초록 ▼

The present invention provides a system and method for selectively removing organic and inorganic contaminants from plating baths. More particularly, the invented method relates to the use of a source of energy in combination with chemical oxidants, alone or in conjunction with a catalyst to oxidize

The present invention provides a system and method for selectively removing organic and inorganic contaminants from plating baths. More particularly, the invented method relates to the use of a source of energy in combination with chemical oxidants, alone or in conjunction with a catalyst to oxidize organic contaminants in the plating bath to a level such that the electroplating bath can be recovered and reused after appropriate chemical adjustment. The oxidative treatment method may be a continuous process or a batch process that is performed in a single pass and the endpoint of the oxidative process detected by a sensor. Residual organics, and chloride ions in the bath are removed from the solution by a chemisorption or physisorption treatment. Inorganic contaminants are removed from the electroplating bath by selective ion exchange resins or electrodialysis, while particulate and suspended colloidal particles are removed by filtration before the treated plating bath is recycled.

대표청구항 ▼

1. A system for the recycling of spent fluid from a plating bath comprising an outlet from a plating bath, one or more oxidation units connected to the outlet from the bath, each said oxidation unit coupled to one or more controlled sources of energy and chemical oxidants that are directed to the fl

1. A system for the recycling of spent fluid from a plating bath comprising an outlet from a plating bath, one or more oxidation units connected to the outlet from the bath, each said oxidation unit coupled to one or more controlled sources of energy and chemical oxidants that are directed to the fluid of the bath as it passes through the oxidation unit in order to break down any organics, one or more sensors for sensing the state of an oxidation reaction; an arrestor for removing chemical oxidant and thermal energy from the fluid, a scavenger for removing organics and inorganics and their residue, and an outlet from the system.