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Diode-laser light projector for illuminating a linear array of light modulators 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G06K-007/10
  • G06K-007/14
출원번호 US-0522120 (2000-03-09)
발명자 / 주소
  • Mathew N. Rekow
  • Stephen L. Kwiatkowski
출원인 / 주소
  • Coherent, Inc.
대리인 / 주소
    Stallman & Pollock LLP
인용정보 피인용 횟수 : 34  인용 특허 : 8

초록

An illumination system for projecting a line of light includes a linear array of diode lasers having a fast and a slow axis and an optical system aligned with the linear array and having different optical power in the fast and slow axes. The optical system is arranged to focus fast-axis diverging ra

대표청구항

1. An illumination system for projecting a line of light, comprising:a plurality of diode-lasers spaced apart in an elongated linear array, said linear array having a slow axis parallel to the length direction thereof, and a fast axis perpendicular to said slow axis, light being emitted from each of

이 특허에 인용된 특허 (8)

  1. Takada Hirohisa (Tokyo JPX) Tanaka Shosuke (Kanagawa JPX), Apparatus for detecting modulated informations from emitted light turned by an object.
  2. Gelbart Daniel (4987 Marguerite Street Vancouver ; British Columbia CAX V6M 3J9), Apparatus for imaging light from a laser diode onto a multi-channel linear light valve.
  3. Streifer William (Palo Alto CA) Scifres Donald R. (San Jose CA) Harnagel Gary L. (San Jose CA), Diode laser arrangement forming bright image.
  4. Sarraf Sanwal P. (Pittsford NY), Light modulator with a laser or laser array for exposing image data.
  5. Anderson Nigel Iivari,ZAX ITX 1685, Light projection apparatus for projecting a line of generally constant illumination on a surface.
  6. Tawara Masami, Optical image sensor.
  7. Takahashi Tooru (Hatogaya JPX), Optical reader.
  8. Ben Oren Ilan,ILX ; Ronen Josef,ILX ; Steinblatt Serge,ILX ; Komem Amir,ILX, Spatial light modulator illumination system.

이 특허를 인용한 특허 (34)

  1. Reynolds,Meritt; Dets,Olena; Shiue,Scott; Shinkoda,Ichiro; Speier,Ingo, Apparatus and method for illumination of light valves.
  2. Anikitchev,Serguei G., Apparatus for projecting a line of light from a diode-laser array.
  3. Anikitchev,Serguei G., Apparatus for projecting a line of light from a diode-laser array.
  4. Anikitchev,Serguei G.; Austin,R. Russel, Apparatus for projecting a line of light from a diode-laser array.
  5. Rekow, Mathew N., Apparatus for projecting a line of light from a diode-laser array.
  6. Karapetyan,Armen, Apparatus generating a light illuminated line.
  7. Camm,David Malcolm; Bumbulovic,Mladen; Cibere,Joseph; Elliott,J. Kiefer; McCoy,Steve; Stuart,Greg, Apparatuses and methods for suppressing thermally-induced motion of a workpiece.
  8. Du, Jihua; Guo, James Yonghong; Xu, Lei; Duesterberg, Richard L.; Skidmore, Jay A., Beam combining light source.
  9. Du, Jihua; Guo, James Yonghong; Xu, Lei; Duesterberg, Richard L.; Skidmore, Jay A., Beam combining light source.
  10. Demir, Abdullah; Peters, Matthew Glenn, Bidirectional long cavity semiconductor laser for improved power and efficiency.
  11. Mitra, Thomas; Aschke, Lutz; Bartoschewski, Daniel, Device and method for beam forming.
  12. Jennings, Dean; Mayur, Abhilash J.; Thomas, Timothy N.; Parihar, Vijay; Achutharaman, Vedapuram S.; Thakur, Randhir P. S., Fast axis beam profile shaping by collimation lenslets for high power laser diode based annealing system.
  13. Jennings, Dean; Mayur, Abhilash J.; Thomas, Timothy N.; Parihar, Vijay; Achutharaman, Vedapuram S.; Thakur, Randhir P. S., Fast axis beam profile shaping for high power laser diode based annealing system.
  14. Wenzel, Thomas, Focus determination for laser-mask imaging systems.
  15. Spinelli,Luis A.; Zhou,Hailong; Austin,R. Russel, InGaN diode-laser pumped II-VI semiconductor lasers.
  16. Malard, Fabrice J.; Hopper, Ryan K.; Poole, Daniel L.; Poole, Robert N., Laser line generating device.
  17. Thibault, Simon, Line generator optical apparatus.
  18. Ferber,Joerg, Method and apparatus for providing uniform illumination of a mask in laser projection systems.
  19. Kraus, Philip Allan; Parihar, Vijay, Method of forming PN junctions including a post-ion implant dynamic surface anneal process with minimum interface trap density at the gate insulator-silicon interface.
  20. Camm, David Malcolm; Sempere, Guillaume; Kaludjercic, Ljubomir; Stuart, Gregory; Bumbulovic, Mladen; Tran, Tim; Dets, Sergiy; Komasa, Tony; Rudolph, Marc; Cibere, Joseph, Methods and systems for supporting a workpiece and for heat-treating the workpiece.
  21. Camm, David Malcolm; Sempere, Guillaume; Kaludjercic, Ljubomir; Stuart, Gregory; Bumbulovic, Mladen; Tran, Tim; Dets, Sergiy; Komasa, Tony; Rudolph, Marc; Cibere, Joseph, Methods and systems for supporting a workpiece and for heat-treating the workpiece.
  22. O'Connor, Michael; Springett, Thomas W.; Ward-Dolkas, Paul C., Microdisplay packaging system.
  23. O'Connor, Michael; Springett, Thomas W.; Ward-Dolkas, Paul C., Microdisplay packaging system.
  24. O'Connor,Michael; Springett,Thomas W.; Ward Dolkas,Paul C., Microdisplay packaging system.
  25. Adams, Bruce E.; Jennings, Dean; Hunter, Aaron M.; Mayur, Abhilash J.; Parihar, Vijay; Thomas, Timothy N., Multiple band pass filtering for pyrometry in laser based annealing systems.
  26. Adams,Bruce E.; Jennings,Dean; Hunter,Aaron M.; Mayur,Abhilash J.; Parihar,Vijay; Thomas,Timothy N., Multiple band pass filtering for pyrometry in laser based annealing systems.
  27. Adams,Bruce E.; Jennings,Dean; Hunter,Aaron M.; Mayur,Abhilash J.; Parihar,Vijay, Rapid detection of imminent failure in laser thermal processing of a substrate.
  28. Adams, Bruce E.; Jennings, Dean; Hunter, Aaron Muir; Mayur, Abhilash J.; Parihar, Vijay, Rapid detection of imminent failure in optical thermal processing of a substrate.
  29. Adams,Bruce E.; Jennings,Dean; Mayur,Abhilash J.; Parihar,Vijay; Ranish,Joseph M., Single axis light pipe for homogenizing slow axis of illumination systems based on laser diodes.
  30. Camm, David Malcolm; Cibere, Joseph; Bumbulovic, Mladen, Systems and methods for supporting a workpiece during heat-treating.
  31. Camm,David M.; Kervin,Shawna; Lefrancois,Marcel Edmond; Stuart,Greg, Temperature measurement and heat-treating methods and system.
  32. Camm, David M.; Kervin, Shawna; Lefrancois, Marcel Edmond; Stuart, Greg, Temperature measurement and heat-treating methods and systems.
  33. Adams,Bruce E.; Jennings,Dean; Mayur,Abhilash J.; Parihar,Vijay; Ranish,Joseph M., Thermal flux laser annealing for ion implantation of semiconductor P-N junctions.
  34. Camm, David Malcolm; Cibere, Joseph; Stuart, Greg; McCoy, Steve, Workpiece breakage prevention method and apparatus.
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