semiconductor inspection and metrology system using laser pulse multiplier.
  55. Chuang, Yung-Ho Alex; Fielden, John; Brown, David L.; Zhang, Jingjing; Lyon, Keith; Wang, Mark Shi, Sensor with electrically controllable aperture for inspection and metrology systems.
  56. Chuang, Yung-Ho Alex; Fielden, John; Brown, David L.; Zhang, Jingjing; Lyon, Keith; Wang, Mark Shi, Sensor with electrically controllable aperture for inspection and metrology systems.
  57. Deng, Yujun; Chuang, Yung-Ho; Fielden, John, System and method for reducing the bandwidth of a laser and an inspection system and method using a laser.
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