초록 ▼

A method of stripping a photoresist layer in a plasma derived from an etch gas for the photoresist and a fluorine-containing polymer includes a scavenging gas for fluorine in the resist strip etch plasma. The scavenger for flourine reduces the amount of fluorine released from a fluorine-containing p

A method of stripping a photoresist layer in a plasma derived from an etch gas for the photoresist and a fluorine-containing polymer includes a scavenging gas for fluorine in the resist strip etch plasma. The scavenger for flourine reduces the amount of fluorine released from a fluorine-containing polymer into the resist etch plasma during polymer dissociation in the photoresist stripping step, thereby providing a photoresist stripping mechanism with reduced stop layer loss.

대표청구항 ▼

1. A method of reducing stop layer loss in a photoresist stripping process performed in a reactor chamber, wherein a photoresist mask is formed on a silicon oxide layer and the silicon oxide layer is formed on an underlying stop layer, the method comprising:patterning the silicon oxide layer using a

1. A method of reducing stop layer loss in a photoresist stripping process performed in a reactor chamber, wherein a photoresist mask is formed on a silicon oxide layer and the silicon oxide layer is formed on an underlying stop layer, the method comprising:patterning the silicon oxide layer using a fluorine-containing etchant such that a fluorine-containing polymer is formed over said stop layer in regions where said silicon oxide layer has been etched; following the patterning step, introducing an etch gas for said photoresist mask and said fluorine-containing polymer and a scavenging gas for fluorine into the reactor chamber, wherein said scavenging gas is introduced into the reactor chamber, from a scavenging gas source external to the reactor chamber; and stripping said photoresist mask and said fluorine-containing polymer in a plasma derived from said etch gas and from said scavenging gas for fluorine to remove said photoresist mask and said fluorine-containing polymer, a content of free fluorine being released from said fluorine-containing polymer when being removed, said scavenging gas for fluorine reducing the concentration of said content of free fluorine in said plasma.