초록 ▼

A dehumidified/humidified air supply apparatus includes two sets of air passages including heating units disposed at an upstream side thereof, a dehumidifying/humidifying unit having two portions disposed at a downstream side thereof and a blower. When dehumidified air is supplied by the dehumidifyi

A dehumidified/humidified air supply apparatus includes two sets of air passages including heating units disposed at an upstream side thereof, a dehumidifying/humidifying unit having two portions disposed at a downstream side thereof and a blower. When dehumidified air is supplied by the dehumidifying/humidifying unit of the first air passage, the dehumidifying/humidifying unit is dehumidified by air which is heated by the heating unit of the second air passage. When humidified air is supplied by the heating unit of the first air passage and the dehumidifying/humidifying unit, the dehumidifying/humidifying unit is humidified by air of the second air passage. The dehumidifying/humidifying unit is moved between the first air passage and the second air passage by a driving unit.

대표청구항 ▼

1. A dehumidified/humidified air supply apparatus for use with a semiconductor production apparatus having a humidity detector that detects humidity inside of the semiconductor production apparatus, said dehumidified/humidified air supply apparatus comprising:a first air passage that passes a first

1. A dehumidified/humidified air supply apparatus for use with a semiconductor production apparatus having a humidity detector that detects humidity inside of the semiconductor production apparatus, said dehumidified/humidified air supply apparatus comprising:a first air passage that passes a first portion of air; a second air passage that passes a second portion of air; a blower that blows air into said first air passage or said second air passage; a first heater disposed so as to heat the first portion of air; a second heater disposed so as to heat the second portion of air; a dehumidifier/humidifier having two portions, said dehumidifier/humidifier comprising a dehumidifying/humidifying device and being disposed so as to receive the first portion of air that has been heated by said first heater and the second portion of air that has been heated by said second heater; a driver for moving said dehumidifying/humidifying device; and a controller, operably connected to said first heater and to said second heater, said controller being for actuating said first heater and for stopping said second heater when humidity inside of the semiconductor production apparatus is lower than a target humidity, and for stopping said first heater and for actuating said second heater when the humidity inside of the semiconductor production apparatus is higher than the target humidity, wherein said first air passage is arranged so as to circulate air in the semiconductor production apparatus, wherein said driver and said dehumidifying/humidifying device are arranged such that said driver is capable of moving said dehumidifying/humidifying device between a first position and a second position, wherein when said dehumidifying/humidifying device is in the first position, a first portion of said dehumidifying/humidifying device is disposed within said first air passage and a second portion of said dehumidifying/humidifying device is disposed within said second air passage, and wherein when said dehumidifying/humidifying device is in the second position, the first portion of said dehumidifying/humidifying device is disposed within said second air passage and the second portion of said dehumidifying/humidifying device is disposed within said first air passage.