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Filters employing porous strongly acidic polymers 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B01D-053/02
출원번호 US-0378180 (1999-08-20)
발명자 / 주소
  • Oleg Kishkovich
  • Robert W. Rezuke
  • Devon Kinkhead
출원인 / 주소
  • Extraction Systems, Inc.
대리인 / 주소
    Bowditch & Dewey, LLP
인용정보 피인용 횟수 : 12  인용 특허 : 38

초록 ▼

A clean, high efficiency, low pressure drop, adsorptive filter material that is porous and includes an acidic functional group. The filter can include, for example, a non-woven filter composite has a porous sulfonated divinyl benzene styrene copolymer beads having sulfonic acid functional side group

대표청구항 ▼

1. A fluid-permeable filter for a semiconductor processing tool comprising:a porous particulate divinyl benzene styrene material formed with a copolymer having a sulfonic acid group such that the group can react with a reagent; and a filter element having the porous particulate material, the filter

이 특허에 인용된 특허 (38)

  1. Kuma Toshimi,JPX ; Shirahama Noriaki,JPX ; Izumi Hiroaki,JPX, Adsorber for humidity and odorous gas exchange.
    상세보기
  2. Von Blcher Hasso (Columbusstrasse 58 D-4000 Dsseldorf 1 DEX) de Ruiter Ernest (Hhenstrasse 57a D-5090 Leverkusen 3 DEX), Adsorption filter with high air permeability.
    상세보기
  3. Hagiwara Shigeru (Kawasaki JPX) Tokuda Noriaki (Kawasaki JPX), Air cleaning apparatus used for an exposure apparatus.
    상세보기
  4. Osendorf Richard J., Air filter element; assembly; and, method.
    상세보기
  5. Kinkead Devon A. (Cumberland RI), Air filtering within clean environments.
    상세보기
  6. Economy James (Urbana IL) Kim Dong-pyo (Urbana IL), Borazine oligomers and composite materials including boron nitride and methods of making the same.
    상세보기
  7. Kinkead Devon A. (10 Hector Ave. Cumberland RI 02864) Rezuke Robert W. (127 Worcester Rd. North Grafton MA 01536) Higley John K. (14 Saddlebrook Rd. Sherborn MA 01770), Clean room air filtering.
    상세보기
  8. Economy James ; Daley Michael, Coated absorbent fibers.
    상세보기
  9. Shimomai Akiro (Iwakuni JA) Fujimoto Iwao (Waki JA) Hamana Isao (Iwakuni JA) Katayama Kiyoji (Tokyo JA), Conjugate fiber, fibrous material and fibrous article made therefrom and process for production thereof.
    상세보기
  10. Kinkead Devon A. (Cumberland RI), Controlling air quality.
    상세보기
  11. Matsumoto Yukako (Kawasaki JPX) Miyaji Akira (Tokyo JPX), Exposure apparatus.
    상세보기
  12. Groeger H. Gunter (Charlotte NC) Serad George A. (Charlotte NC) Felton Clinton D. (Charlotte NC), Fibrous structures containing immobilized particulate matter.
    상세보기
  13. Groeger H. Gunter (Charlotte NC) Serad George A. (Charlotte NC) Felton Clinton D. (Charlotte NC), Fibrous structures containing particulate and including microfiber web.
    상세보기
  14. Vaughn Walter L. (Lake Jackson TX) McKeand ; Jr. Thomas J. (Clute TX), Filters employing particulate porous polymers.
    상세보기
  15. McCleary Roger W. (Salem NH), Illuminator for microlithographic integrated circuit manufacture.
    상세보기
  16. Osendorf Richard J. (North St. Paul MN), Layered air filter medium having improved efficiency and pleatability.
    상세보기
  17. Litwin William S. ; McKeon James, Method and apparatus for the absorption of non-polar organic molecules on hydrocarbon block copolymers.
    상세보기
  18. Shimizu Hiroshi (Tokyo JPX) Daigo Toshiyuki (Kashiwa JPX) Azuma Hideo (Kasukabe JPX), Method for treatment of aqueous solutions with ion exchange fibers.
    상세보기
  19. Tanabe Naoto (Takatsuki JPX) Okada Kenzoh (Neyagawa JPX) Maeda Norio (Neyagawa JPX), Method of driving powdery material into porous material of open-celled structure.
    상세보기
  20. Rezuke Robert W. (N. Grafton MA) Kinkead Devon A. (Providence RI), Non-woven filter composite.
    상세보기
  21. Mori Takashi,JPX ; Yamada Jin,JPX ; Nagatsuka Jun,JPX ; Hasegawa Shinichi,JPX ; Hagiwara Shigeru,JPX, Optical illumination device.
    상세보기
  22. Markell Craig G. (White Bear Township ; Ramsey County MN) Hagen Donald F. (Woodbury MN) Hansen Paul E. (Lake Elmo MN) Baumann Nicholas R. (St. Paul MN), Particle-loaded nonwoven fibrous article for separations and purifications.
    상세보기
  23. Joffe Michael A. ; Kinkead Devon A., Performance monitoring of gas-phase air filters.
    상세보기
  24. Meitzner Erich F. (Glenside PA) Oline James A. (Wyncote PA), Polymerization processes and products therefrom.
    상세보기
  25. Tanaka Osamu,JPX ; Kusumi Toshio,JPX ; Asano Jun,JPX ; Yamamoto Katsutoshi,JPX ; Inoue Osamu,JPX ; Chaen Shinichi,JPX ; Uraoka Nobuki,JPX ; Tamaru Shinji,JPX, Porous polytetrafluoroethylene film and process for preparation thereof.
    상세보기
  26. Nsman Jan-Anders H. (Rakuunatie 58 a C 48 SF-20720 Turku FIX) Hormi Osmo (Kaitovyl32 A 14 SF-90570 Oulu FIX) Pajunen Esko (YO-kyl18 A 4 SF-20540 Turku FIX) Sundell Mats J. (Kuppisgatan 89 b 8 SF-2051, Process for making a macroporous styrene polymer.
    상세보기
  27. Yoshino Toshio (Nishinomiya JA), Process for manufacturing of deodorizing air filters.
    상세보기
  28. Sugo Takanobu,JPX ; Yamada Toshihiko,JPX ; Shima Hiroyuki,JPX ; Fujiwara Kunio,JPX, Process for producing separation functional fibers and ion-exchange fibers produced therefrom.
    상세보기
  29. Osendorf Richard J. (West St. Paul MN) Peterson Paul C. (New Prague MN) Monson Donald R. (West St. Paul MN), Refillable gas adsorption bed assembly and counterflow adsorber module.
    상세보기
  30. de Ruiter Ernest,DEX ; Tornblom Jonas,DEX, Regenerative adsorption filter bed for exhauster hoods.
    상세보기
  31. Watanabe ; Itaru ; Yamakoshi ; Yasumichi ; Miyauchi ; Hirotsugu ; Tsush ima ; Sakae ; Fukumoto ; Mitsunobu, Reinforced ion-exchange membrane.
    상세보기
  32. Osendorf Richard J. (West St. Paul MN) Lee David W. (Apple Valley MN), Respirator cartridge with sealing fit test structure and method of use.
    상세보기
  33. de Ruiter Ernest (Hohenstrasse 57a D-51381 Leverkusen DEX) Tornblom Jonas (Erkrath DEX), Seal-free and frame-free odor and/or pollutant filter.
    상세보기
  34. Kinkead Devon A. ; Joffe Michael A., Storing substrates between process steps within a processing facility.
    상세보기
  35. Cima Michael (Lexington MA) Sachs Emanuel (Somerville MA) Fan Tailin (Cambridge MA) Bredt James F. (Watertown MA) Michaels Steven P. (Melrose MA) Khanuja Satbir (Cambridge MA) Lauder Alan (Boston MA), Three-dimensional printing techniques.
    상세보기
  36. Sachs Emanuel M. (Somerville MA) Haggerty John S. (Lincoln MA) Cima Michael J. (Lexington MA) Williams Paul A. (Concord MA), Three-dimensional printing techniques.
    상세보기
  37. Sachs Emanuel M. (Somerville) Haggerty John S. (Lincoln) Cima Michael J. (Lexington) Williams Paul A. (Concord MA), Three-dimensional printing techniques.
    상세보기
  38. Schoen Donald W. (St. Paul MN) Klug Jerry J. (Rosemount MN), Unitized gas-particulate filter and housing.
    상세보기

이 특허를 인용한 특허 (12)

  1. Bause, Daniel E.; Rohrbach, Ronald P.; Jones, Gordon W.; Unger, Peter D.; Lobovsky, Alexander, Accordion-pleated filter material and filter element incorporating same.
    상세보기
  2. Seguin, Kevin J.; Peterson, Paul; Graham, Kristine M., Adsorption methods.
    상세보기
  3. Moschutz, Harald, Air-routing household appliance with a washable filter.
    상세보기
  4. Halbmaier,David L.; Simpson,Anthony; Goodwin,William M.; Kishkovich,Oleg P.; Kielbaso,Thomas B.; Manganiello,Frank, Environmental control in a reticle SMIF pod.
    상세보기
  5. Nakahara,Fumio; Fukuura, legal representative,Teruyo; Yoshikawa,Takayuki; Fukuura, deceased,Masaki, Filter element, method for manufacture thereof, and filter using said element.
    상세보기
  6. Campbell,Daniel P.; Suggs,Jim; Moore,Jeffrey L.; Somayajula,Srinivas; Mohs,Thomas R., Filters and methods of making and using the same.
    상세보기
  7. Kishkovich, Oleg P.; Kinkead, Devon; Grayfer, Anatoly; Goodwin, William M.; Ruede, David, Filters employing both acidic polymers and physical-adsorption media.
    상세보기
  8. Kishkovich, Oleg P.; Kinkead, Devon; Grayfer, Anatoly; Goodwin, William M.; Ruede, David, Filters employing both acidic polymers and physical-adsorption media.
    상세보기
  9. Kishkovich, Oleg, Filters employing porous strongly acidic polymers.
    상세보기
  10. Kishkovich,Oleg; Rezuke,Robert W.; Kinkead,Devon, Filters employing porous strongly acidic polymers.
    상세보기
  11. Kishkovich, Oleg P.; Kinkead, Devon; Grayfer, Anatoly; Goodwin, William M.; Ruede, David, Methods using filters employing both acidic polymers and physical-adsorption media.
    상세보기
  12. Tieben, Anthony Mathius; Halbmeier, David L.; Kolbow, Steven P., Purge system for a substrate container.
    상세보기

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