초록 ▼

A lithography system including a reticle carrier and reticle library cassette designed for electro-static discharge (ESD) protection. A reticle carrier, such as a SMIF (Standard Mechanical Interface) pod, and reticle library cassette are fabricated largely of electrically conductive materials. Such

A lithography system including a reticle carrier and reticle library cassette designed for electro-static discharge (ESD) protection. A reticle carrier, such as a SMIF (Standard Mechanical Interface) pod, and reticle library cassette are fabricated largely of electrically conductive materials. Such materials may include polycarbonate plastic impregnated with carbon fibers or an electrically conductive stainless steel. The electrically conductive materials used to fabricate the reticle carrier and reticle library cassette may allow static electrical charges to be drained to ground, thereby preventing ESD damage to the reticles. Furthermore, the reticle carrier may incorporate rounded edges and corners, which may aid in the prevention of static charge buildup near the pod.

대표청구항 ▼

1. A reticle carrier comprising:a container portion having rounded edges and corners, said container portion fabricated from an electrically conductive material, wherein said container portion is configured to enclose a reticle library cassette containing a plurality of photolithography reticles, wh

1. A reticle carrier comprising:a container portion having rounded edges and corners, said container portion fabricated from an electrically conductive material, wherein said container portion is configured to enclose a reticle library cassette containing a plurality of photolithography reticles, wherein said reticles are secured within said library cassette with a plurality of springs, and wherein said plurality of springs are configured to apply a force to inner walls of said container portion to secure said reticles within said reticle library cassette; and, a base portion having rounded edges, said base portion fabricated from an electrically conductive material, wherein said base portion is configured to attach to said container portion.