초록 ▼

By setting the thickness of the Ti core between 4.about.6 nm and adjusting the thickness ratio of the Pt layer in relation to the thickness of the entire lower electrode, the (100) face orientation degree of a piezoelectric thin film may be set to a prescribed ratio with favorable reproducibility. P

By setting the thickness of the Ti core between 4.about.6 nm and adjusting the thickness ratio of the Pt layer in relation to the thickness of the entire lower electrode, the (100) face orientation degree of a piezoelectric thin film may be set to a prescribed ratio with favorable reproducibility. Preferably, the (100) face orientation degree of the piezoelectric thin film is not less than 40% and not more than 70% or less, the (110) face orientation degree is 10% or less, and the (111) face orientation degree is the remaining portion thereof. Further, by applying heat from the lower electrode side upon calcinating the piezoelectric precursor film, it is possible to obtain satisfactory crystallinity as the crystal growth begins from the lower electrode side and reaches the upper part of the film. Accordingly, piezoelectric properties of the piezoelectric thin film are improved, and a highly reliable inkjet recording head and printer may be obtained thereby.

대표청구항 ▼

1. A piezoelectric element, comprising:a lower electrode formed on a ZrO2 film; a piezoelectric thin film formed on said lower electrode; and an upper electrode formed on said piezoelectric thin film, wherein the (100) face orientation degree of said piezoelectric thin film measured with the X-ray d

1. A piezoelectric element, comprising:a lower electrode formed on a ZrO2 film; a piezoelectric thin film formed on said lower electrode; and an upper electrode formed on said piezoelectric thin film, wherein the (100) face orientation degree of said piezoelectric thin film measured with the X-ray diffraction angle method is not less than 40% and not more than 70%.