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Positive displacement type liquid-delivery apparatus 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F04B-043/10
출원번호 US-0627779 (2000-07-28)
우선권정보 JP-0055506 (1997-02-24); JP-0343399 (1999-12-02)
발명자 / 주소
  • Kuniaki Horie JP
  • Yukio Fukunaga JP
  • Akihisa Hongo JP
  • Kiwamu Tsukamoto JP
  • Kenji Kamoda JP
  • Hirotake Yamagishi JP
  • Shinya Uemura JP
출원인 / 주소
  • Ebara Corporation JP
대리인 / 주소
    Wenderoth, Lind & Ponack, L.L.P.
인용정보 피인용 횟수 : 78  인용 특허 : 7

초록 ▼

A positive displacement liquid-delivery apparatus includes a positive displacement pump 110 and a differential pressure control unit 142. The positive displacement pump 110 includes a liquid-delivery chamber 128 having a watertight housing 122 with one part formed of a flexible diaphragm 124, and a

대표청구항 ▼

1. A positive displacement liquid-delivery apparatus comprising:a positive displacement pump including a housing having a liquid-delivery chamber and a working space divided from said liquid-delivery chamber by a flexible diaphragm, and including a diaphragm driving unit linked to said diaphragm to

이 특허에 인용된 특허 (7)

  1. Buchwald Henry (Edina MN) Guzman Eugenio (Roseville MN) Wigness Bruce D. (Minneapolis MN), Automated peritoneovenous shunt.
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  2. Kuehne Eric R. (Cupertino CA) Hester Donald D. (Milpitas CA), Bellows-type dispensing pump.
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  3. DuBois, Chester G., Fluid driven pump with one-way valve in fluid inlet.
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  4. Ewing James H. (Lexington MA), Liquid pump and vaporizer.
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  5. Starr Maurice (Indianapolis IN), Reagent-dispensing system and method.
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  6. Hoya Takesi (997-8 ; Oaza Bushi Iruma-shi ; Saitama-ken JPX), Slurry pumping apparatus for solid-liquid separation.
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  7. Hoya Takeshi (851-1 Oaza Noda ; Iruma-shi ; Saitama-ken JPX), Viscous fluid pressure-feed apparatus.
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  18. McBride, Troy O.; Cook, Robert; Bollinger, Benjamin R.; Doyle, Lee; Shang, Andrew; Wilson, Timothy; Scott, Micheal Neil; Magari, Patrick; Cameron, Benjamin; Deserranno, Dimitri, Energy storage and generation systems and methods using coupled cylinder assemblies.
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  27. Bollinger, Benjamin R.; McBride, Troy O.; Cameron, Benjamin; Magari, Patrick; Izenson, Michael; Chen, Weibo, Heat exchange with compressed gas in energy-storage systems.
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  40. Beaman,Kevin L.; Doan,Trung T.; Breiner,Lyle D.; Weimer,Ronald A.; Ping,Er Xuan; Kubista,David J.; Basceri,Cem; Zheng,Lingyi A., Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition.
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  43. Dando, Ross S.; Gealy, Dan, Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces.
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  44. Zheng, Lingyi A.; Doan, Trung T.; Breiner, Lyle D.; Ping, Er-Xuan; Beaman, Kevin L.; Weimer, Ronald A.; Basceri, Cem; Kubista, David J., Methods for forming small-scale capacitor structures.
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  46. Pomarede, Christophe; Shero, Eric; Verghese, Mohith; Maes, Jan Willem; Wang, Chang-Gong, Methods of vapor deposition with multiple vapor sources.
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  47. Zheng,Lingyi A.; Doan,Trung T.; Breiner,Lyle D.; Ping,Er Xuan; Weimer,Ronald A.; Kubista,David J.; Beaman,Kevin L.; Basceri,Cem, Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces.
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  48. Basceri,Cem; Doan,Trung T.; Weimer,Ronald A.; Beaman,Kevin L.; Breiner,Lyle D.; Zheng,Lingyi A.; Ping,Er Xuan; Sarigiannis,Demetrius; Kubista,David J., Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces.
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  49. Basceri,Cem; Doan,Trung T.; Weimer,Ronald A.; Beaman,Kevin L.; Breiner,Lyle D.; Zheng,Lingyi A.; Ping,Er Xuan; Sarigiannis,Demetrius; Kubista,David J., Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces.
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  50. Zvuloni,Roni; Schatzberger,Shaike, Multiple cryoprobe apparatus and method.
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  51. Zvuloni, Roni; Schatzberger, Shaike, Multiple cryoprobe delivery apparatus.
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  52. Pomarede, Christophe; Shero, Eric; Verghese, Mohith; Maes, Jan Willem; Wang, Chang-Gong, Multiple vapor sources for vapor deposition.
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  53. Demers, Jason A.; Wilt, Michael J.; Grant, Kevin L.; Dale, James D.; Tracey, Brian D., Pumping cassette.
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  54. Mardian, Allen P.; Sandhu, Gurtej S., Reactive gaseous deposition precursor feed apparatus.
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  55. Dando, Ross S., Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces.
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  56. Miller, Matthew W.; Basceri, Cem, Reactors, systems and methods for depositing thin films onto microfeature workpieces.
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  57. Bollinger, Benjamin R., System and method for rapid isothermal gas expansion and compression for energy storage.
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  58. Bollinger, Benjamin R., System and method for rapid isothermal gas expansion and compression for energy storage.
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  59. McBride, Troy O.; Bollinger, Benjamin R.; Izenson, Michael; Chen, Weibo; Magari, Patrick; Cameron, Benjamin, Systems and methods for combined thermal and compressed gas energy conversion systems.
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  60. McBride, Troy O.; Bollinger, Benjamin; Izenson, Michael; Chen, Weibo; Magari, Patrick; Cameron, Benjamin, Systems and methods for combined thermal and compressed gas energy conversion systems.
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  61. McBride, Troy O.; Bollinger, Benjamin R.; Schaefer, Michael; Kepshire, Dax, Systems and methods for compressed-gas energy storage using coupled cylinder assemblies.
    상세보기
  62. Sarigiannis,Demetrius; Meng,Shuang; Derderian,Garo J., Systems and methods for depositing material onto microfeature workpieces in reaction chambers.
    상세보기
  63. McBride, Troy O.; Bollinger, Benjamin R.; Scott, Michael Neil; Cook, Robert; Magari, Patrick J., Systems and methods for efficient pumping of high-pressure fluids for energy.
    상세보기
  64. McBride, Troy O.; Bollinger, Benjamin R.; Scott, Michael Neil; Cook, Robert; Magari, Patrick, Systems and methods for efficient pumping of high-pressure fluids for energy storage and recovery.
    상세보기
  65. McBride, Troy O.; Bollinger, Benjamin R.; Bessette, Jon; Bell, Alexander; Kepshire, Dax; La Ven, Arne; Rauwerdink, Adam, Systems and methods for efficient two-phase heat transfer in compressed-air energy storage systems.
    상세보기
  66. McBride, Troy O.; Bollinger, Benjamin R.; Bessette, Jon; Bell, Alexander; Kepshire, Dax; LaVen, Arne; Rauwerdink, Adam, Systems and methods for efficient two-phase heat transfer in compressed-air energy storage systems.
    상세보기
  67. McBride, Troy O.; Bollinger, Benjamin, Systems and methods for energy storage and recovery using compressed gas.
    상세보기
  68. McBride, Troy O.; Bollinger, Benjamin R., Systems and methods for energy storage and recovery using compressed gas.
    상세보기
  69. McBride, Troy O.; Bollinger, Benjamin R., Systems and methods for energy storage and recovery using compressed gas.
    상세보기
  70. McBride, Troy O.; Bollinger, Benjamin R.; Schaefer, Michael; Kepshire, Dax, Systems and methods for energy storage and recovery using gas expansion and compression.
    상세보기
  71. McBride, Troy O.; Bollinger, Benjamin R.; Izenson, Michael; Chen, Weibo; Magari, Patrick; Cameron, Benjamin; Cook, Robert; Richter, Horst, Systems and methods for energy storage and recovery using rapid isothermal gas expansion and compression.
    상세보기
  72. McBride, Troy O.; Bollinger, Benjamin R.; Izenson, Michael; Chen, Weibo; Magari, Patrick; Cameron, Benjamin; Cook, Robert; Richter, Horst, Systems and methods for energy storage and recovery using rapid isothermal gas expansion and compression.
    상세보기
  73. McBride, Troy O.; Bollinger, Benjamin R.; Izenson, Michael; Chen, Weibo; Magari, Patrick; Cameron, Benjamin; Cook, Robert; Richter, Horst, Systems and methods for energy storage and recovery using rapid isothermal gas expansion and compression.
    상세보기
  74. Bollinger, Benjamin R.; McBride, Troy O.; Schaefer, Michael, Systems and methods for improving drivetrain efficiency for compressed gas energy storage.
    상세보기
  75. Bollinger, Benjamin R.; McBride, Troy O., Systems and methods for improving drivetrain efficiency for compressed gas energy storage and recovery systems.
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  76. McBride, Troy O.; Bollinger, Benjamin; McCormick, John; Cameron, Benjamin, Systems and methods for reducing dead volume in compressed-gas energy storage systems.
    상세보기
  77. McBride, Troy O.; Scott, Michael Neil; Bollinger, Benjamin; Shang, Andrew; Cook, Robert; Doyle, Lee, Systems and methods for reducing dead volume in compressed-gas energy storage systems.
    상세보기
  78. Kubista, David J.; Doan, Trung T.; Breiner, Lyle D.; Weimer, Ronald A.; Beaman, Kevin L.; Ping, Er-Xuan; Zheng, Lingyi A.; Basceri, Cem, Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers.
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