A compact turbo-molecular pump having a high depressurizing capability. A motor driving the pump includes a rotary shaft, the distal and basal ends of which are supported by magnetic bearings. Each magnetic bearing has a rotated magnet, which is rotated integrally with the rotary shaft, and a fixed magnet, which is opposed to the rotated magnet. The rotated and fixed magnets repel each other. The diameter of the magnetic bearing at the distal end of the rotary shaft is greater than that of the magnetic bearing at the basal end. This decreases movement of...
1. A pressure generating apparatus for generating a predetermined pressure, the apparatus comprising:a motor, wherein the motor includes a rotary shaft having a distal end and a basal end, and a non-contact bearing for supporting the rotary shaft; a vane rotated integrally with the rotary shaft; an intake chamber located in the distal end of the rotary shaft; a pressure balancing chamber located at the basal end of the rotary shaft; and a passage connecting the intake and pressure balancing chambers, the passage and the pressure balancing chamber isolate...
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