초록 ▼

A method is disclosed for depositing diamond film on a plurality of substrates, which comprises the steps of: providing a plasma beam containing atomic hydrogen and a carbonaceous component; providing a plurality of substrates, each of the substrates having a deposited surface, the substrates being

A method is disclosed for depositing diamond film on a plurality of substrates, which comprises the steps of: providing a plasma beam containing atomic hydrogen and a carbonaceous component; providing a plurality of substrates, each of the substrates having a deposited surface, the substrates being arranged such that the beam impinges successively on a deposition surface of a first substrate and then on a deposition surface of a second substrate, the deposition surfaces of the first and second substrates being oriented with respect to each other at a non-zero angle.

대표청구항 ▼

1. A method of depositing diamond film on a plurality of substrates, comprising the steps of:providing a plasma beam containing atomic hydrogen and a carbonaceous component; providing a plurality of substrates, each of said substrates having a deposition surface, said substrates being arranged such

1. A method of depositing diamond film on a plurality of substrates, comprising the steps of:providing a plasma beam containing atomic hydrogen and a carbonaceous component; providing a plurality of substrates, each of said substrates having a deposition surface, said substrates being arranged such that said beam impinges successively on a deposition surface of a first of said substrates and then on a deposition surface of a second of said substrates; said deposition surfaces of said first and second substrates being oriented with respect to each other at a non-zero angle.