초록 ▼

A person-guided vehicle (PGV) is provided for transporting and manipulating at least one carrier containing items such as semiconductor wafers to be loaded or unloaded at a load port. The PGV includes a wheeled cart having a frame configured to align with the load port. A carrier support assembly is

A person-guided vehicle (PGV) is provided for transporting and manipulating at least one carrier containing items such as semiconductor wafers to be loaded or unloaded at a load port. The PGV includes a wheeled cart having a frame configured to align with the load port. A carrier support assembly is mounted to the frame. The carrier support assembly includes a cradle configured to support the carrier, a lifting mechanism operative to raise and lower the cradle vertically, and a horizontal slide mechanism operative to move the cradle horizontally to and from a position outboard of the cart. A damping system is coupled to the cart and operative to dampen vibrations of the carrier in the carrier support assembly. One side of the cart is free of structural members to allow operator access to the carrier support assembly and to allow ready manipulation of the cart by the operator.

대표청구항 ▼

1. A person-guided vehicle for transporting and manipulating at least one carrier containing items to be loaded or unloaded at a load port, the person-guided vehicle comprising:a cart comprising a cart frame, the cart frame comprising: two end frames each including a plurality of structural members

1. A person-guided vehicle for transporting and manipulating at least one carrier containing items to be loaded or unloaded at a load port, the person-guided vehicle comprising:a cart comprising a cart frame, the cart frame comprising: two end frames each including a plurality of structural members disposed to define a cart end, a load port side frame including at least one structural member connecting the two end frames to define a load port side, the two end frames and the load port side frame defining an interior region of the cart frame, a plane extending between edges of the cart ends opposite the load part side to define a side opposite the load port side, wheels on the cart frame, and at least one handle on the cart frame to be grasped by an operator to push or pull the cart; a carrier support assembly mounted to the cart frame, the carrier support assembly comprising: a cradle configured to support the carrier, a lifting mechanism operative to raise and lower the cradle vertically, and a horizontal slide mechanism operative to move the cradle horizontally to and from a position outboard of the cart frame; and the side opposite the load port side is free of structural members connecting the two end frames to allow operator access through the side opposite the load port side to the interior region of the cart frame.