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Method and apparatus for resolving conflicts in a substrate processing system

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G06F-007/00
출원번호 US-0336353 (1999-06-18)
발명자 / 주소
  • Hilario Oh
출원인 / 주소
  • Silicon Valley Group, Inc.
대리인 / 주소
    Wilson Sonsini Goodrich & Rosati
인용정보 피인용 횟수 : 29  인용 특허 : 9

초록

A wafer cluster tool comprising a series of processes has a scheduler which synchronizes all events in the system. Events in the cluster tool are scheduled to occur at regular, periodic intervals, thereby improving throughput and quality. The scheduler also eliminates conflicts for transportation re

대표청구항

1. A method of optimizing throughput and performance in a wafer processing system, wherein the wafer processing system includes a plurality of modules for processing individual wafers in a sequence wafers, and the wafer processing system includes a plurality of transportation resources for transport

이 특허에 인용된 특허 (9)

  1. Kline Paul J. (Richardson TX) Kilgore Michael A. (McKinney TX) Martin Cynthia C. (Charlotte NC), Apparatus and method for controlling and scheduling processing machines.
  2. Asakawa Teruo,JPX ; Shoujima Akiyoshi,JPX ; Ishizawa Shigeru,JPX, Apparatus and method for performing serial communication between master and slave devices.
  3. Starkey Sean C. (Santa Clara CA) Penstein Richard (Santa Clara CA), Facility and gas management system.
  4. Hsieh Hung-Ming,TWX ; Pan Yirn-Sheng,TWX ; Tseng Horng-Huei,TWX, Manufacturing control method for IC plant batch sequential machine.
  5. Yang Terry H.,TWX ; Chu Harry L.,TWX, Method and apparatus for dispatching lots in a factory.
  6. Weng Yi-Cherng (Tainan TWX), Method and system for dynamic dispatching in semiconductor manufacturing plants.
  7. Comer Michael R., Scheduling method for robotic manufacturing processes.
  8. Wang Qingsu ; Christian Craig William ; Crowley John B. ; Dolman Denver L., System and method for calculating cluster tool performance metrics using a weighted configuration matrix.
  9. Seaton Jay J. (Austin TX) Allen Michael (Austin TX) Landis Donald (Hollis NH) Lee Patrick (Austin TX) Linzy David (Merrimack NH) Luca Susan B. (Hollis NH), System for providing integrated monitoring, control and diagnostics functions for semiconductor spray process tools.

이 특허를 인용한 특허 (29)

  1. Englhardt, Eric A.; Rice, Michael R.; Hudgens, Jeffrey C.; Hongkham, Steve; Pinson, Jay D.; Salek, Mohsen; Carlson, Charles; Weaver, William T; Armer, Helen R., Cartesian cluster tool configuration for lithography type processes.
  2. Rice, Mike; Hudgens, Jeffrey; Carlson, Charles; Weaver, William Tyler; Lowrance, Robert; Englhardt, Eric; Hruzek, Dean C.; Silvetti, Dave; Kuchar, Michael; Katwyk, Kirk Van; Hoskins, Van; Shah, Vinay, Cartesian robot cluster tool architecture.
  3. Ishikawa, Tetsuya; Roberts, Rick J.; Armer, Helen R.; Volfovski, Leon; Pinson, Jay D.; Rice, Michael; Quach, David H.; Salek, Mohsen S.; Lowrance, Robert; Backer, John A.; Weaver, William Tyler; Carlson, Charles; Wang, Chongyang; Hudgens, Jeffrey; Herchen, Harald; Lue, Brian, Cluster tool architecture for processing a substrate.
  4. Ishikawa, Tetsuya; Roberts, Rick J.; Armer, Helen R.; Volfovski, Leon; Pinson, Jay D.; Rice, Michael; Quach, David H.; Salek, Mohsen S.; Lowrance, Robert; Backer, John A.; Weaver, William Tyler; Carlson, Charles; Wang, Chongyang; Hudgens, Jeffrey; Herchen, Harald; Lue, Brian, Cluster tool architecture for processing a substrate.
  5. Ishikawa, Tetsuya; Roberts, Rick J.; Armer, Helen R.; Volfovski, Leon; Pinson, Jay D.; Rice, Michael; Quach, David H.; Salek, Mohsen S.; Lowrance, Robert; Backer, John A.; Weaver, William Tyler; Carlson, Charles; Wang, Chongyang; Hudgens, Jeffrey; Herchen, Harald; Lue, Brian, Cluster tool architecture for processing a substrate.
  6. Ishikawa,Tetsuya; Roberts,Rick J.; Armer,Helen R.; Volfovski,Leon; Pinson,Jay D.; Rice,Michael; Quach,David H.; Salek,Mohsen S.; Lowrance,Robert; Backer,John A.; Weaver,William Tyler; Carlson,Charles; Wang,Chongyang; Hudgens,Jeffrey; Herchen,Harald; Lue,Brian, Cluster tool architecture for processing a substrate.
  7. Volfovski, Leon; Ishikawa, Tetsuya, Cluster tool substrate throughput optimization.
  8. Zugibe, Kevin; Schmidt, Douglas, Method and apparatus for measuring and improving efficiency in refrigeration systems.
  9. Zugibe, Kevin; Papar, Riyaz, Method and apparatus for optimizing refrigeration systems.
  10. Zugibe, Kevin; Papar, Riyaz, Method and apparatus for optimizing refrigeration systems.
  11. Oh, Hilario, Method and apparatus for resolving conflicts in a substrate processing system.
  12. Oh, Hilario, Method and apparatus for resolving conflicts in a substrate processing system.
  13. Taylor, Darrin; Alford, Lee, Method and system for solving an optimization problem with dynamic constraints.
  14. Sullivan, Daniel Boyd; Caldwell, Brain Neal; Smith, Adam Charles; Rankin, Jed Hickory, Multiple pattern generator integration with single post expose bake station.
  15. Torek, Kevin J.; Abbott, Todd R.; Tagg, Sandra L.; Weatherly, Amy, Photoresist processing methods.
  16. Torek, Kevin J.; Abbott, Todd R.; Tagg, Sandra; Weatherly, Amy, Photoresist processing methods.
  17. Torek, Kevin J.; Abbott, Todd R.; Tagg, Sandra; Weatherly, Amy, Photoresist processing methods.
  18. Oh, Hilario, Recipe cascading in a wafer processing system.
  19. Oh,Hilario, Recipe cascading in a wafer processing system.
  20. Babikian, Dikran; Oh, Hilario, Robot pre-positioning in a wafer processing system.
  21. Picinich, Joseph M.; Pusey, Loren W.; Lin, Jiyu C., Scheduling computer program jobs based on historical availability of resources.
  22. Hongkham, Steve S.; Englhardt, Eric A.; Rice, Michael R.; Armer, Helen R.; Wang, Chongyang Chris, Scheduling method for processing equipment.
  23. Hongkham, Steve S.; Englhardt, Eric A.; Rice, Michael R.; Armer, Helen R.; Wang, Chongyang Chris, Scheduling method for processing equipment.
  24. Wu, Naiqi; Qiao, Yan; Zhou, Mengchu, Scheduling start-up process for time-constrained single-arm cluster tools.
  25. Imai,Keiji, Semiconductor manufacturing apparatus control system.
  26. Rice, Mike; Hudgens, Jeffrey; Carlson, Charles; Weaver, William Tyler; Lowrance, Robert; Englhardt, Eric; Hruzek, Dean C.; Silvetti, Dave; Kuchar, Michael; Van Katwyk, Kirk; Hoskins, Van; Shah, Vinay, Substrate processing sequence in a Cartesian robot cluster tool.
  27. Rice, Mike; Hudgens, Jeffrey; Carlson, Charles; Weaver, William Tyler; Lowrance, Robert; Englhardt, Eric; Hruzek, Dean C.; Silvetti, Dave; Kuchar, Michael; Katwyk, Kirk Van; Hoskins, Van; Shah, Vinay, Substrate processing sequence in a cartesian robot cluster tool.
  28. Rice, Mike; Hudgens, Jeffrey; Carlson, Charles; Weaver, William Tyler; Lowrance, Robert; Englhardt, Eric; Hruzek, Dean C.; Silvetti, Dave; Kuchar, Michael; Van Katwyk, Kirk; Hoskins, Van; Shah, Vinay, Substrate processing sequence in a cartesian robot cluster tool.
  29. Picinich, Joseph M.; Pusey, Loren W.; Lin, Jiyu C., System, method and program for scheduling computer program jobs.
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