초록 ▼

The present invention enables efficient microfabrication of a fully integrated liquid crystal display device. Initially, a sacrificial layer is formed on a substrate that has conductive pads connected thereto. The sacrificial layer is patterned, and portions of the sacrificial layer are removed to e

The present invention enables efficient microfabrication of a fully integrated liquid crystal display device. Initially, a sacrificial layer is formed on a substrate that has conductive pads connected thereto. The sacrificial layer is patterned, and portions of the sacrificial layer are removed to expose portions of the underlying layer supporting the sacrificial layer. Then, a permeable layer is formed on the sacrificial layer, thereby filling in the space vacated by the removed potions of the sacrificial layer. The structure is heated and the material of the sacrificial layer is allowed to dissolve into and dissipate through the permeable layer in order to leave a cavity. Once the sacrificial layer is removed, the permeable layer is supported by the portion of the permeable layer filling in the space vacated by the removed portions of the sacrificial layer. Accordingly, a monolithic liquid crystal display is easily and reliably formed without having to etch an opening in the structure to allow the sacrificial material to egress from the structure and without having to separately attach mechanical components to each liquid crystal display manufactured.

대표청구항 ▼

1. A microfabricated system, comprising:a base having a conductive pad formed thereon; sacrificial material initially placed on said conductive pad; permeable material formed on said sacrificial material, said sacrificial material configured to dissolve into and dissipate through said permeable mate

1. A microfabricated system, comprising:a base having a conductive pad formed thereon; sacrificial material initially placed on said conductive pad; permeable material formed on said sacrificial material, said sacrificial material configured to dissolve into and dissipate through said permeable material when said sacrificial material is heated in order to form a cavity between said conductive pad and said permeable material; and liquid crystal formed within said cavity.