초록 ▼

Substrate measurement system including a measurement chamber (30), and a substrate handling chamber (7) possessing substrate transfer means (10) and a substrate container interface (1) arranged to receive a substrate container (8), the handling chamber (7) containing an interface (50) to connect the

Substrate measurement system including a measurement chamber (30), and a substrate handling chamber (7) possessing substrate transfer means (10) and a substrate container interface (1) arranged to receive a substrate container (8), the handling chamber (7) containing an interface (50) to connect the measurement chamber (30), the measurement chamber (30) containing an interface (51) to connect to the handling chamber (7), and the transfer means (10) being arranged to transfer substrates between the container (8) and the measurement chamber (30) through the handling chamber (7), in which a second measurement chamber (39) is provided, having the same interface (51) as the first measurement chamber (30) to replace the latter chamber (30).

대표청구항 ▼

1. Assembly of a substrate measurement system comprising a first measurement chamber, and a substrate handling chamber provided with substrate transfer means and a substrate container interface for receiving a substrate container, said substrate handling chamber being provided with a mechanical inte

1. Assembly of a substrate measurement system comprising a first measurement chamber, and a substrate handling chamber provided with substrate transfer means and a substrate container interface for receiving a substrate container, said substrate handling chamber being provided with a mechanical interface to connect to the first measurement chamber, said first measurement chamber comprising a measurement instrument and being provided with a mechanical interface to connect to said substrate handling chamber, and said substrate transfer means being arranged to transfer substrates between said substrate container and said first measurement chamber through said substrate handling chamber,a second measurement chamber being provided, which fits within the same dimensions as said first measurement chamber and is provided with the same identical interface as said first measurement chamber to replace said first measurement chamber.