$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Method and apparatus for separating composite member using fluid 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B32B-035/00
출원번호 US-0047327 (1998-03-25)
우선권정보 JP-0075498 (1997-03-27); JP-0138477 (1997-05-28)
발명자 / 주소
  • Kazuaki Ohmi JP
  • Takao Yonehara JP
  • Kiyofumi Sakaguchi JP
  • Kazutaka Yanagita JP
출원인 / 주소
  • Canon Kabushiki Kaisha JP
대리인 / 주소
    Fitzpatrick, Cella, Harper & Scinto
인용정보 피인용 횟수 : 47  인용 특허 : 18

초록

To separate a composite member consisting of a plurality of bonded members without destructing or damaging it, a fluid is jetted against the composite member from a nozzle to separate it into a plurality of members at a position different from a bonding position.

대표청구항 ▼

1. A separation apparatus comprising:a holding means for holding a composite member having a plurality of mutually bonded members; a jetting means for jetting a fluid against a side surface of the composite member; and a movement mechanism for relatively moving the composite member and the jetting m

이 특허에 인용된 특허 (18)

  1. Munoz Jose P. (West Bloomfield MI), Adjustable fluid jet cleaner.
    상세보기
  2. Frank Walter (Burgkirchen DEX) Pemwieser Albert (Ach ATX) Spatzier Gerhard (Eggelsberg ATX), Apparatus and method of automatically separating stacked wafers.
    상세보기
  3. Cha Gi-ho,KRX ; Lee Byoung-hun,KRX, Apparatus and methods for wafer debonding using a liquid jet.
    상세보기
  4. Hayase Iwao (Itami JPX), Apparatus for producing semiconductor wafers.
    상세보기
  5. Henley Francois J. ; Cheung Nathan, Controlled cleavage process using pressurized fluid.
    상세보기
  6. Domann Hannes (Geesthact DEX), Method and apparatus for producing a water/abrasive mixture for cutting and cleaning objects and for the precise removal.
    상세보기
  7. Klingel Hans (Moglingen DEX), Method and machine tool for cutting workpieces.
    상세보기
  8. Goesele Ulrich M. (Durham NC) Lehmann Volker (Durham NC), Method for bubble-free bonding of silicon wafers.
    상세보기
  9. Sato Nobuhiko,JPX ; Yonehara Takao,JPX ; Sakaguchi Kiyofumi,JPX, Method for producing semiconductor substrate.
    상세보기
  10. Matsushita Takeshi,JPX ; Tayanaka Hiroshi,JPX, Method for separating a device-forming layer from a base body.
    상세보기
  11. Bozler Carl O. (Sudbury MA) Fan John C. C. (Chestnut Hill MA) McClelland Robert W. (Norwell MA), Method of producing sheets of crystalline material and devices made therefrom.
    상세보기
  12. Sakaguchi Kiyofumi,JPX ; Yonehara Takao,JPX, Process for producing semiconductor article.
    상세보기
  13. Sakaguchi Kiyofumi,JPX ; Yonehara Takao,JPX ; Nishida Shoji,JPX ; Yamagata Kenji,JPX, Process for producing semiconductor article.
    상세보기
  14. Sakaguchi Kiyofumi,JPX ; Yonehara Takao,JPX, Process for production of semiconductor substrate.
    상세보기
  15. Bruel Michel,FRX, Process for the manufacture of thin films of semiconductor material.
    상세보기
  16. Bruel Michel,FRX ; Poumeyrol Thierry,FRX, Process for the production of a structure having a thin semiconductor film on a substrate.
    상세보기
  17. Bruel Michel (Veurey FRX), Process for the production of thin semiconductor material films.
    상세보기
  18. Yonehara Takao (Atsugi JPX), Semiconductor member and process for preparing semiconductor member.
    상세보기

이 특허를 인용한 특허 (47)

  1. Iwasaki, Yukiko; Nishida, Shoji; Sakaguchi, Kiyofumi; Ukiyo, Noritaka, Anodizing apparatus.
    상세보기
  2. Barge, Thierry; Schwarzenbach, Walter; Waechter, Jean-Marc; Truong, Thuan; Ghyselen, Bruno, Apparatus and method for splitting substrates.
    상세보기
  3. Geurts, Peter Johannes Lodewijk; Costelloe, Nathan Thomas, Device for deblocking optical workpieces, in particular eyeglass lenses.
    상세보기
  4. Nayfeh, Ammar Munir; Chui, Chi On; Saraswat, Krishna C.; Yonehara, Takao, Germanium substrate-type materials and approach therefor.
    상세보기
  5. Nayfeh,Ammar Munir; Chui,Chi On; Saraswat,Krishna C.; Yonehara,Takao, Germanium substrate-type materials and approach therefor.
    상세보기
  6. Sugiyama, Eiji; Dozen, Yoshitaka; Fukumoto, Yumiko; Kuwabara, Hideaki; Yamazaki, Shunpei, Manufacturing method of semiconductor device including peeling layers from substrates by etching.
    상세보기
  7. Sugiyama, Eiji; Dozen, Yoshitaka; Ohno, Yumiko; Kuwabara, Hideaki; Yamazaki, Shunpei, Manufacturing method of semiconductor device using peeling.
    상세보기
  8. Yanagita, Kazutaka; Kohda, Mitsuharu; Sakaguchi, Kiyofumi; Fujimoto, Akira, Method and apparatus for separating member.
    상세보기
  9. Yanagita, Kazutaka; Kohda, Mitsuharu; Sakaguchi, Kiyofumi; Fujimoto, Akira, Method and apparatus for separating member.
    상세보기
  10. Yanagita, Kazutaka; Kohda, Mitsuharu; Sakaguchi, Kiyofumi; Fujimoto, Akira, Method and apparatus for separating member.
    상세보기
  11. Yanagita,Kazutaka; Sakaguchi,Kiyofumi, Method and apparatus for separating sample.
    상세보기
  12. Okabe, Takehito; Sato, Nobuhiko; Kurotobi, Makoto; Takeda, Kenichi; Ifuku, Toshihiro, Method for producing a piezoelectric film actuator.
    상세보기
  13. Huang, Yu-Ling; Tsai, Lung Hui, Method for removing the circumferential edge of a dielectric layer.
    상세보기
  14. Wijngaards, David D. L.; Reinten, Hans; Stolk, Hendrik J.; Westland, Alex N., Method of manufacturing a piezoelectric ink jet device.
    상세보기
  15. Yonehara, Takao; Sakaguchi, Kiyofumi, Method of manufacturing a thin-film semiconductor device used for a display region and peripheral circuit region.
    상세보기
  16. Noguchi,Takashi; Xianyu,Wenxu; Yin,Huaxiang, Method of manufacturing single crystal Si film.
    상세보기
  17. Sakaguchi, Kiyofumi; Yonehara, Takao, Method of separation of semiconductor device.
    상세보기
  18. Mazure,Carlos; Ghyselen,Bruno, Methods for producing a multilayer semiconductor structure.
    상세보기
  19. Vuorio, Taisto, Nozzle.
    상세보기
  20. Vuorio, Taisto, Nozzle.
    상세보기
  21. Ghyselen, Bruno; Bensahel, Daniel; Skotnicki, Thomas, Process for transferring a layer of strained semiconductor material.
    상세보기
  22. Ghyselen, Bruno; Bensahel, Daniel; Skotnicki, Thomas, Process for transferring a layer of strained semiconductor material.
    상세보기
  23. Ghyselen, Bruno; Bensahel, Daniel; Skotnicki, Thomas, Process for transferring a layer of strained semiconductor material.
    상세보기
  24. Lichtensteiger, Lukas; Pfeffer, Christian, Production of free-standing solid state layers by thermal processing of substrates with a polymer.
    상세보기
  25. Yanagita, Kazutaka; Ohmi, Kazuaki; Sakaguchi, Kiyofumi, Sample processing system.
    상세보기
  26. Yanagita, Kazutaka; Ohmi, Kazuaki; Sakaguchi, Kiyofumi, Sample processing system.
    상세보기
  27. Yanagita, Kazutaka; Ohmi, Kazuaki; Sakaguchi, Kiyofumi, Sample processing system.
    상세보기
  28. Yanagita, Kazutaka; Ohmi, Kazuaki; Sakaguchi, Kiyofumi, Sample separating apparatus and method, and substrate manufacturing method.
    상세보기
  29. Yanagita, Kazutaka; Ohmi, Kazuaki; Sakaguchi, Kiyofumi, Sample separating apparatus and method, and substrate manufacturing method.
    상세보기
  30. Yanagita, Kazutaka; Yonehara, Takao; Omi, Kazuaki; Sakaguchi, Kiyofumi, Sample separating apparatus and method, and substrate manufacturing method.
    상세보기
  31. Yanagita, Kazutaka; Yonehara, Takao; Omi, Kazuaki; Sakaguchi, Kiyofumi, Sample separating apparatus and method, and substrate manufacturing method.
    상세보기
  32. Sekiguchi,Yoshinobu; Yonehara,Takao; Koto,Makoto; Okuda,Masahiro; Shimada,Tetsuya, Semiconductor film manufacturing method and substrate manufacturing method.
    상세보기
  33. Yonehara, Takao; Yamagata, Kenji; Sekiguchi, Yoshinobu; Nishi, Kojiro, Semiconductor member, semiconductor article manufacturing method, and LED array using the manufacturing method.
    상세보기
  34. Yonehara, Takao; Yamagata, Kenji; Sekiguchi, Yoshinobu; Nishi, Kojiro, Semiconductor member, semiconductor article manufacturing method, and LED array using the manufacturing method.
    상세보기
  35. Sakaguchi,Kiyofumi; Sato,Nobuhiko, Semiconductor substrate, semiconductor device, and method of manufacturing the same.
    상세보기
  36. Yonehara, Takao; Sekiguci, Yoshinobu, Semiconductor substrate, semiconductor device, light emitting diode and producing method therefor.
    상세보기
  37. Sakaguchi, Kiyofumi, Substrate and manufacturing method therefor.
    상세보기
  38. Sakaguchi, Kiyofumi, Substrate and manufacturing method therefor.
    상세보기
  39. Rayssac, Olivier; Letertre, Fabrice, Substrate cutting device and method.
    상세보기
  40. Rayssac,Olivier; Letertre,Fabrice, Substrate cutting device and method.
    상세보기
  41. Martinez,Muriel; Barge,Thierry; Soubie,Alain; Lagahe Blanchard,Chrystelle; Berne,C？cile; Rayssac,Olivier, Substrate layer cutting device and method.
    상세보기
  42. Martinez,Muriel; Barge,Thierry; Soubie,Alain; Lagahe Blanchard,Chrystelle; Berne,C��cile; Rayssac,Olivier, Substrate layer cutting device and method.
    상세보기
  43. Yonehara,Takao, Substrate, manufacturing method therefor, and semiconductor device.
    상세보기
  44. Yonehara,Takao; Shimada,Tetsuya, Thin film transistor and method of fabricating the same.
    상세보기
  45. Sakaguchi, Kiyofumi; Yonehara, Takao, Thin-film semiconductor device and method of manufacturing the same.
    상세보기
  46. Yonehara,Takao; Sakaguchi,Kiyofumi, Thin-film semiconductor device and method of manufacturing the same.
    상세보기
  47. Jin, Hotae; Oh, Seonju; Kim, HeuiSeog, Wafer dividing apparatus and methods.
    상세보기

관련 콘텐츠

섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로