초록

A physical sensor component includes a housing (110) having a cavity (112), a pressure sensor device (120) mounted in the cavity of the housing, and a chemically selective and physically selective filter (153) overlying the cavity of the housing and separated from the pressure sensor device.

대표청구항 ▼

1. A physical sensor component comprising:a housing having one opening to a cavity and external leads extending substantially planarly in at least a portion of the housing to first and second opposite sides that are sides that are adjacent to the one opening, the housing having a detachable lid that

1. A physical sensor component comprising:a housing having one opening to a cavity and external leads extending substantially planarly in at least a portion of the housing to first and second opposite sides that are sides that are adjacent to the one opening, the housing having a detachable lid that is hermetically sealed to a remainder portion of the housing; a pressure sensor semiconductor device having a first side mounted to a back surface of the housing that faces the one opening in the cavity and a second side electrically coupled to the external leads; and a porous filter that is chemically treated to be both hydrophobic and oleophobic to block both water and oil external to the housing from entering the cavity, the porous filter overlying the one opening to the cavity of the housing for allowing only the second side of the pressure sensor semiconductor device to receive a pressure within the cavity, environment pressure within the cavity being sensed without use of a gel in the cavity.