초록 ▼

When a sensor has deteriorated, the propagation time T1' of a first reflection wave becomes greater than the propagation time T1 of a first reflection wave as measured in a new sensor. If measurement of the concentration of a specific gas is based on the propagation time T1 of the first reflection w

When a sensor has deteriorated, the propagation time T1' of a first reflection wave becomes greater than the propagation time T1 of a first reflection wave as measured in a new sensor. If measurement of the concentration of a specific gas is based on the propagation time T1 of the first reflection wave as measured in the new sensor, gas concentration cannot be determined accurately. By contrast, a reflection wave other than the first reflection wave (for example, a second reflection wave) is merely reflected off the surface of the ultrasonic element and is not affected by the internal structure of the ultrasonic element. Therefore, even when the sensor is deteriorated, the propagation time T2, T2' of the second reflection wave exhibits less variation and is less susceptible to deterioration of the sensor. Therefore, the concentration of a specific gas is determined on the basis of the propagation time of the second reflection wave, which is less susceptible to deterioration of the sensor, instead of the propagation time of the first reflection wave, which is more susceptible to deterioration of the sensor. Thus, gas concentration can be measured accurately.

대표청구항 ▼

1. A gas concentration sensor which detects the gas concentration of a specific gas, comprising:a measurement chamber having a space into which the specific gas is introduced and having a reflection surface inside the chamber; an ultrasonic element for transmitting an ultrasonic wave toward the refl

1. A gas concentration sensor which detects the gas concentration of a specific gas, comprising:a measurement chamber having a space into which the specific gas is introduced and having a reflection surface inside the chamber; an ultrasonic element for transmitting an ultrasonic wave toward the reflection surface that is located inside the measurement chamber and at a predetermined distance away from the ultrasonic element; and a drive circuit for driving the ultrasonic element so as to transmit an ultrasonic wave having at least two frequency components; wherein the transmitted ultrasonic wave propagates through the gas and reflects off the reflection surface to form first and second reflection waves, the first reflection wave being the transmitted ultrasonic wave reflected at the reflection surface, the ultrasonic element reflecting the first reflection wave toward the reflection surface, and the second reflection wave being the first reflection wave reflected at the reflection surface, wherein the concentration of the specific gas is determined on the basis of an arrival time difference between the first and second reflection waves reflected at the reflection surface and arriving at the ultrasonic element, and wherein the transmitted ultrasonic wave and the first and second reflection waves each has an antiphase component, and the arrival time difference is determined by measuring a time period between the antiphase component of the first reflection wave and the antiphase component of the second reflection wave.