초록 ▼

Improved anti-reflective coating compositions for use in integrated circuit manufacturing processes and methods of forming these compositions are provided. Broadly, the compositions are formed by heating a solution comprising a compound including specific compounds (e.g., alkoxy alkyl melamines, alk

Improved anti-reflective coating compositions for use in integrated circuit manufacturing processes and methods of forming these compositions are provided. Broadly, the compositions are formed by heating a solution comprising a compound including specific compounds (e.g., alkoxy alkyl melamines, alkoxy alkyl benzoguanamines) under acidic conditions so as to polymerize the compounds and form polymers having an average molecular weight of at least about 1,000 Daltons. The monomers of the resulting polymers are joined to one another via linkage groups (e.g., -CH2-, -CH2-O-CH2-) which are bonded to nitrogen atoms on the respective monomers. The polymerized compound is mixed with a solvent and applied to a substrate surface after which it is baked to form an anti-reflective layer. The resulting layer has high k values and can be formulated for both conformal and planar applications.

대표청구항 ▼

1. A method of preparing a polymer composition and coating a surface with the polymer composition, said method comprising the steps of:providing a dispersion including a quantity of a compound according to the formula: [EQU7]wherein each X is individually selected from the group consisting of NR2 an

1. A method of preparing a polymer composition and coating a surface with the polymer composition, said method comprising the steps of:providing a dispersion including a quantity of a compound according to the formula: [EQU7]wherein each X is individually selected from the group consisting of NR2 and phenyl groups, where each R is individually selected from the group consisting of hydrogen, alkoxyalkyl groups, carboxyl groups, and hydroxymethyl groups; adding to said dispersion from about 0.001-1 moles of an acid per liter of said dispersion; heating said dispersion to a temperature of at least about 70.degree. C. for at least about 2 hours to yield the polymer composition; mixing the resulting polymer composition with a solvent so as to form an anti-reflective coating; and applying said anti-reflective coating to the surface of a substrate to form a layer of anti-reflective coating on said substrate surface.