초록 ▼

A Raman-based spatial analysis method of detecting surface flaws. Special filters and optics are used to acquire filtered Raman response data from a portion of the surface. The filtered Raman response data represents the Raman response of the surface at a selected frequency. A camera records the res

A Raman-based spatial analysis method of detecting surface flaws. Special filters and optics are used to acquire filtered Raman response data from a portion of the surface. The filtered Raman response data represents the Raman response of the surface at a selected frequency. A camera records the response, thereby providing a two dimensional image of the portion of the surface. The image may be analyzed to determine whether that portion has desired thickness and chemical characteristics.

대표청구항 ▼

1. A Raman-based spatial imaging method of using a computer to detect flaws in a surface, comprising the steps of:storing reference data representing at least one Raman peak of a reference surface; illuminating an area of a subject surface; filtering Raman response illumination received from the ill

1. A Raman-based spatial imaging method of using a computer to detect flaws in a surface, comprising the steps of:storing reference data representing at least one Raman peak of a reference surface; illuminating an area of a subject surface; filtering Raman response illumination received from the illuminated area, the filtering corresponding to the frequency of the at least one Raman peak of the reference surface; recording an array of response data representing the filtered Raman response; mapping the array of response data to the area of the subject surface; and comparing the reference data to the array of response data to determine the thickness of the subject surface.