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Semiconductor structure 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-029/76
출원번호 US-0712875 (2000-11-15)
발명자 / 주소
  • Zhiyi Yu
  • Jamal Ramdani
  • Ravindranath Droopad
출원인 / 주소
  • Motorola, Inc.
대리인 / 주소
    Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
인용정보 피인용 횟수 : 145  인용 특허 : 86

초록

A structure and method for forming a high dielectric constant device structure includes a monocrystalline semiconductor substrate and an insulating layer formed of an epitaxially grown oxide such as (A)y(TixM1-x)1-yO3, wherein A is an alkaline earth metal or a combination of alkaline earth metals an

대표청구항

1. A high dielectric constant device structure comprising:a monocrystalline semiconductor substrate; and a monocrystalline insulating layer overlying the substrate, the insulating layer comprising Ay(TixM1-x)1-yO3 where A is an alkaline earth metal, M is an element selected from the group consisting

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