초록 ▼

A material handling and transport system and process for moving a substrate carrier between storage and processing destinations are provided. The system includes a vehicle that runs on a support structure, such as a pathway or a track assembly supported on the floor, which may be in a pressurized tu

A material handling and transport system and process for moving a substrate carrier between storage and processing destinations are provided. The system includes a vehicle that runs on a support structure, such as a pathway or a track assembly supported on the floor, which may be in a pressurized tunnel. A carrier nest on the vehicle receives and supports the carrier. A lifting mechanism on the vehicle vertically raises and lowers the carrier nest. A load port support surface is disposed vertically above the support structure. The carrier is raised through an opening in the load port support surface. A load port nest on the load port support surface receives and supports the carrier adjacent a selected destination. A carrier manipulation mechanism manipulates the carrier over the load port nest. The lifting mechanism then lowers the carrier onto the load port nest. The system is particularly suited for handling and transporting semiconductor wafer carriers.

대표청구항 ▼

1. A material handling and transport system for moving material supported by a carrier between storage and processing destinations, comprising:a vehicle configured to run on a support structure and comprising: a carrier nest configured to receive and support a carrier capable of holding a material t

1. A material handling and transport system for moving material supported by a carrier between storage and processing destinations, comprising:a vehicle configured to run on a support structure and comprising: a carrier nest configured to receive and support a carrier capable of holding a material to be transported, the carrier nest comprising a plurality of pins configured to mate with corresponding recesses on a bottom surface of the carrier; and a lifting mechanism operative to vertically raise and lower the carrier nest; a load port support surface disposed vertically above the support structure, an opening provided in the load port support surface sized to allow vertical passage of the carrier therethrough; a load port nest on the load port support surface configured to receive and support the carrier adjacent a selected destination; and a carrier manipulation mechanism operative to manipulate the carrier from a raised position on the carrier nest and elevated through the opening in the support surface to a load position on the load port nest.