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AC waveforms biasing for bead manipulating chucks

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B01J-019/08   
미국특허분류(USC) 204/164; 422/18604; 361/234; 279/128; 427/00214; 118/624; 118/DIG002
출원번호 US-0772536 (2001-01-30)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Dechert
인용정보 피인용 횟수 : 5  인용 특허 : 56
초록

AC waveforms biasing of bead transporter chucks and their accumulated charge sensing circuits tailored for low resistivity substrates and beads where if traditional DC quasi-static biasing potentials were used, the bead attraction potentials of the chuck would undergo rapid RC decay and cause the bead transporter chuck to stop working. Methods for selecting AC waveforms are given, including those that maximize the time average of the bead attraction potential at the bead collection zone of the bead contact surface.

대표
청구항
▼

1. A method for adhering charged grains to a bead collection zone on a bead contact surface comprising:(1) adhering a substrate to an electrostatic chuck, with the substrate arrayed over a grain-attracting electrode of the electrostatic chuck so that a surface of the substrate defines the bead contact surface; (2) applying an AC waveform potential to the grain-attracting electrode to create a grain attracting field, wherein the AC waveform potential comprises a grain-attracting potential pulse followed by a recovery period adapted to allow an effective g...

이 특허에 인용된 특허 (56)

  1. Sun Hoi Cheong ; Rosati Dominic Stephen ; Poliniak Eugene Samuel ; Singh Bawa ; Desai Nitin Vithalbhai. AC waveforms biasing for bead manipulating chucks. USP2001026187149.
  2. Sun Hoi Cheong Steve ; Poliniak Eugene Samuel ; Rosati Dominic Stephen ; Singh Bawa ; Desai Nitin Vithalbhai. AC waveforms biasing for bead manipulating chucks. USP2000116149774.
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  26. Kulessa Gerhard (Stollberg DT) Mommertz Elmar (Laurentsberg near Aachen DT). Inhalator for agglomeratable pulverulent solids. USP1977094047525.
  27. Altermatt Daniel (Mnchenstein CHX) Hilpert Hanspeter (Rheinfelden/Nollingen DEX) Khanna Satish C. (Bottmingen CHX) Dubach Werner F. (Maur CHX) Spaltenstein Anton (Bassersdorf CHX). Inhaler. USP1993115263475.
  28. Datta Pabitra (Mercer NJ) Desai Nitin V. (Mercer NJ). Inhaler apparatus using a tribo-electric charging technique. USP1997075642727.
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  32. Damani Nalinkant C. (Mountain View CA). Medicament dispensing process for inhalation therapy. USP1976073971377.
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  43. Ritt Peter M. (East Petersburg PA) Stork Harry R. (Adamstown Borough PA). Method of manufacturing a luminescent screen assembly using a dry-powdered filming material. USP1991075028501.
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  45. Raghuprasad Puthalath (2400 East 8th Street Odessa TX 79761). Mist inhaler. USP1993025186164.
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  52. Jansen Frank (Webster NY) Machonkin Mary A. (Webster NY). Processes for the preparation of polycrystalline diamond films. USP1990054925701.
  53. Sato Norman J. (Maple Grove MN). Radio frequency heating of thermoplastic receptor compositions. USP1994075328539.
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  55. Datta Pabitra (West Windsor Twp. ; Mercer County NJ) Friel Ronald N. (Hamilton Twp. ; Mercer County NJ). Surface treatment of silica-coated phosphor particles and method for a CRT screen. USP1990054921727.
  56. Carrish Jeffrey J. (Hopkinton MA). Three electrode system in the generation of electrostatic images. USP1979074160257.

이 특허를 인용한 특허 피인용횟수: 5

  1. Kellerman, Peter L.; Qin, Shu; DiVergilio, William F.. Clamping and de-clamping semiconductor wafers on an electrostatic chuck using wafer inertial confinement by applying a single-phase square wave AC clamping voltage. USP2005096947274.
  2. Whiteman,Marshall; Hallett,Martin David; Feather,David Hoover; Nelson,Douglas Howard; Gazza,Jack Michael. Electrostatic application of powder material to solid dosage forms utilizing an electrically conductive shield. USP2006127144597.
  3. Paterson, John T.; Lee, Donald B.; Thomas, Terrance L.; Berman, Richard W.; Liang, George. Method and application for vehicle power system isolation. USP2014098836160.
  4. Makhratchev, Konstantin; McMillin, Brian. Method for using an RC circuit to model trapped charge in an electrostatic chuck. USP2011118055489.
  5. Paterson, John T.; Lee, Donald B.; Thomas, Terry L.; Berman, Richard W.; Liang, George. System and method for vehicle power system isolation. USP2017119812249.

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