초록 ▼

An apparatus and method for vaporizing and delivering liquid precursors to a processing chamber is provided. In one aspect, the apparatus is a liquid delivery system including a liquid supply, a vaporization assembly fluidicly coupled to the liquid supply, the vaporization assembly consisting essent

An apparatus and method for vaporizing and delivering liquid precursors to a processing chamber is provided. In one aspect, the apparatus is a liquid delivery system including a liquid supply, a vaporization assembly fluidicly coupled to the liquid supply, the vaporization assembly consisting essentially of an ampoule and a mass flow controller connected to the ampoule, and a processing chamber fluidicly coupled to the vaporization assembly. The liquid precursor is vaporized in the ampoule. In a preferred embodiment, the ampoule is located adjacent the processing chamber to provide point of use vaporization of the liquid precursor. In another aspect, the method includes providing a liquid supply containing a liquid precursor, delivering the precursor to an ampoule, vaporizing a portion of the liquid precursor in the ampoule, and flowing vaporized precursor to a processing chamber.

대표청구항 ▼

1. A method for vaporizing a liquid precursor for delivery to a processing chamber, comprising:providing a liquid supply containing a liquid precursor and an ampoule coupled to the liquid supply; delivering the liquid precursor to the ampoule, wherein delivering the liquid precursor to the ampoule c

1. A method for vaporizing a liquid precursor for delivery to a processing chamber, comprising:providing a liquid supply containing a liquid precursor and an ampoule coupled to the liquid supply; delivering the liquid precursor to the ampoule, wherein delivering the liquid precursor to the ampoule comprises pressurizing the liquid supply by a thermal process to a first pressure higher than a second pressure in the ampoule and flowing the liquid precursor to the ampoule by a first pressure differential; vaporizing a portion of the liquid precursor in the ampoule; and flowing vaporized precursor to a processing chamber coupled to the ampoule.