초록 ▼

An apparatus for forming a coating film, comprises a coating unit for coating a sol containing dielectric particles and a first solvent on a substrate, an aging unit for changing a sol-state coating film formed on the substrate in the coating unit to a gel state, and a solvent exchange unit for appl

An apparatus for forming a coating film, comprises a coating unit for coating a sol containing dielectric particles and a first solvent on a substrate, an aging unit for changing a sol-state coating film formed on the substrate in the coating unit to a gel state, and a solvent exchange unit for applying a second solvent different from the first solvent to the coating film to replace the first solvent in the coating film with the second solvent, wherein the aging unit comprises a heating plate for heating the substrate, a cover arranged in contact with a peripheral portion of the heating plate to form a process chamber surrounding the substrate, together with-the heating plate, a vacuum adsorption mechanism for vacuum-evacuating a contact surface between the cover and the heating plate to thereby adsorb the cover to the heating plate, a chemical solution vapor supply mechanism for supplying a chemical solution vapor to the process chamber, an evacuation mechanism for evacuating the process chamber to set an inner pressure of the process chamber at a negative value, and a process chamber pressure monitor for detecting an inner pressure of the process chamber.

대표청구항 ▼

1. An apparatus for forming a coating film, comprising:a coating unit for coating a sol containing dielectric particles and a first solvent on a substrate; an aging unit for changing a sol-state coating film formed on the substrate in the coating unit to a gel state; and a solvent exchange unit for

1. An apparatus for forming a coating film, comprising:a coating unit for coating a sol containing dielectric particles and a first solvent on a substrate; an aging unit for changing a sol-state coating film formed on the substrate in the coating unit to a gel state; and a solvent exchange unit for applying a second solvent different from the first solvent to the coating film to replace the first solvent in the coating film with the second solvent, wherein the aging unit comprises a heating plate, which supports the substrate substantially horizontally, for use in heating the substrate; a cover having a peripheral portion that is in contact with a peripheral portion of the heating plate to form a process chamber surrounding the substrate, together with the heating plate; a cylinder mechanism configured to press the cover against the heating plate; an annular groove formed in the peripheral portion of the heating plate; a vacuum adsorption mechanism having an exhaust passage communicating with the annular groove, for vacuum--evacuating the annular groove, thereby adsorbing the cover to the heating plate; a chemical solution vapor supply mechanism for supplying a chemical solution vapor to the process chamber; an evacuation mechanism for evacuating the process chamber to set an inner pressure of the process chamber at a negative value; and a process chamber pressure monitor for detecting an inner pressure of the process chamber.