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Processing tool interface apparatus for use in manufacturing environment

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G06F-007/00
출원번호 US-0249752 (1999-02-12)
발명자 / 주소
  • Paul E. Lewis
  • Adel George Tannous
  • Karl A. Davlin
  • Khalid Makhamreh
출원인 / 주소
  • Honeywell International Inc.
대리인 / 주소
    Robert D. Fish
인용정보 피인용 횟수 : 23  인용 특허 : 30

초록

A method and apparatus for automated interfacing with a processing tool in a manufacturing environment having a tilt mechanism and a rotation mechanism. In one embodiment, semiconductor wafers in a cassette are presented to a processing tool by tilting the cassette during movement towards the tool.

대표청구항

1. An interface apparatus for use in a manufacturing environment having a processing tool, the interface apparatus comprising:a platform, comprising: an engagement piece adapted to secure a container, the container adapted for holding a plurality of articles; and a plate supporting the engagement pi

이 특허에 인용된 특허 (30)

  1. Tullis Barclay J. (Palo Alto CA) Bailey John S. (Sunnyvale CA) Gunawardena D. R. (Union City CA) Kaempf Ulrich (Los Altos CA), Apparatus for automated cassette handling.
  2. Boyle Edward F. (Gig Harbor WA) Wilkins G. Scott (Gig Harbor WA), Apparatus for handling sensitive material such as semiconductor wafers.
  3. Bonora Anthony C. (Menlo Park CA) Rosenquist Fred T. (Redwood City CA), Apparatus for transporting a holder between a port opening of a standardized mechanical interface system and a loading a.
  4. Schultz Klaus,DEX ; Beckert Harald,DEX ; Lahne Berndt,DEX ; Heinze Manfred,DEX, Arrangement for handling wafer-shaped objects.
  5. Maney George A. (Palo Alto CA) Faraco W. George (Saratoga CA) Parikh Mihir (San Jose CA), Box door actuated retainer.
  6. Parikh Mihir (San Jose CA) Bonora Anthony C. (Menlo Park CA) Faraco W. George (Saratoga CA) Huang Barney H. (Sunnyvale CA), Container having disposable liners.
  7. Scheler Werner (Jena DEX) Lahne Berndt (Jena DEX) Mages Andreas (Jena DEX) Michl Uwe (Jena DEX) Gemkow Eberhard (Jena DEX) Schulz Alfred (Jena DEX), Device for coupling loading and unloading devices with semiconductor processing machines.
  8. Lahne Berndt (Jena DEX) Schultz Klaus (Jena DEX) Scheler Werner (Jena DEX) Heitmann Michael (Jena DEX) Gaglin Axel (Jena DEX), Device for handling disk-shaped objects in a handling plane of a local clean room.
  9. Adler Erich (Jena DEX) Mages Marlies (Jena DEX), Device for transporting wafer magazines.
  10. Bonora Anthony C. (Menlo Park CA) Oen Joshua T. (Newark CA), Direct loadlock interface.
  11. Hunter William R. (Garland TX), Fabrication of submicron semiconductor devices.
  12. Maney George A. (Sunnyvale CA) Bonora Anthony C. (Menlo Park CA) Parikh Mihir (San Jose CA) Brain Michael D. (Oakland CA), Intelligent system for processing and storing articles.
  13. Maney George A. (Sunnyvale CA) Bonora Anthony C. (Menlo Park CA) Parikh Mihir (San Jose CA) Brain Michael D. (Oakland CA), Intelligent waxer carrier.
  14. Bonora Anthony C. (Menlo Park CA) O\Sullivan Andrew W. (Gilroy CA), Long arm manipulator for standard mechanical interface apparatus.
  15. Bonora Anthony C. (Menlo Park CA) O\Sullivan Andrew W. (Gilroy CA), Manipulator for standard mechanical interface apparatus.
  16. Bonora Anthony C. (Menlo Park CA) Guerre Gilles (Les Loges en Josas CA FRX) Parikh Mihir (San Jose CA) Rosenquist ; Jr. Frederick T. (Redwood City CA) Jain Sudhir (Milpitas CA), Method and apparatus for transferring articles between two controlled environments.
  17. Bonora Anthony C. (Menlo Park CA) Guerre Gilles (Les Loges en Josas CA FRX) Parikh Mihir (San Jose CA) Rosenquist Frederick T. (Redwood City CA) Jain Sudhir (Santa Clara CA), Method and apparatus for transferring articles between two controlled environments.
  18. Bonora Anthony C. (Menlo Park CA) Guerre Gilles (Les Loges en Josas FRX) Parikh Mihir (San Jose CA) Rosenquist ; Jr. Frederick T. (Redwood City CA) Jain Sudhir (Milpitas CA), Method and apparatus for transferring articles between two controlled environments.
  19. Bonora Anthony C. ; Neads Michael A. ; Oen Joshua T., Method and apparatus for vertical transfer of a semiconductor wafer cassette.
  20. Maney George A. (Sunnyvale CA) Bonora Anthony C. (Menlo Park CA) Parikh Mihir (San Jose CA) Brain Michael D. (Oakland CA), Processing systems with intelligent article tracking.
  21. Rongo Robert ; Saunders Michael J., Removable robotic sensor assembly.
  22. Bonora Anthony C. (Menlo Park CA) Fosnight William J. (Newark CA) Martin Raymond S. (San Jose CA) Rhine Bruce C. (Fremont CA), SMIF port interface adaptor.
  23. Parikh Mihir (San Jose CA) Bonora Anthony C. (Menlo Park CA), Sealable transportable container having a particle filtering system.
  24. Bonora Anthony C. (Menlo Park CA) Rosenquist Frederick T. (Redwood City CA), Sealable transportable container having improved latch mechanism.
  25. Bonora Anthony C. (Menlo Park CA) Rosenquist Frederick T. (Redwood City CA) Jain Sudhir (Milpitas CA) Davis Mark R. (Campbell CA), Sealable transportable container having improved liner.
  26. Bonora Anthony C. (Menlo Park CA) Wartenbergh Robert P. (Woodside CA) Jain Sudhir (Fremont CA) Davis Mark R. (Mountain View CA), Sealable transportable container having improved liner.
  27. Bonora Anthony C. (Menlo Park CA), Short arm manipulator for standard mechanical interface apparatus.
  28. Walker Delroy (Springdale MD) Zihmer Joseph (Frederick MD) Furches Danny (Columbia MD) Garmer Christopher J. (Rockville MD), System for transferring articles between controlled environments.
  29. Elliott David J. (147 Rice Rd. Wayland MA 01778), Transport containers for semiconductor wafers.
  30. Bonora Anthony C. ; Wartenbergh Robert P. ; Gomes Christopher, Two stage valve for charging and/or vacuum relief of pods.

이 특허를 인용한 특허 (23)

  1. Rachkov,Rossen Atanassov, Adjustable micro device feeder.
  2. Castantini, James S.; Tao, Tent-Chao D.; Madden, Erin M.; Polner, Donald N., Airflow management for particle abatement in semiconductor manufacturing equipment.
  3. Jun-Bo Chen TW; Kuo-Chen Lin TW; Chi-Pong Chiang TW, Apparatus for preventing misplacement of a cassette pod onto a process machine.
  4. Baxter, Vincent A.; Wilson, Daniel J., Cassette clamp mechanism.
  5. Baxter, Vincent A.; Wilson, Daniel J., Cassette clamp mechanism.
  6. Fang, Henry; Chen, Chung-Hsin, Dispatching method of manufacturing integrated circuit.
  7. Bolotin, Lev M., Feeder/programming/loader system.
  8. Finkowski, James W.; Gustafson, Craig E.; Arlinghaus, Mark E.; Stenvik, Ralph; Usgaard, Dennis B., Food packaging with vertical to horizontal transfer loading.
  9. Finkowski, James W.; Gustafson, Craig E.; Arlinghaus, Mark E.; Stenvik, Ralph; Usgaard, Dennis B., Food packaging with vertical to horizontal transfer loading.
  10. Contes, Andrew N., Invertible front opening unified pod.
  11. Heerens, Gert-Jan, Mask transport system configured to transport a mask into and out of a lithographic apparatus.
  12. Toprac, Anthony J., Method and apparatus for control for semiconductor processing for reducing effects of environmental effects.
  13. Englhardt,Eric A., Method and apparatus for undocking substrate pod with door status check.
  14. Ottmann, Marc, Method of sorting containers.
  15. Tanaka, Akira; Kishi, Takashi, Power supply apparatus for supplying electric power to substrate carrier container.
  16. Rider, Gavin Charles; Durben, Joseph A.; Lindsley, Robert K., Reduction of electric-field-induced damage in field-sensitive articles.
  17. Cho,Sungmin; Reimer,Peter; Seidl,Vincent, Semiconductor substrate damage protection system.
  18. Martin, Raymond S., Smart load port with integrated carrier monitoring and fab-wide carrier management system.
  19. Tseng, Min-Tsang, Static electricity prevention device.
  20. Nozawa, Toshihisa; Matsuoka, Takaaki, Substrate processing apparatus.
  21. Mitsuhashi,Naofumi, Test apparatus and test module.
  22. Heerens, Gert-Jan; Van De Ven, Bastiaan Lambertus Wilhelmus Marinus; Lansbergen, Robert Gabriel Maria; Ham, Erik Leonardus, Transfer method for a mask or substrate, storage box, apparatus adapted for use in such method, and device manufacturing method including such a transfer method.
  23. Wu,Kung Chris; Sifuentes,Robert Frank; Hardy,Kenneth Alan; Caliboso,Edgardo A.; Malobrodsky,Anatoly; Huang,Chien Rong, Universal reticle transfer system.
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