초록 ▼

A fluid control device comprises a first passageway, and a second passageway communicating therewith and having a terminating end closed with a fluid control unit or instrument. The first passageway is adapted to pass a fluid therethrough with a different fluid remaining in the second passageway. Th

A fluid control device comprises a first passageway, and a second passageway communicating therewith and having a terminating end closed with a fluid control unit or instrument. The first passageway is adapted to pass a fluid therethrough with a different fluid remaining in the second passageway. The first passageway comprises an upstream portion and a downstream portion communicating with the upstream portion at an approximate right angle therewith. The second passageway extends from a terminating end of the upstream portion of the first passageway in alignment with the upstream portion.

대표청구항 ▼

1. A fluid control device for selectively passing different fluids alternately to a massflow controller, comprising:lower and upper on-off valves including a lower valve body and an upper valve body disposed in mutually opposed integral relation, selectively operated actuator attached to each of sai

1. A fluid control device for selectively passing different fluids alternately to a massflow controller, comprising:lower and upper on-off valves including a lower valve body and an upper valve body disposed in mutually opposed integral relation, selectively operated actuator attached to each of said valve bodies for controlling fluid flow through the respective on-off valves, said lower valve body containing an inflow channel for conducting a first fluid from an exterior of said fluid control device to the actuator attached to said lower valve body, said upper valve body containing an inflow channel for conducting a second fluid from an exterior of said fluid control device to the actuator attached to said upper valve body, an outflow channel in said upper valve body having one end communicating with said actuator in said upper valve body and its other end penetrating a lower end of said upper valve body and said outflow channel being lineally straight between said actuator and said lower end of said valve body, a by-pass channel portion in said lower valve body having one end penetrating an upper end of said lower valve body and connecting with said other end of said outflow channel in said upper valve body and another end spaced closely adjacent said actuator in said lower valve body, a fluid sub-passageway in said lower valve body communicating at one end with said actuator in said lower valve body and at its other end with the other end of said by-pass channel portion, said fluid sub-passageway and said by-pass channel portion being in axial alignment through said lower valve body, a main passageway from said fluid control device to said massflow controller being disposed in said lower valve body and having one end communicating at the point of connection between said by-pass channel portion and said fluid sub-passageway in said lower valve body, and its other end opening from said lower valve body, said first fluid flowing in through said inflow channel of said lower valve body being fed to said massflow controller via said sub-passageway of said lower valve body and said main passageway of said lower valve body, and said second fluid flowing in through said inflow channel of said upper valve body being fed to said massflow controller via said outflow channel of said upper valve body, said by-pass channel portion of said lower valve body and said main passageway of said lower valve body.