초록 ▼

A semiconductor processing system has a liquid chemical metering and delivery system including a process tank and a metering vessel. Fluid level detectors detect the fluid level in the process tank and metering vessel. A two stage fill valve fills the metering vessel from bottom to top. A dispense v

A semiconductor processing system has a liquid chemical metering and delivery system including a process tank and a metering vessel. Fluid level detectors detect the fluid level in the process tank and metering vessel. A two stage fill valve fills the metering vessel from bottom to top. A dispense valve dispenses the metered contents of the vessel into a process tank via gravity, to form a chemical solution in the process tank, with high mixing accuracy. The volumes of the metering vessel and process tank and the inflow and outflow rates are set to provide 100% up time to a process chamber which uses the chemical solution to process semiconductor wafers or other flat media.

대표청구항 ▼

1. A system for delivering a liquid to a processing chamber comprising:a process tank; a metering vessel; a metering vessel liquid level detector for detecting a liquid level in the metering vessel; a dispense valve for dispensing liquid from the metering vessel into the process tank; and a fill val

1. A system for delivering a liquid to a processing chamber comprising:a process tank; a metering vessel; a metering vessel liquid level detector for detecting a liquid level in the metering vessel; a dispense valve for dispensing liquid from the metering vessel into the process tank; and a fill valve assembly for filling the metering vessel, the fill valve assembly including a first fill valve having a first orifice and a second fill valve, having a second orifice and the second valve also having a third orifice which is always open, with the third orifice smaller than the first orifice.