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Electro-optic structure and process for fabricating same 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G02B-006/10
출원번호 US-0669602 (2000-09-26)
발명자 / 주소
  • Jamal Ramdani
  • Lyndee Hilt
  • Ravindranath Droopad
  • William Jay Ooms
출원인 / 주소
  • Motorola, Inc.
대리인 / 주소
    Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
인용정보 피인용 횟수 : 139  인용 특허 : 106

초록

High quality epitaxial layers of oxide can be grown overlying large silicon wafers by first growing an accommodating buffer layer on a silicon wafer. The accommodating buffer layer is a layer of monocrystalline oxide spaced apart from the silicon wafer by an amorphous interface layer of silicon oxid

대표청구항

1. A waveguide structure comprising:a monocrystalline semiconductor substrate; a monocrystalline oxide layer formed overlying the substrate; a core layer formed atop the oxide layer; and a cladding layer formed adjacent to the core layer.

이 특허에 인용된 특허 (106)

  1. Jin Sungho (Millington NJ) McCormack Mark T. (Summit NJ) Ramesh Ramamoorthy (Tinton Falls NJ), Article comprising magnetoresistive material.
  2. Ella Juha,FIX, Bulk acoustic wave (BAW) filter having a top portion that includes a protective acoustic mirror.
  3. Ramesh Ramamoorthy (Tinton Falls NJ), C-axis perovskite thin films grown on silicon dioxide.
  4. Inam Arun (Red Bank NJ) Ramesh Ramamoorthy (Eatontown NJ), Crystallographically aligned ferroelectric films usable in memories and method of crystallographically aligning perovski.
  5. Ramesh Ramamoorthy (Tinton Falls NJ), Cubic metal oxide thin film epitaxially grown on silicon.
  6. Kashihara Keiichiro (Hyogo JPX) Okudaira Tomonori (Hyogo JPX) Itoh Hiromi (Hyogo JPX), Electronic device using zirconate titanate and barium titanate ferroelectrics in insulating layer.
  7. Fraden Jacob ; Brown Joseph P. ; Lackey Robert P. ; Howe Randall R. ; Bultges Heinz,DEX ; Debus Wolfram,DEX ; Bautz Gunther,DEX ; Franke Helmut,DEX, Enhanced protective lens cover for an infrared thermometer.
  8. Summerfelt Scott R., Fabricating high-dielectric constant oxides on semiconductors using a GE buffer layer.
  9. Kondow Masahiko,JPX ; Uomi Kazuhisa,JPX ; Nakamura Hitoshi,JPX, Fabrication method for AlGaIn NPAsSb based devices.
  10. Vinal Albert W. (Cary NC), Fermi threshold field effect transistor.
  11. Koo Bon-jae,KRX, Ferroelectric memory devices having well region word lines and methods of operating same.
  12. Watanabe Yukio (Machida JPX), Field-effect transistor with perovskite oxide channel.
  13. Wadaka Shusou,JPX ; Misu Koichiro,JPX ; Nagatsuka Tsutomu,JPX ; Kimura Tomonori,JPX ; Kameyama Shunpei,JPX ; Maeda Chisako,JPX ; Yamada Akira,JPX ; Honda Toshihisa,JPX, Film bulk acoustic wave device.
  14. Thomas E. Raymond (Dayton OH) Cahill Lysle D. (Dayton OH) Marshall William W. (Xenia OH) Talley Luke L. (Centerville OH) Lawson John A. (Dayton OH) Wilcox Brian N. (Kettering OH), Flat bed scanner system and method.
  15. Andrews James A. (Phoenix AZ), Flip chip package and method of making.
  16. Kencke David L. ; Banerjee Sanjay K., Floating gate transistor having buried strained silicon germanium channel layer.
  17. Usui Akira,JPX ; Sakai Akira,JPX ; Sunakawa Haruo,JPX ; Mizuta Masashi,JPX ; Matsumoto Yoshishige,JPX, GaN crystal film, a group III element nitride semiconductor wafer and a manufacturing process therefor.
  18. Shi Song Q. (Phoenix AZ), Green-emitting organometallic complexes for use in light emitting devices.
  19. Terranova Nancy (Wilmington DE) Barnett Allen M. (Newark DE), Hetero-epitaxial growth of non-lattice matched semiconductors.
  20. Shen Jun (Phoenix AZ) Tsui Raymond K. (Phoenix AZ) Tehrani Saied N. (Scottsdale AZ) Goronkin Herb (Tempe AZ), Heterojunction interband tunnel diodes with improved P/V current ratios.
  21. Brunel Dominique,FRX ; Trichet Jacques,FRX, High frequency amplifier and control.
  22. Reedy Ronald E. (San Diego CA) Burgener Mark L. (San Diego CA), High-frequency wireless communication system on a single ultrathin silicon on sapphire chip.
  23. Major Jo S. (San Jose CA) Welch David F. (Menlo Park CA) Scifres Donald R. (San Jose CA), III-V aresenide-nitride semiconductor materials and devices.
  24. Kovacs Gregory T. A. ; Knapp Terry R.,CHX, Implantable biosensing transponder.
  25. Schetzina Jan Frederick (Cary NC), Integrated heterostructures of Group III-V nitride semiconductor materials including epitaxial ohmic contact, non-nitrid.
  26. Tham J. L. Julian ; Mehrotra Deepak ; Bartlett James L. ; Chang Mau Chung F. ; Marcy ; 5th Henry O. ; Pedrotti Kenneth D. ; Pehlke David R. ; Seabury Charles W. ; Yao Jun J., Integrated passive transceiver section.
  27. Pirrung Michael C. (Durham NC) Read J. Leighton (Palo Alto CA) Fodor Stephen P. A. (Palo Alto CA) Stryer Lubert (Stanford CA), Large scale photolithographic solid phase synthesis of polypeptides and receptor binding screening thereof.
  28. Katsuhide Manabe JP; Akira Mabuchi JP; Hisaki Kato JP; Michinari Sassa JP; Norikatsu Koide JP; Shiro Yamazaki JP; Masafumi Hashimoto JP; Isamu Akasaki JP, Light-emitting semiconductor device using gallium nitride group compound.
  29. Yonehara Takao,JPX ; Miyawaki Mamoru,JPX ; Ishizaki Akira,JPX ; Hoshi Junichi,JPX ; Sakamoto Masaru,JPX ; Sugawa Shigetoshi,JPX ; Inoue Shunsuke,JPX ; Koizumi Toru,JPX ; Kohchi Tetsunobu,JPX ; Sakagu, Liquid crystal image display unit and method for fabricating semiconductor optical member.
  30. Farb Joseph E. (Riverside CA), Magnetic field detection.
  31. Partin Dale Lee, Magnetic field sensor having high mobility thin indium antimonide active layer on thin aluminum indium antimonide buffer.
  32. Koganei Akio,JPX ; Nishimura Naoki,JPX, Memory device utilizing giant magnetoresistance effect.
  33. Hayashi Shigenori (Nara JPX) Komaki Kazuki (Osaka JPX) Kamada Takeshi (Osaka JPX) Kitagawa Masatoshi (Osaka JPX) Deguchi Takashi (Shiga JPX) Takayama Ryoichi (Osaka JPX) Hirao Takashi (Osaka JPX), Method and apparatus for fabrication of dielectric thin film.
  34. Yi Zhiyi ; Droopad Ravindranath ; Overgaard Corey Daniel ; Ramdani Jamal ; Curless Jay A. ; Hallmark Jerald A. ; Ooms William J. ; Wang Jun, Method for fabricating a semiconductor structure having a crystalline alkaline earth metal oxide interface with silicon.
  35. Yu Zhiyi ; Droopad Ravindranath ; Overgaard Corey Daniel ; Ramdani Jamal ; Curless Jay A. ; Hallmark Jerald A. ; Ooms William J. ; Wang Jun, Method for fabricating a semiconductor structure having a crystalline alkaline earth metal oxide interface with silicon.
  36. Yu Zhiyi ; Wang Jun ; Droopad Ravindranath ; Ramdani Jamal, Method for fabricating a semiconductor structure having a stable crystalline interface with silicon.
  37. Nakato Tatsuo, Method for forming silicon-germanium/Si/silicon dioxide heterostructure using germanium implant.
  38. McGinn Joseph T. (Flemington NJ) Jastrzebski Lubomir L. (Plainsboro NJ) Corboy ; Jr. John F. (Ringoes NJ), Method for growing a low defect monocrystalline layer on a mask.
  39. Ichikawa Takeshi (Zama JPX) Yonehara Takao (Atsugi JPX) Sakamoto Masaru (Atsugi JPX) Naruse Yasuhiro (Aiko JPX) Nakayama Jun (Atsugi JPX) Yamagata Kenji (Kawasaki JPX) Sakaguchi Kiyofumi (Atsugi JPX), Method for producing semiconductor articles.
  40. Sakaguchi Kiyofumi (c/o Canon Kabushiki Kaisha 30-2 ; 3-chome Shimomaruko ; Ohta-ku ; Tokyo JPX) Yonehara Takao (c/o Canon Kabushiki Kaisha 30-2 ; 3-chome Shimomaruko ; Ohta-ku ; Tokyo JPX) Nishida S, Method for producing semiconductor device substrate by bonding a porous layer and an amorphous layer.
  41. Goesele Ulrich M. ; Tong Qin-Yi, Method for the transfer of thin layers monocrystalline material onto a desirable substrate.
  42. Summerfelt Scott R. (Dallas TX), Method of fabricating high-dielectric constant oxides on semiconductors using a GE buffer layer.
  43. Itoh Kenji (Kanagawa JPX), Method of forming a carbon film on a substrate made of an oxide material.
  44. Droopad Ravi ; Abrokwah Jonathan K. ; Passlack Matthias ; Yu Zhiyi Jimmy, Method of forming a silicon nitride layer.
  45. Belt Roger F. (Morristown NJ) Ings John B. (Boonton NJ), Method of forming oxidic high Tc superconducting materials on substantially lattice matched monocrystallin.
  46. Inoue Yasunori (Osaka JPX) Hanafusa Hiroshi (Hirakata JPX), Method of forming single crystalline magnesia spinel film.
  47. Kiyoku Hiroyuki,JPX ; Nakamura Shuji,JPX ; Kozaki Tokuya,JPX ; Iwasa Naruhito,JPX ; Chocho Kazuyuki,JPX, Method of growing nitride semiconductors, nitride semiconductor substrate and nitride semiconductor device.
  48. Tsu Robert ; Kulwicki Bernard M., Method of making barium strontium titanate (BST) thin film by erbium donor doping.
  49. Barber Ivor G., Method of packaging integrated circuits.
  50. Mirkarimi Paul B. ; Montcalm Claude, Method to adjust multilayer film stress induced deformation of optics.
  51. Linthicum Kevin J. ; Gehrke Thomas ; Davis Robert F. ; Thomson Darren B. ; Tracy Kieran M., Methods of fabricating gallium nitride microelectronic layers on silicon layers and gallium nitride microelectronic structures formed thereby.
  52. Krishnaswamy S. Visvanathan (Monroeville PA) Horwitz Stuart S. (Randallstown MD) Moore Robert A. (Arnold MD), Microwave film bulk acoustic resonator and manifolded filter bank.
  53. Tsuzuki Koji,JPX ; Murakami Tsutomu,JPX ; Yamada Satoru,JPX ; Takeyama Yoshifumi,JPX ; Shimizu Koichi,JPX, Moldless semiconductor device and photovoltaic device module making use of the same.
  54. Bayraktaroglu Burhan (Plano TX), Monolithic microwave transmitter/receiver.
  55. Corman David Warren ; Torkington Richard Scott ; Ma Stephen Chih-Hung ; Cook Dean Lawrence ; Brice-Heames Kenneth, Multi-substrate radio-frequency circuit.
  56. Curran Patrick A. (Plano TX) Wilson Susan R. (Richardson TX), Multilayer semi-insulating film for hermetic wafer passivation and method for making same.
  57. Yano Yoshihiko,JPX ; Noguchi Takao,JPX, Multilayer thin film, substrate for electronic device, electronic device, and preparation of multilayer oxide thin film.
  58. Hovel Harold J. (Katonah NY), Multiple bandgap solar cell on transparent substrate.
  59. Imai Hideaki (Fuji JPX) Miyata Kunio (Kyoto JPX) Hirai Tadahiko (Koganei JPX), Nitride based semiconductor device and manufacture thereof.
  60. Nakamura Shuji,JPX ; Nagahama Shinichi,JPX ; Iwasa Naruhito,JPX ; Kiyoku Hiroyuki,JPX, Nitride semiconductor light-emitting device.
  61. Nunoue Shinya,JPX ; Yamamoto Masahiro,JPX, Nitride-compound semiconductor device.
  62. Cambou Bertrand F. (Mesa AZ) Liaw H. Ming (Scottsdale AZ) Tomozane Mamoru (Scottsdale AZ), Non-silicon and silicon bonded structure and method of manufacture.
  63. Mehrgardt Soenke (March-Meuershausen DEX) Blossfeld Lothar (Freiburg-Hochdorf DEX), Offset-compensated hall sensor having plural hall detectors having different geometrical orientations and having switcha.
  64. Nashimoto Keiichi,JPX ; Watanabe Masao,JPX ; Moriyama Hiroaki,JPX ; Nakamura Shigetoshi,JPX ; Osakabe Eisuke,JPX ; Morikawa Takashi,JPX, Opical waveguide device.
  65. Vasudev Prahalad K. (Santa Monica CA), Opposed dual-gate hybrid structure for three-dimensional integrated circuits.
  66. Van De Voorde Ingrid Zulma Benoit,BEX ; Van Der Plas Gert,BEX, Optical amplifier combiner arrangement and method for upstream transmission realized thereby.
  67. Giles Clinton R. (Middletown NJ) Li Tingye (Rumson NJ) Wood Thomas H. (Highlands NJ), Optical communication by injection-locking to a signal which modulates an optical carrier.
  68. Ho Steven H. (Urbana IL) Conforti Evandro (Campinas BRX) Kang Sung M. (Champaign IL), Optical communications and interconnection networks having opto-electronic switches and direct optical routers.
  69. Yano Yutaka,JPX, Optical regenerative repeater.
  70. Hunsperger Robert G. (Newark DE) Maltenfort Andrew J. (New Castle DE), Optical wavelength division multiplexing/demultiplexing system.
  71. Tsubota Takashi (Tokyo JPX), Opto-semiconductor device and method of fabrication of the same.
  72. Foresi James S. ; Agarwal Anu M. ; Black Marcie R. ; Koker Debra M. ; Kimerling Lionel C., Optoelectronic integrated circuits formed of polycrystalline semiconductor waveguide.
  73. Hammer Jacob M. (Princeton NJ), Optoelectronic interconnections for integrated circuits.
  74. Shi Song Q. (4521 E. Gold Poppy Way Phoenix AZ 85283), Organometallic complexes with built-in fluorescent dyes for use in light emitting devices.
  75. Shi Song Q. (Phoenix AZ) So Franky (Tempe AZ), Organometallic fluorescent complex polymers for light emitting applications.
  76. Yano Yoshihiko,JPX ; Noguchi Takao,JPX, Oxide thin film, electronic device substrate and electronic device.
  77. Kishimoto Katsushi,JPX ; Nakano Takanori,JPX ; Sannomiya Hitoshi,JPX ; Nomoto Katsuhiko,JPX, Photovoltaic device and process for producing the same.
  78. Ella Juha,FIX, Piezoelectric resonator structures with a bending element performing a voltage controlled switching function.
  79. Lakin Kenneth Meade, Piezoelectric resonators on a differentially offset reflector.
  80. Nause Jeffrey E. ; Hill D. Norman ; Pope Stephen G., Pressurized skull crucible for crystal growth using the Czochralski technique.
  81. Rostoker Michael D. (San Jose CA) Pasch Nicholas F. (Pacifica CA), Process for solder ball interconnecting a semiconductor device to a substrate using a noble metal foil embedded interpos.
  82. Yamagata Kenji (Kawasaki JPX) Yonehara Takao (Atsugi JPX), Process of fabricating a semiconductor substrate.
  83. Ariyoshi Hisashi (Tokyo JPX) Kasanami Toru (Kyoto JPX) Fukuda Susumu (Osaka JPX), Producing a compound semiconductor device on an oxygen implanted silicon substrate.
  84. Fafard Simon,CAX ; Liu Hui Chun,CAX, Quantum dot infrared photodetectors (QDIP).
  85. Huang Kai-Feng (Shenchu NJ CNX) Jewell Jack L. (Bridgewater NJ) McCall ; Jr. Samuel L. (Gillette NJ) Tai Kuochou (North Plainfield NJ), Quantum well vertical cavity laser.
  86. Toh Chai Keong,SGX, Routing method for Ad-Hoc mobile networks.
  87. Soref Richard A. (Newton Centre MA) Taylor Henry F. (College Station TX), Semiconductive guided-wave programmable optical delay lines using electrooptic fabry-perot elements.
  88. Nishimura Takashi (Itami JPX), Semiconductor device.
  89. Nakao Hiroshi (Kawasaki JPX) Mori Toshihiko (Kawasaki JPX), Semiconductor device and method for fabricating the same.
  90. Nozawa Hiroshi (Yokohama JPX) Matsunaga Junichi (Yokohama JPX) Matsukawa Naohiro (Yokohama JPX), Semiconductor device and method for manufacturing the same.
  91. Onga Shinji (Fujisawa JPX) Okada Takako (Tokyo JPX) Inoue Kouichirou (Yokohama JPX) Matsushita Yoshiaki (Yokohama JPX) Yamabe Kikuo (Yokohama JPX) Hazama Hiroaki (Yokohama JPX) Okano Haruo (Tokyo JPX, Semiconductor device with monocrystalline gate insulating film.
  92. Seki Akinori (Toyota JPX) Ohnishi Toyokazu (Toyota JPX) Nakano Jiro (Okazaki JPX), Semiconductor laser stack with lens and method of manufacturing the same.
  93. Yanagase Masashi (Tsukuba JPX) Watanabe Hideaki (Tsukuba JPX) Imamaka Koichi (Tsukuba JPX), Semiconductor luminous element with light reflection and focusing configuration.
  94. Wang Jun ; Ooms William Jay ; Hallmark Jerald Allen, Semiconductor structure having a crystalline alkaline earth metal oxide interface with silicon.
  95. Suzuki Masayuki,JPX, Silicon-based functional matrix substrate and optical integrated oxide device.
  96. Shi Song Q. (Phoenix AZ), Soluble precursor to poly (cyanoterephthalydene) and method of preparation.
  97. McKee Rodney Allen ; Walker Frederick Joseph, Strain-based control of crystal anisotropy for perovskite oxides on semiconductor-based material.
  98. Oishi Akira (Tokyo JPX) Usui Toshio (Tokyo JPX) Teshima Hidekazu (Tokyo JPX) Morishita Tadataka (Tokyo JPX), Substrate material for the preparation of oxide superconductors.
  99. Tetsuzo Yoshimura ; Yashuhito Takahashi ; Masaaki Inao ; Michael G. Lee ; William Chou ; Solomon I. Beilin ; Wen-chou Vincent Wang ; James J. Roman ; Thomas J. Massingill, Systems based on opto-electronic substrates with electrical and optical interconnections and methods for making.
  100. Tseng T. J.,TWX ; Cheng David C. H.,TWX, Thermal vias-provided cavity-down IC package structure.
  101. Sone Shuji,JPX ; Kato Yoshitake,JPX, Thin film capacitor including perovskite-type oxide layers having columnar structure and granular structure.
  102. Sasaki Hajime (Itami JPX) Morikawa Hiroaki (Itami JPX) Satoh Kazuhiko (Itami JPX) Deguchi Mikio (Itami JPX), Thin film solar cell and production method therefor.
  103. Hoole Elliott D., Transmit/receive compensation.
  104. Lehovec Kurt (Los Angeles CA), Tunnel diode load for ultra-fast low power switching circuits.
  105. Ikeda Kyoichi (Tokyo JPX) Watanabe Tetsuya (Tokyo JPX) Higashino Yasushi (Tokyo JPX), Vibratory transducer.
  106. Koch Thomas L. (Holmdel NJ), Wavelength division multiplexed optical communication transmitters.

이 특허를 인용한 특허 (139)

  1. Gunn, III,Lawrence C.; Li,Bing; Pinguet,Thierry J.; Press,David L. R.; Rattier,Maxime Jean, Active waveguides for optoelectronic devices.
  2. Gunn, III,Lawrence C.; Li,Bing; Pinguet,Thierry J.; Press,David; Rattier,Maxime Jean, Active waveguides for optoelectronic devices.
  3. Gunn, III,Lawrence C.; Li,Bing; Pinguet,Thierry J.; Press,David; Rattier,Maxime Jean, Active waveguides for optoelectronic devices.
  4. Chen, Xiangdong; Dyer, Thomas W.; Settlemyer, Kenneth; Yang, Haining S., CMOS devices with stressed channel regions, and methods for fabricating the same.
  5. Zhu, Huilong; Yang, Baewon, CMOS structures and methods for improving yield.
  6. Zhu, Huilong; Yang, Daewon, CMOS structures and methods for improving yield.
  7. Zhu, Huilong; Yang, Daewon, CMOS structures and methods using self-aligned dual stressed layers.
  8. Cheng, Cheng-Wei; Li, Ning; Sadana, Devendra K.; Shiu, Kuen-Ting, Complementary metal oxide semiconductor device with III-V optical interconnect having III-V epitaxial semiconductor material formed using lateral overgrowth.
  9. Cheng, Cheng-Wei; Li, Ning; Sadana, Devendra K.; Shiu, Kuen-Ting, Complementary metal oxide semiconductor device with III-V optical interconnect having III-V epitaxial semiconductor material formed using lateral overgrowth.
  10. Cheng, Cheng-Wei; Li, Ning; Sadana, Devendra K.; Shiu, Kuen-Ting, Complementary metal oxide semiconductor device with III-V optical interconnect having III-V epitaxial semiconductor material formed using lateral overgrowth.
  11. Cheng, Cheng-Wei; Li, Ning; Sadana, Devendra K.; Shiu, Kuen-Ting, Complementary metal oxide semiconductor device with III-V optical interconnect having III-V epitaxially formed material.
  12. Cheng, Cheng-Wei; Li, Ning; Sadana, Devendra K.; Shiu, Kuen-Ting, Complementary metal oxide semiconductor device with III-V optical interconnect having III-V epitaxially formed material.
  13. Zhu,Huilong; Doris,Bruce B.; Chen,Huajie, Dislocation free stressed channels in bulk silicon and SOI CMOS devices by gate stress engineering.
  14. Fang, Sunfei; Kim, Jun Jung; Luo, Zhijiong; Ng, Hung Y.; Rovedo, Nivo; Teh, Young Way, Dual stress memory technique method and related structure.
  15. Chidambarrao,Dureseti; Dokumaci,Omer H.; Doris,Bruce B.; Gluschenkov,Oleg; Zhu,Huilong, Dual stressed SOI substrates.
  16. Chidambarrao,Dureseti; Doris,Bruce B.; Gluschenkov,Oleg; Dokumaci,Omer H.; Zhu,Huilong, Dual stressed SOI substrates.
  17. Iwashita, Setsuya; Higuchi, Takamitsu; Miyazawa, Hiromu, Electronic device and electronic apparatus.
  18. Chidambarrao,Dureseti, Enhanced PFET using shear stress.
  19. Zhu, Huilong; Luo, Zhijiong, FinFET structure with multiply stressed gate electrode.
  20. Chidambarrao, Dureseti, Gate electrode stress control for finFET performance enhancement.
  21. Mule′, Tony; Patel, Chirag; Meindl, James D.; Gaylord, Thomas K.; Glytsis, Elias N.; Martin, Kevin P.; Schultz, Stephen M.; Bakir, Muhannad; Reed, Hollie; Kohl, Paul, Guided-wave optical interconnections embedded within a microelectronic wafer-level batch package.
  22. Doris, Bruce B.; Gluschenkov, Oleg G.; Zhu, Huilong, High mobility CMOS circuits.
  23. Doris,Bruce B.; Gluschenkov,Oleg G.; Zhu,Huilong, High mobility CMOS circuits.
  24. Doris,Bruce B.; Gluschenkov,Oleg G.; Zhu,Huilong, High mobility CMOS circuits.
  25. Doris,Bruce B.; Chidambarrao,Dureseti; Ku,Suk Hoon, High performance CMOS device structures and method of manufacture.
  26. Doris,Bruce B.; Chidambarrao,Dureseti; Ku,Suk Hoon, High performance CMOS device structures and method of manufacture.
  27. Doris, Bruce B; Gluschenkov, Oleg G, High performance strained CMOS devices.
  28. Doris,Bruce B.; Gluschenkov,Oleg G., High performance strained CMOS devices.
  29. Chidambarrao, Dureseti; Donaton, Ricardo A.; Henson, William K.; Rim, Kern, High performance stress-enhance MOSFET and method of manufacture.
  30. Chidambarrao, Dureseti; Donaton, Ricardo A.; Henson, William K.; Rim, Kern, High performance stress-enhance MOSFET and method of manufacture.
  31. Chidambarrao, Dureseti; Donaton, Ricardo A.; Henson, William K.; Rim, Kern, High performance stress-enhance MOSFET and method of manufacture.
  32. Chen, Huajie; Chidambarrao, Dureseti; Dokumaci, Omer H., High performance stress-enhanced MOSFETS using Si:C and SiGe epitaxial source/drain and method of manufacture.
  33. Chen, Huajie; Chidambarrao, Dureseti; Dokumaci, Omer H., High performance stress-enhanced MOSFETs using Si:C and SiGe epitaxial source/drain and method of manufacture.
  34. Chen, Huajie; Chidambarrao, Dureseti; Dokumaci, Omer H., High performance stress-enhanced MOSFETs using Si:C and SiGe epitaxial source/drain and method of manufacture.
  35. Chen, Huajie; Chidambarrao, Dureseti; Dokumaci, Omer H., High performance stress-enhanced MOSFETs using Si:C and SiGe epitaxial source/drain and method of manufacture.
  36. Chen,Huajie; Chidambarrao,Dureseti; Dokumaci,Omer H, High performance stress-enhanced MOSFETs using Si:C and SiGe epitaxial source/drain and method of manufacture.
  37. Doris, Bruce B.; Guarini, Kathryn W.; Ieong, Meikei; Narasimha, Shreesh; Rim, Kern; Sleight, Jeffrey W.; Yang, Min, High-performance CMOS SOI devices on hybrid crystal-oriented substrates.
  38. Doris,Bruce B.; Guarini,Kathryn W.; Ieong,Meikei; Narasimha,Shreesh; Rim,Kern; Sleight,Jeffrey W.; Yang,Min, High-performance CMOS devices on hybrid crystal oriented substrates.
  39. Montgomery, Robert Keith; Ghiron, Margaret; Gothoskar, Prakash; Patel, Vipulkumar; Shastri, Kalpendu; Pathak, Soham; Yanushefski, Katherine A., High-speed silicon-based electro-optic modulator.
  40. Zhu,Huilong; Oldiges,Philip J.; Doris,Bruce B.; Wang,Xinlin; Gluschenkov,Oleg; Chen,Huajie; Zhang,Ying, Hybrid SOI-bulk semiconductor transistors.
  41. Zhu, Huilong; Oldiges, Philip J.; Doris, Bruce B.; Wang, Xinlin; Gluschenkov, Oleg; Chen, Huajie; Zhang, Ying, Hybrid SOI/bulk semiconductor transistors.
  42. Cheng, Cheng-Wei; Li, Ning; Sadana, Devendra K.; Shiu, Kuen-Ting, III-V photonic integrated circuits on silicon substrate.
  43. Chidambarrao, Dureseti; Dokumaci, Omer H., MOSFET performance improvement using deformation in SOI structure.
  44. Chidambarrao, Dureseti; Dokumaci, Omer H., MOSFET performance improvement using deformation in SOI structure.
  45. Yang, Haining S.; Zhu, Huilong, Method and apparatus for increase strain effect in a transistor channel.
  46. Yang,Haining S.; Zhu,Huilong, Method and apparatus for increase strain effect in a transistor channel.
  47. Yang,Haining S.; Zhu,Huilong, Method and apparatus to increase strain effect in a transistor channel.
  48. Yang,Haining S.; Zhu,Huilong, Method and structure for controlling stress in a transistor channel.
  49. Steegen, An L.; Yang, Haining S.; Zhang, Ying, Method and structure for forming strained SI for CMOS devices.
  50. Steegen,An L; Yang,Haining S.; Zhang,Ying, Method and structure for forming strained SI for CMOS devices.
  51. Steegen, An L.; Yang, Haining S.; Zhang, Ying, Method and structure for forming strained Si for CMOS devices.
  52. Steegen,An L.; Yang,Haining S.; Zhang,Ying, Method and structure for forming strained Si for CMOS devices.
  53. Yang, Haining S.; Lim, Eng Hua, Method and structure for forming strained devices.
  54. Chidambarrao, Dureseti; Dokumaci, Omer H., Method and structure for improved MOSFETs using poly/silicide gate height control.
  55. Chidambarrao,Dureseti; Dokumaci,Omer H., Method and structure for improved MOSFETs using poly/silicide gate height control.
  56. Chidambarrao, Dureseti; Greene, Brian J., Method and structure for improving device performance variation in dual stress liner technology.
  57. Chidambarrao,Dureseti; Greene,Brian J., Method and structure for improving device performance variation in dual stress liner technology.
  58. Chidambarrao,Dureseti; Dokumaci,Omer H., Method for reduced N+ diffusion in strained Si on SiGe substrate.
  59. Chidambarrao,Dureseti; Dokumaci,Omer H., Method for reduced N+ diffusion in strained Si on SiGe substrate.
  60. Chidambarrao,Dureseti; Dokumaci,Omer H., Method for reduced N+ diffusion in strained Si on SiGe substrate.
  61. Belyansky,Michael P.; Doris,Bruce B.; Gluschenkov,Oleg, Method of fabricating mobility enhanced CMOS devices.
  62. Chen, Huajie; Chidambarrao, Dureseti; Holt, Judson R.; Ouyang, Qiqing C.; Panda, Siddhartha, Method of forming a cross-section hourglass shaped channel region for charge carrier mobility modification.
  63. Chen,Xiaomeng; Jeng,Shwu Jen; Kim,Byeong Y.; Nayfeh,Hasan M., Method of making a semiconductor structure.
  64. Cheng,Kangguo; Chidambarrao,Dureseti, Method of manufacturing a strained silicon on a SiGe on SOI substrate.
  65. Chidambarrao,Dureseti; Dokumaci,Omer H., Method of manufacturing strained dislocation-free channels for CMOS.
  66. Yang, Haining S.; Panda, Siddhartha, Method to increase strain enhancement with spacerless FET and dual liner process.
  67. Guarin, Fernando; Hostetter, Jr., J. Edwin; Rauch, III, Stewart E.; Wang, Ping-Chuan; Yang, Zhijian J., Methodology for recovery of hot carrier induced degradation in bipolar devices.
  68. Arena, Chantal, Methods and structures for bonding elements.
  69. Belyansky, Michael P.; Doris, Bruce B.; Gluschenkov, Oleg G., Mobility enhanced CMOS devices.
  70. Adam, Thomas N.; Chidambarrao, Dureseti, Mobility enhancement in SiGe heterojunction bipolar transistors.
  71. Chidambarrao,Dureseti; Dokumaci,Omer H.; Gluschenkov,Oleg G., NFETs using gate induced stress modulation.
  72. Gibson, Gary, Optical devices.
  73. Block,Bruce A.; Barnett,Brandon C.; Davids,Paul, Optical waveguide devices having adjustable waveguide cladding.
  74. Talin,Albert Alec; Voight,Steven A., Optical waveguide structure and method for fabricating the same.
  75. Mule′, Tony; Meindl, James D.; Gaylord, Thomas K.; Glytsis, Elias N.; Kohl, Paul, Optical waveguides with embedded air-gap cladding layer and methods of fabrication thereof.
  76. Cheng, Kangguo; Divakaruni, Ramachandra, Patterned strained semiconductor substrate and device.
  77. Cheng, Kangguo; Divakaruni, Ramachandra, Patterned strained semiconductor substrate and device.
  78. Cheng, Kangguo; Divakaruni, Ramachandra, Patterned strained semiconductor substrate and device.
  79. Cheng,Kangguo; Divakaruni,Ramachandra, Patterned strained semiconductor substrate and device.
  80. Zhu,Huilong; Doris,Bruce B.; Mocuta,Dan M., Protecting silicon germanium sidewall with silicon for strained silicon/silicon mosfets.
  81. Chidambarrao, Dureseti; Mocuta, Anda C.; Mocuta, Dan M.; Radens, Carl, Pseudomorphic Si/SiGe/Si body device with embedded SiGe source/drain.
  82. Chidambarrao, Dureseti; Mocuta, Anda C.; Mocuta, Dan M.; Radens, Carl, Pseudomorphic Si/SiGe/Si body device with embedded SiGe source/drain.
  83. Beintner,Jochen; Bronner,Gary B.; Divakaruni,Ramachandra; Kim,Byeong Y., Raised STI process for multiple gate ox and sidewall protection on strained Si/SGOI structure with elevated source/drain.
  84. Chidambarrao,Dureseti, Rotational shear stress for charge carrier mobility modification.
  85. Chidambarrao,Dureseti, Rotational shear stress for charge carrier mobility modification.
  86. Deshpande,Sadanand V.; Doris,Bruce B.; Rausch,Werner A.; Slinkman,James A., STI stress modification by nitrogen plasma treatment for improving performance in small width devices.
  87. Chen, Xiangdong; Yang, Haining S., Semiconductor device structure having enhanced performance FET device.
  88. Arnold, John C.; Chidambarrao, Dureseti; Li, Ying; Malik, Rajeev; Narasimha, Shreesh; Panda, Siddhartha; Tessier, Brian L.; Wise, Richard, Semiconductor device structure having low and high performance devices of same conductive type on same substrate.
  89. Langer,Eckhard; Zschech,Ehrenfried, Semiconductor structure comprising a stress sensitive element and method of measuring a stress in a semiconductor structure.
  90. Chen, Xiaomeng; Jeng, Shwu-Jen; Kim, Byeong Y.; Nayfeh, Hasan M., Semiconductor structure having undercut-gate-oxide gate stack enclosed by protective barrier material.
  91. Zhu, Huilong; Greene, Brian J.; Chidambarrao, Dureseti; Freeman, Gregory G., Semiconductor-on-insulator structures including a trench containing an insulator stressor plug and method of fabricating same.
  92. Chidambarrao, Dureseti; Dokumaci, Omer H.; Rengarajan, Rajesh; Steegen, An L., Silicide proximity structures for CMOS device performance improvements.
  93. Chidambarrao, Dureseti; Dokumaci, Omer H.; Gluschenkov, Oleg, Silicon device on SI:C-OI and SGOI and method of manufacture.
  94. Chidambarrao, Duresti; Dokumaci, Omer H.; Gluschenkov, Oleg G., Silicon device on Si: C-oi and Sgoi and method of manufacture.
  95. Chidambarrao, Dureseti; Dokumaci, Omer H.; Gluschenkov, Oleg G., Silicon device on Si:C SOI and SiGe and method of manufacture.
  96. Chidambarrao, Dureseti; Dokumaci, Omer H.; Gluschenkov, Oleg G., Silicon device on Si:C-OI and SGOI and method of manufacture.
  97. Chidambarrao,Dureseti; Dokumaci,Omer H.; Gluschenkov,Oleg G., Silicon device on Si:C-OI and SGOI and method of manufacture.
  98. Ajmera, Atul C.; Baiocco, Christopher V.; Chen, Xiangdong; Gao, Wenzhi; Teh, Young Way, Spacer and process to enhance the strain in the channel with stress liner.
  99. de Souza, Joel P.; Hamaguchi, Masafumi; Ozcan, Ahmet S.; Sadana, Devendra K.; Saenger, Katherine L.; Wall, Donald R., Strain preserving ion implantation methods.
  100. Chan, Kevin K.; Chu, Jack O.; Rim, Kern; Shi, Leathen, Strained Si MOSFET on tensile-strained SiGe-on-insulator (SGOI).
  101. Chan,Kevin K.; Chan,Jack Q; Rim,Kern; Shi,Leathen, Strained Si MOSFET on tensile-strained SiGe-on-insulator (SGOI).
  102. Chan,Kevin K.; Chu,Jack O.; Rim,Kern; Shi,Leathen, Strained Si MOSFET on tensile-strained SiGe-on-insulator (SGOI).
  103. Chan,Kevin K.; Chu,Jack O.; Rim,Kern; Shi,Leathen, Strained Si MOSFET on tensile-strained SiGe-on-insulator (SGOI).
  104. Chidambarrao, Dureseti; Dokumaci, Omer H.; Gluschenkov, Oleg G.; Zhu, Huilong, Strained Si on multiple materials for bulk or SOI substrates.
  105. Chidambarrao,Dureseti; Dokumaci,Omer H.; Gluschenkov,Oleg G.; Zhu,Huilong, Strained Si on multiple materials for bulk or SOI substrates.
  106. Chidambarrao,Dureseti; Dokumaci,Omer H., Strained dislocation-free channels for CMOS and method of manufacture.
  107. Doris,Bruce B.; Chidambarrao,Dureseti; Ieong,MeiKei; Mandelman,Jack A., Strained finFET CMOS device structures.
  108. Chidambarrao,Dureseti; Dokumaci,Omer H.; Gluschenkov,Oleg G., Strained finFETs and method of manufacture.
  109. Cheng,Kangguo; Chidambarrao,Dureseti, Strained silicon on a SiGe on SOI substrate.
  110. Chidambarrao, Dureseti; Dokumaci, Omer H., Strained silicon on relaxed sige film with uniform misfit dislocation density.
  111. Bryant, Andres; Ouyang, Qiqing; Rim, Kern, Strained-silicon CMOS device and method.
  112. Bryant,Andres; Ouyang,Qiqing; Rim,Kern, Strained-silicon CMOS device and method.
  113. Chidambarrao, Dureseti; Henson, William K.; Rim, Kern; Wille, William C., Stress engineering using dual pad nitride with selective SOI device architecture.
  114. Chidambarrao,Dureseti; Henson,William K.; Rim,Kern; Wille,William C., Stress engineering using dual pad nitride with selective SOI device architecture.
  115. Zhu, Huilong; Wang, Jing, Stress-generating shallow trench isolation structure having dual composition.
  116. Zhu, Huilong; Wang, Jing, Stress-generating shallow trench isolation structure having dual composition.
  117. Zhu, Huilong; Wang, Jing, Stress-generating shallow trench isolation structure having dual composition.
  118. Zhu, Huilong; Greene, Brian J.; Chidambarrao, Dureseti; Freeman, Gregory G., Stress-generating structure for semiconductor-on-insulator devices.
  119. Zhu, Huilong; Greene, Brian J.; Chidambarrao, Dureseti; Freeman, Gregory G., Stress-generating structure for semiconductor-on-insulator devices.
  120. Doris,Bruce B.; Belyansky,Michael P.; Boyd,Diane C.; Chidambarrao,Dureseti; Gluschenkov,Oleg, Stressed semiconductor device structures having granular semiconductor material.
  121. Doris,Bruce B; Belyansky,Michael P; Boyd,Diane C; Chidambarrao,Dureseti; Gluschenkov,Oleg, Stressed semiconductor device structures having granular semiconductor material.
  122. Zhu,Huilong; Doris,Bruce B.; Oldiges,Philip J.; Ieong,Meikei; Yang,Min; Chen,Huajie, Structure and method for manufacturing planar strained Si/SiGe substrate with multiple orientations and different stress levels.
  123. Zhu,Huilong; Doris,Bruce B., Structure and method for manufacturing strained FINFET.
  124. Zhu,Huilong; Doris,Bruce B., Structure and method for manufacturing strained FINFET.
  125. Chan,Victor W. C.; Lee,Yong M.; Yang,Haining, Structure and method of applying stresses to PFET and NFET transistor channels for improved performance.
  126. Cabral, Jr.,Cyril; Doris,Bruce B.; Kanarsky,Thomas S.; Liu,Xiao H.; Zhu,Huilong, Structure and method to generate local mechanical gate stress for MOSFET channel mobility modification.
  127. Yang,Haining S.; Zhu,Huilong, Structure and method to induce strain in a semiconductor device channel with stressed film under the gate.
  128. Chen,Xiangdong; Yang,Haining S., Structure and method to optimize strain in CMOSFETs.
  129. Yang, Haining; Li, Wai-Kin, Structure and method to use low k stress liner to reduce parasitic capacitance.
  130. Cheng,Kangguo; Chidambarrao,Dureseti; Divakaruni,Rama; Gluschenkov,Oleg G., Structure of vertical strained silicon devices.
  131. Zhu, Huilong; Bedell, Steven W.; Doris, Bruce B.; Zhang, Ying, Structures and methods for making strained MOSFETs.
  132. Zhu,Hiulong; Bedell,Steven W.; Doris,Bruce B.; Zhang,Ying, Structures and methods for making strained MOSFETs.
  133. Zhu,Huilong; Doris,Bruce B.; Chen,Huajie, Structures and methods for manufacturing of dislocation free stressed channels in bulk silicon and SOI CMOS devices by gate stress engineering with SiGe and/or Si:C.
  134. Zhu, Huilong; Doris, Bruce B.; Chen, Huajie, Structures and methods for manufacturing of dislocation free stressed channels in bulk silicon and SOI MOS devices by gate stress engineering with SiGe and/or Si:C.
  135. Zhu,Huilong, Structures and methods for manufacturing p-type MOSFET with graded embedded silicon-germanium source-drain and/or extension.
  136. Gothoskar, Prakash; Ghiron, Margaret; Montgomery, Robert Keith; Patel, Vipulkumar; Shastri, Kalpendu; Pathak, Soham; Yanushefski, Katherine A., Sub-micron planar lightwave devices formed on an SOI optical platform.
  137. Bedell,Stephen W.; Domenicucci,Anthony G.; Fogel,Keith E.; Leobandung,Effendi; Sadana,Devendra K., Ultra-thin, high quality strained silicon-on-insulator formed by elastic strain transfer.
  138. Bedell,Stephen W.; Domenicucci,Anthony G.; Fogel,Keith E.; Leobandung,Effendi; Sadana,Devendra K., Ultra-thin, high quality strained silicon-on-insulator formed by elastic strain transfer.
  139. Zhu, Huilong; Luo, Zhijiong, finFET structure with multiply stressed gate electrode.

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