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System and method for a variable gain proportional-integral (PI) controller

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G05D-011/00
  • G05D-007/00
출원번호 US-0351098 (1999-07-10)
발명자 / 주소
  • Emmanuel Vyers
출원인 / 주소
  • Mykrolis Corporation
대리인 / 주소
    Gray Cary Ware & Freidenrich
인용정보 피인용 횟수 : 31  인용 특허 : 15

초록

A method for generating a valve drive signal using a variable gain PI controller in a mass flow controller. The method includes multiplying an error signal with a proportional gain factor to generate a proportional signal. The method also includes implementing an integral function on the error signa

대표청구항

1. A method for generating a valve drive signal using a variable gain PI controller in a mass flow controller, said method comprising the a steps of:multiplying an error signal by a proportional gain factor to generate a proportional signal; implementing an integral function including an integral ga

이 특허에 인용된 특허 (15)

  1. Federspiel Clifford C., Adaptive flow controller for use with a flow control system.
  2. Olsson Sven-Gunnar (Arloev SEX) Skog Goeran (Bromma SEX) Dahlstroem Bo (Vaellingby ; SEX) Linden Dan (Stockholm SEX) Cewers Goeran (Lund SEX) Iderup Mats (Malmoe SEX) Rydgren Goeran (Bunkeflostrand S, Apparatus for regulating the flow-through amount of a flowing medium.
  3. Hiroi Kazuo (Hachiooji JPX), Digital control system.
  4. Levesque ; Jr. Adelard (North Palm Beach FL), Dynamic compensation for multi-loop controls.
  5. Bitterli William W. (Simsbury CT) Games John E. (Granby CT) Healey David M. (Feeding Hills MA), Energy conservative control of terminal reheat heating, ventilating, and air conditioning (HVAC) systems.
  6. Farmer Edward J. (839 Shoreside Dr. Sacramento CA 95825), Flow compensated computing controller.
  7. Mudd Daniel T., Flow controller, parts of flow controller, and related method.
  8. Mudd Daniel T. (Long Beach CA), Flow controller, parts of flow controller, and related method.
  9. Shinskey Francis G. (Foxboro MA), Method and apparatus for adaptive deadtime process control.
  10. McMillin Brian K. ; Kaveh Farro F. ; Barnes Michael S., Method and apparatus for pressure control in vacuum processors.
  11. Gustafson Alan D. (Eden Prairie MN) Naley Lowell B. (Minnetonka MN) Christiansen David A. (Bloomington MN) Hoium Stanley O. (Eagan MN) Harrington Robert L. (Eden Prairie MN) Johnson Dannis R. (Savage, Method of controlling the capacity of a transport refrigeration system.
  12. Mudd Daniel T., Method of making a flow controller.
  13. Meihofer Edward (Merced CA), Register control system, particularly for off-line web finishing.
  14. Isaza Fernando J. (San Marcos CA) Wong Stanley Y. (Oceanside CA), System and method for controlling a periodically actuated ventilation flow system.
  15. Ahmed Osman (Madison WI) Bradley Steven A. (Prairie Village KS), System for controlling the differential pressure of a room having laboratory fume hoods.

이 특허를 인용한 특허 (31)

  1. Smirnov, Alexei V., Adaptive response time closed loop control algorithm.
  2. McCoy,Gerard L., Aircraft cabin pressure control system and method for reducing outflow valve actuator induced cabin pressure oscillations.
  3. Syed, Asif A.; Leutheuser, Andrew H.; Lin, Jian; Lograsso, Joseph M.; Matthe′, Roland, Excessive current detection controls method.
  4. Goto, Hiroomi; Inoue, Tsunehiro; Mori, Takahiro, Feedback control apparatus.
  5. Ohtsuki, Haruaki; Sonoda, Masashi, Flow control apparatus and program.
  6. Santinanavat, Mike C.; Panimadai Ramaswamy, Shweta Annapurani; Broker, John F.; Stark, Mark H., Gas valve and method of control.
  7. Santinanavat, Mike C.; Panimadai Ramaswamy, Shweta Annapurani; Broker, John F.; Stark, Mark H., Gas valve and method of control.
  8. Slupphaug, Olav; Kristiansen, Dag; Bjune, Bjørn; Kristiansen, Veslemøy; Moe, Jostein, Method and a system for feedback control or monitoring of an oil or gas production system and computer program product.
  9. Tinsley,Kenneth E.; Tariq,Faisal, Method and system for a mass flow controller with reduced pressure sensitivity.
  10. Soshi, Masakazu; Ishii, Shinji; Yamazaki, Kazuo, Method of machining workpiece with machine tool.
  11. Lull, John Michael; Wang, Chiun; Saggio, Jr., Joseph A., Methods and apparatus for pressure compensation in a mass flow controller.
  12. Lull,John Michael; Wang,Chiun; Saggio, Jr.,Joseph A., Methods and apparatus for pressure compensation in a mass flow controller.
  13. Lull,John Michael; Wang,Chiun; Saggio, Jr.,Joseph A., Methods and apparatus for pressure compensation in a mass flow controller.
  14. Lull,John Michael; Wang,Chiun; Saggio, Jr.,Joseph A., Methods and apparatus for pressure compensation in a mass flow controller.
  15. Tondolo, Flavio; Valoti, Roberto, Modified proportional integral derivative controller.
  16. Smirnov, Alexei V., Multi-mode control algorithm.
  17. Smirnov, Alexei V.; Westra, Michael Lynn; Widener, Demitri, Multi-mode control loop with improved performance for mass flow controller.
  18. Oks,Vladimir I., Servo control system.
  19. Hull,Gerry Glancy; Tom,Steven Treece; Saar,Raynold Lee, Slop predictive control and digital pid control for a variable temperature control system.
  20. Hull, Gerry Glancy; Tom, Steven Treece; Saar, Raynold Lee, Slope predictive control and digital PID control.
  21. Hull, Gerry Glancy; Tom, Steven Treece; Saar, Raynold Lee, Slope predictive control and digital PID control.
  22. Hull, Gerry Glancy; Tom, Steven Treece; Saar, Raynold Lee, Slope predictive control and digital PID control.
  23. Hull,Gerry Glancy; Tom,Steven Treece; Saar,Raynold Lee, Slope predictive control and digital PID control.
  24. Hull, Gerry Glancy; Tom, Steven Treece; Saar, Raynold Lee, Slope predictive control and digital PID control for a variable temperature control system.
  25. Santinanavat, Mike C.; Butler, William P.; Atri, Jagdish C.; Jensen, Ryan D., Stepper motor gas valve and method of control.
  26. Vyers, Emmanuel, System and method for a digital mass flow controller.
  27. Lull, John M.; Wang, Chiun; Valentine, William S.; Saggio, Jr., Joseph A., System and method for a mass flow controller.
  28. Lull,John M.; Wang,Chiun; Valentine,William S.; Saggio, Jr.,Joseph A., System and method for a mass flow controller.
  29. Lull,John M; Wang,Chiun; Valentine,William S; Saggio, Jr.,Joseph A, System and method for a mass flow controller.
  30. Lull,John M; Wang,Chiun; Valentine,William S; Saggio, Jr.,Joseph A, System and method for a mass flow controller.
  31. Kieman, Steve; Honigford, David, System and method for tuning the weight control of a flow of material.
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