초록 ▼

A fluid containment system including a vessel for containing a fluid that is discharged from the vessel in use or operation of the system. A pressure monitoring assembly including a strain-responsive sensor is disposed on an exterior wall surface of the vessel, to sense dynamic strain on the wall su

A fluid containment system including a vessel for containing a fluid that is discharged from the vessel in use or operation of the system. A pressure monitoring assembly including a strain-responsive sensor is disposed on an exterior wall surface of the vessel, to sense dynamic strain on the wall surface of such vessel that is incident to discharge of fluid from the vessel, and to responsively output a pressure-indicative response. Such arrangement is particularly useful in application to fluid storage and dispensing vessels containing interiorly disposed pressure regulator assemblies and holding liquefied gases or compressed gases, e.g., for use in semiconductor manufacturing operations.

대표청구항 ▼

1. A fluid containment system, comprising:a closed, sealed vessel adapted to be removably coupled with a fluid-using process unit, said vessel being constructed and arranged to retain a fluid therein, with means joined to the vessel for selectively dispensing fluid from the vessel to the process uni

1. A fluid containment system, comprising:a closed, sealed vessel adapted to be removably coupled with a fluid-using process unit, said vessel being constructed and arranged to retain a fluid therein, with means joined to the vessel for selectively dispensing fluid from the vessel to the process unit for use in said unit, with said vessel being adapted for uncoupling from the process unit and change-out of the vessel when fluid in the vessel is exhausted; said vessel including a vessel wall with an interior surface in contact with the fluid contained in the vessel, and an exterior surface; and a pressure monitor including a strain-responsive sensor disposed on the exterior surface of said vessel, for generating a pressure-indicative response correlative of pressure of fluid in the vessel, whereby pressure can be monitored as fluid is discharged from the vessel and pressure of the fluid in the vessel correspondingly changes with such discharge.