초록 ▼

A mini-environment control device includes an individual enclosure to contain a sample and to isolate it from the external environment. An array of micropumps attached to the individual enclosure generates and maintains a controlled vacuum in the individual enclosure. Transfer means introduce the sa

A mini-environment control device includes an individual enclosure to contain a sample and to isolate it from the external environment. An array of micropumps attached to the individual enclosure generates and maintains a controlled vacuum in the individual enclosure. Transfer means introduce the sample into the individual enclosure and extract it therefrom. The micropumps of the array of micropumps can be of a type employing the thermal transpiration effect. Temperature and pressure microsensors and a gas analyzer enable the operation of the array of micropumps to be controlled by an onboard microcomputer. The atmosphere surrounding a sample is therefore controlled.

대표청구항 ▼

1. A method of testing or of transforming semiconductor substrate wafers by etching and deposition, comprising a step of:transporting each of the semiconductor substrate wafers individually in a controlled vacuum in an individual enclosure having a diameter of 200 mm to 500 mm and a thickness of 30

1. A method of testing or of transforming semiconductor substrate wafers by etching and deposition, comprising a step of:transporting each of the semiconductor substrate wafers individually in a controlled vacuum in an individual enclosure having a diameter of 200 mm to 500 mm and a thickness of 30 mm to 50 mm, with an array of micropumps fastened to said individual disclosure and configured to generate and maintain a controlled vacuum in said individual enclosure.