초록 ▼

An optical-interference microphone having a high sensitivity and bandwidth, and that is suitable to be manufactured by micromachining techniques. The microphone includes a back member, a diaphragm and an air gap formed between the back member and diaphragm. Further, the diaphragm includes a pluralit

An optical-interference microphone having a high sensitivity and bandwidth, and that is suitable to be manufactured by micromachining techniques. The microphone includes a back member, a diaphragm and an air gap formed between the back member and diaphragm. Further, the diaphragm includes a plurality of holes. The microphone utilizes optical interference to sense the sound-induced motion of the diaphragm. A light source and detector can be included as components of the microphone or can be at a remote location and connected to the microphone with an optical fiber.

대표청구항 ▼

1. An article comprising a microphone to be referred to as an optical-interference microphone comprising:a) a first layer comprising a material that is substantially transmissive for electromagnetic radiation of wavelength .lambda.; b) a second layer comprising a material that is substantially trans

1. An article comprising a microphone to be referred to as an optical-interference microphone comprising:a) a first layer comprising a material that is substantially transmissive for electromagnetic radiation of wavelength .lambda.; b) a second layer comprising a material that is substantially transmissive for said electromagnetic radiation, the first and second layers being spaced apart and defining a gap volume between said first and second layers; c) at least one of the first and second layers comprising a plurality of through-holes disposed therein such that said gap volume is in pneumatic communication with an ambient atmosphere having a pressure, such that a spacing between said first and second layers varies in response to changes in the ambient atmosphere pressure; d) the article further comprising a source of said electromagnetic radiation of said wavelength .lambda. and a detector for detecting said electromagnetic radiation of said wavelength .lambda., said source and detector being disposed such that at least a portion of said electromagnetic radiation of said wavelength .lambda. that is emitted by said source is transmitted through said gap volume and impinges on the detector, with an intensity of the impinging electromagnetic radiation being responsive to the variations in the spacing between the first and second layers.