초록 ▼

A bowl includes a bottom wall having a generally circular shape. A sidewall extends upwardly from the bottom wall to define a cylindrical chamber. The sidewall has a projection that extends into the cylindrical chamber. The projection has a top surface that defines a step in the cylindrical chamber

A bowl includes a bottom wall having a generally circular shape. A sidewall extends upwardly from the bottom wall to define a cylindrical chamber. The sidewall has a projection that extends into the cylindrical chamber. The projection has a top surface that defines a step in the cylindrical chamber and a sloped surface that extends between the top surface and an inner surface of the sidewall. The top surface of the projection is sloped slightly downwardly. The sloped surface of the projection is oriented relative to the top surface such that extensions of the top surface and the sloped surface define an angle in a range from about 30 degrees to about 45 degrees. A spin, rinse, and dry module including the bowl and a method for loading a semiconductor wafer into a spin, rinse, and dry module also are described.

대표청구항 ▼

1. A bowl, comprising:a bottom wall having a generally circular shape; and a sidewall extending upwardly from the bottom wall to define a cylindrical chamber, the sidewall having a projection that extends into the cylindrical chamber, the projection having a top surface that defines a step in the cy

1. A bowl, comprising:a bottom wall having a generally circular shape; and a sidewall extending upwardly from the bottom wall to define a cylindrical chamber, the sidewall having a projection that extends into the cylindrical chamber, the projection having a top surface that defines a step in the cylindrical chamber and a sloped surface that extends between the top surface and an inner surface of the sidewall, the top surface being sloped slightly downwardly such that the top surface of the projection defines an angle in a range from about 2 degrees to about 5 degrees relative to a plane perpendicular to the inner surface of the sidewall, and the sloped surface being oriented relative to the top surface such that extensions of the top surface and the sloped surface define an angle in a range from about 30 degrees to about 45 degrees.