초록 ▼

A fluid bearing suitable for use in vacuum region comprises a fluid passageway for introducing a fluid into the bearing, a pump-out slot for evacuating the fluid from the bearing, and a bearing seal disposed along a periphery of the bearing to restrict fluid from escaping from the bearing into the v

A fluid bearing suitable for use in vacuum region comprises a fluid passageway for introducing a fluid into the bearing, a pump-out slot for evacuating the fluid from the bearing, and a bearing seal disposed along a periphery of the bearing to restrict fluid from escaping from the bearing into the vacuum region. The bearing seal comprises a bridge structure including a first base, a second base, a transverse member fixed at one end to the first base and movably disposed in a slot defined by the second base, and a sealing sheet extending from the transverse member between the first and second bases. The sealing sheet forms a compliant mechanical wall around the periphery of the bearing. The seal further includes an adjustable spring force element which exerts a force on the sealing sheet to ensure marginal contact with a bearing support surface to form a low-frictional seal. The sealing sheet confines the fluid which escapes outside of the pump-out slots to within the perimeter of the wall formed by the sealing sheet. The seal allows for movement of the air bearing relative to the bearing support surface and is suitable for use with an XY wafer or reticle stage. The air bearing and its seal may be adapted as a journal shaft-type bearing.

대표청구항 ▼

1. A fluid bearing assembly for bearing on a first surface, the assembly comprising:a structure having a bearing surface opposing the first surface, the structure defining: a fluid input passage terminating in the bearing surface and capable of directing fluid towards the first surface; a fluid outp

1. A fluid bearing assembly for bearing on a first surface, the assembly comprising:a structure having a bearing surface opposing the first surface, the structure defining: a fluid input passage terminating in the bearing surface and capable of directing fluid towards the first surface; a fluid output passage terminating in the bearing surface and capable of directing fluid away from the first surface; and a seal comprising a transverse member having a free end, a fixed end and a sealing sheet extending from said transverse member between the free and fixed ends toward the first surface, the fluid output passage being disposed between the seal and the fluid input passage.