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Micromachined two dimensional array of piezoelectrically actuated flextensional transducers 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-041/08
출원번호 US-0795812 (2001-02-27)
발명자 / 주소
  • Gokhan Per.cedilla.in
  • Butrus Thomas Khuri-Yakub
출원인 / 주소
  • The Board of Trustees of the Leland Stanford Junior University
대리인 / 주소
    Dorsey & Whitney LLP
인용정보 피인용 횟수 : 39  인용 특허 : 15

초록

A transducer suitable for ultrasonic applications, fluid drop ejection and scanning force microscopy. The transducer comprises a thin piezoelectric ring bonded to a thin fully supported clamped membrane. Voltages applied to said piezoelectric ring excite axisymmetric resonant modes in the clamped me

대표청구항

1. A two-dimensional array of piezoelectrically actuated flextensional fluid drop ejectors comprising:a plurality of membranes of semiconductor material having a selected area, said membranes each including one or more apertures, a support structure engaging the outer edges of each of said membranes

이 특허에 인용된 특허 (15)

  1. Carter Robert E. (Auburndale MA) Murphy Donald R. (Wellesley MA), Aerosol dispenser.
  2. Hayes John B. (Tucson AZ) Jahanmir Jamshid (Tucson AZ) Frey Eric M. (Tucson AZ), Compact temperature-compensated tube-type scanning probe with large scan range and independent x, y, and z control.
  3. Khuri-Yakub Butrus Thomas ; Levin Laurent,FRX, Fluid drop ejector and method.
  4. Fischbeck Kenneth H. (Dallas TX) Vernon Richard H. (Richardson TX), High density linear array ink jet assembly.
  5. Muller Richard S. (Kensington CA) Kim Eun S. (Berkeley CA), IC processed piezoelectric microphone.
  6. Robertson Paul A. (Chishall GB3) Houzego Peter J. (Oakington GB3) Jensen Borge R. (Brussels BEX) Creeke Murray A. (Saffron Walden GB3) Emerton Neil (Riverside GB3) Hodson Peter D. (Trowell GB3) Baum , Inhaler.
  7. Woodruff, Gary W.; Smits, Johannes G., Micro-beam tactile sensor for the measurement of vertical position displacement.
  8. Percin Gokhan ; Khuri-Yakub Butrus Thomas, Micromachined two dimensional array of piezoelectrically actuated flextensional transducers.
  9. Takeuchi Yukihisa (Nishikamo-Gun JPX) Kimura Koji (Nagoya JPX) Kurashina Mitsuru (Nagoya JPX), Piezoelectric device.
  10. Maehara Naoyoshi (Nara JPX) Hashido Kenkichi (Yamatokoriyama JPX) Hirata Hiroshi (Nara JPX), Piezoelectric oscillated nozzle.
  11. Takahata Daisuke (Kawajima), Piezoelectric oscillation assembly including several individual piezoelectric oscillation devices having a common oscill.
  12. Elings Virgil B. (Santa Barbara CA) Gurley John A. (Santa Barbara CA), Positioning device for a scanning tunneling microscope.
  13. Fischbeck ; Kenneth H., Separable liquid droplet instrument and piezoelectric drivers therefor.
  14. Carson Paul L. (5903 Fox Hollow Ct. Ann Arbor MI 48105) Fitting Dale W. (2785 Heather Rd. Golden CO 80401) Robinson Andrew L. (2765 Manchester Rd. Ann Arbor MI 48104) Terry ; Jr. Fred L. (1410 Judd R, Ultrasonic image sensing array and method.
  15. Maehara Naoyoshi (Nara JPX), Ultrasonic liquid ejecting apparatus.

이 특허를 인용한 특허 (39)

  1. Degertekin, F. Levent, Asymmetric membrane cMUT devices and fabrication methods.
  2. Baumgartner, Charles E.; Mills, David M.; Lewandowski, Robert S.; Smith, Lowell Scott; Wildes, Douglas G., Backing material for micromachined ultrasonic transducer devices.
  3. Schneider, John K.; Kitchens, Jack C., Biometric scanner with waveguide array.
  4. Degertekin, Fahrettin Levent, Cantilevers with integrated actuators for probe microscopy.
  5. Oliver, Nelson H.; Walters, Worth B., Digital capacitive membrane transducer.
  6. Degertekin,Fahrettin Levent; Lee,Wook; Hall,Neal Allen, Displacement sensor employing discrete light pulse detection.
  7. Hall, Neal Allen; Degertekin, Fahrettin Levent, Displacement-measuring optical device with orifice.
  8. Pinkerton, Joseph F.; Harlan, John C., Electrical assemblies using molecular-scale electrically conductive and mechanically flexible beams and methods for application of same.
  9. Pinkerton,Joseph F.; Harlan,John C., Electrical assemblies using molecular-scale electrically conductive and mechanically flexible beams and methods for application of same.
  10. Pinkerton,Joseph F; Harlan,John C, Electromechanical assemblies using molecular-scale electrically conductive and mechanically flexible beams and methods for application of same.
  11. Pinkerton,Joseph F, Energy conversion systems using nanometer scale assemblies and methods for using same.
  12. Pinkerton,Joseph F, Energy conversion systems using nanometer scale assemblies and methods for using same.
  13. Pinkerton,Joseph F.; Harlan,John C, Energy conversion systems utilizing parallel array of automatic switches and generators.
  14. Pinkerton,Joseph F.; Harlan,John C., Energy conversion systems utilizing parallel array of automatic switches and generators.
  15. Degertekin, F. Levent, Harmonic cMUT devices and fabrication methods.
  16. Degertekin, F. Levent, Harmonic cMUT devices and fabrication methods.
  17. Degertekin,Fahrettin Levent; Hall,Neal Allen; Lee,Wook, Highly-sensitive displacement-measuring optical device.
  18. Degertekin,Fahrettin Levent; Hall,Neal Allen; Lee,Wook, Highly-sensitive displacement-measuring optical device.
  19. Schneider, John Keith; Kitchens, II, Jack Conway, Large area ultrasonic receiver array.
  20. Schneider, John K.; Kitchens, Jack C., Longitudinal pulse wave array.
  21. Neumann, Jr.,John J.; Gabriel,Kaigham J., MEMS digital-to-acoustic transducer with error cancellation.
  22. Baumgartner,Charles E.; Mills,David M.; Lewandowski,Robert S.; Smith,Lowell Scott; Wildes,Douglas G., Method of manufacturing ultrasound transducer device having acoustic backing.
  23. Wang, Yunlong, Micromachined fluid ejector array.
  24. Smith,Lowell Scott; Wildes,Douglas G., Micromachined ultrasonic transducer cells having compliant support structure.
  25. Smith,Lowell Scott; Wildes,Douglas G., Micromachined ultrasonic transducer cells having compliant support structure.
  26. Wenzel, Stuart W.; Costello, Benedict J., Micropump.
  27. Degertekin, F. Levent, Multiple element electrode cMUT devices and fabrication methods.
  28. Degertekin, F. Levent, Multiple element electrode cMUT devices and fabrication methods.
  29. Pinkerton,Joseph F.; Mullen,Jeffrey D., Nanoelectromechanical memory cells and data storage devices.
  30. Pinkerton,Joseph F; Mullen,Jeffrey D, Nanoelectromechanical memory cells and data storage devices.
  31. Pinkerton, Joseph F., Nanoelectromechanical systems and methods for making the same.
  32. Pinkerton, Joseph F., Nanoelectromechanical systems and methods for making the same.
  33. Pinkerton,Joseph F.; Harlan,John C.; Mullen,Jeffrey D., Nanoelectromechanical transistors and switch systems.
  34. Pinkerton, Joseph F.; Mullen, Jeffrey D., Nanometer-scale electrostatic and electromagnetic motors and generators.
  35. Grosh, Karl; Littrell, Robert J., Piezoelectric MEMS microphone.
  36. Green, Revvie A., Piezoelectric wafer clamping system.
  37. Karanfilov, Christopher I., Single cell isolation apparatus and method of use.
  38. Degertekin,Fahrettin L.; Kurfess,Thomas R.; Kim,Byungki; Razavi,Hosein Ali, System and method for surface profiling a target object.
  39. Sammoura, Firas; Kim, Sang-Gook, Tunable ultrasound transducers.
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