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A cathode assembly for magnetron sputtering of a workpiece, and sputtering apparatus and methods of sputtering using same are provided. The cathode assembly includes a tubular cathode, which may be cylindrical in cross section along its length, or which may be curved or flexible, depending on the sh

A cathode assembly for magnetron sputtering of a workpiece, and sputtering apparatus and methods of sputtering using same are provided. The cathode assembly includes a tubular cathode, which may be cylindrical in cross section along its length, or which may be curved or flexible, depending on the shape of workpiece that is to be sputtered, and which has a sputtering length of Ls. The cathode assembly also includes a magnet package, or a plurality of spaced magnet packages, each magnet package including either one magnet or a plurality of spaced magnets of alternating polarity, and having a magnet package length Lpkg which is less than Ls. The cathode assembly further includes one or more means for positioning, and preventing radial displacement of, the cathode along the axis of symmetry of the cathode. The magnet package is held within the cathode such that a driving force applied to the magnet package or to the cathode, or to both independently, imparts relative longitudinal movement between the magnet package and the cathode. The cathode assembly preferably includes cooling means. Furthermore, the magnet package(s) is preferably held within the cathode for shuttle movement. The cathode assembly allows for variations of one or more of the magnet package length, number, and spacing, and the relative displacement distance or shuttle distance, in order to tailor the erosion profile along the axis of symmetry of the cathode.

대표청구항 ▼

1. A cathode assembly for magnetron sputtering inside an annular cavity of a hollow, curved workpiece having a non-linear axis of symmetry, comprising: a tubular cathode having a sputtering length of Ls, and being generally curved along a non-linear axis of symmetry to follow the non-linear axis of

1. A cathode assembly for magnetron sputtering inside an annular cavity of a hollow, curved workpiece having a non-linear axis of symmetry, comprising: a tubular cathode having a sputtering length of Ls, and being generally curved along a non-linear axis of symmetry to follow the non-linear axis of symmetry of the annular cavity of the workpiece;one or a plurality of magnets held within the cathode such that a driving force applied to said one or a plurality of magnets imparts relative longitudinal movement between said one or a plurality of magnets and the cathode; and in the case of a plurality of magnets, said plurality of magnets being arranged in either i. one magnet package as spaced magnets of alternating polarity, or ii. in more than one magnet package with each magnet package including one magnet, or a plurality of spaced magnets arranged with alternating polarity.