|국가/구분||United States(US) Patent 등록|
|발명자 / 주소|
|출원인 / 주소|
|대리인 / 주소||
|인용정보||피인용 횟수 : 77 인용 특허 : 52|
The present invention involves micromachined synthetic jet actuators, or "microjet" actuators. These fluidic control devices may be fabricated using standard silicon micromachining techniques and comprise an orifice situated atop an actuator cavity which is bounded at least partially by a flexible membrane. Alternatively, microjets may be formed in more robust substrates, such as metals or ceramics. Vibration of the membrane using either electrostatic or piezoelectric drives results in a turbulent air jet formed normal to the microjet orifice. The jet st...
1. A micromachined synthetic jet apparatus placed in an environment having an ambient fluid, comprising:(a) a substrate material defining a cavity having a volume of the ambient fluid and one orifice on a face of said substrate for allowing fluid communication between said cavity and the environment; and (b) a volume changing means for changing a volume within said cavity so that when said cavity volume is increased, a portion of the ambient fluid is drawn into said cavity, and when said cavity volume is decreased a portion of the ambient fluid is emitte...