초록 ▼

A gas supply system including a gas cabinet defining an enclosure including therein a gas dispensing manifold and one or more adsorbent-based gas storage and dispensing vessels mounted in the enclosure and joined in gas flow communication with the gas dispensing manifold. The enclosure may be mainta

A gas supply system including a gas cabinet defining an enclosure including therein a gas dispensing manifold and one or more adsorbent-based gas storage and dispensing vessels mounted in the enclosure and joined in gas flow communication with the gas dispensing manifold. The enclosure may be maintained under low or negative pressure conditions for enhanced safety in the event of leakage of gas from the gas storage and dispensing vessel(s) in the enclosure. The gas supply system may be coupled to a gas-consuming unit in a semiconductor manufacturing facility, e.g., an ion implanter, an etch chamber, or a chemical vapor deposition reactor.

대표청구항 ▼

1. A process for supplying a gas reagent, comprising:providing a storage and dispensing vessel containing a solid-phase physical sorbent medium having a physically sorptive affinity for said gas reagent; physically sorptively loading on said solid-phase physical sorbent medium a sorbate gas, to yiel

1. A process for supplying a gas reagent, comprising:providing a storage and dispensing vessel containing a solid-phase physical sorbent medium having a physically sorptive affinity for said gas reagent; physically sorptively loading on said solid-phase physical sorbent medium a sorbate gas, to yield a sorbate gas-loaded physical sorbent medium; mounting the storage and dispensing vessel in a gas cabinet defining an enclosure including therein a gas dispensing manifold; coupling the gas storage and dispensing vessel in gas flow communication with the gas dispensing manifold; selectively desorbing sorbate gas from the sorbate gas-loaded physical sorbent medium, by reduced pressure desorption, for flow of desorbed sorbate gas into the gas dispensing manifold and dispensing thereof; wherein the solid-phase physical sorbent medium is devoid of trace components selected from the group consisting of water. metals and oxidic transition metal species in a sufficient concentration to decompose the sorbate gas in said storage and dispensing vessel.