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Kafe 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
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출원번호 | US-0502204 (2000-02-10) |
발명자 / 주소 |
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출원인 / 주소 |
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대리인 / 주소 |
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인용정보 | 피인용 횟수 : 498 인용 특허 : 17 |
A method of making a sensor includes the steps of providing a preformed self-supporting flexible substrate; sputter-depositing a metal layer on the substrate; etching the sputter-deposited metal layers to form a sensor electrode having a proximal segment and a distal segment; plating a metal layer o
A method of making a sensor includes the steps of providing a preformed self-supporting flexible substrate; sputter-depositing a metal layer on the substrate; etching the sputter-deposited metal layers to form a sensor electrode having a proximal segment and a distal segment; plating a metal layer on the sensor electrode; and separating the sensor electrode and at least a portion of the substrate underlying the sensor electrode from the remainder of the substrate. Sensors prepared according to the inventive methods, and sensor sets including the sensors, are also provided.
1. A sensor produced by the method of:i) providing a preformed self-supporting flexible substrate; ii) sequentially sputter-depositing a plurality of metal layers on the substrate, the plurality of layers including an uppermost layer; iii) plating a metal layer on the uppermost sputter-deposited met
1. A sensor produced by the method of:i) providing a preformed self-supporting flexible substrate; ii) sequentially sputter-depositing a plurality of metal layers on the substrate, the plurality of layers including an uppermost layer; iii) plating a metal layer on the uppermost sputter-deposited metal layer; iv) etching the plated and sputter-deposited metal layers to form a sensor electrode having a proximal segment and a distal segment; v) sequentially plating first and second metal layers on the sensor electrode; vi) coating the sensor electrode with a polymeric material; vii) forming at least one opening in the coating; and viii) separating the sensor electrode and at least a portion of the substrate underlying the sensor electrode from the remainder of the substrate.
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