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특허 상세정보

Pod door to port door retention system

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) E05C-005/02   
미국특허분류(USC) 292/059; 292/057; 292/202
출원번호 US-0115414 (1998-07-14)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    O'Melveny & Myers, LLP
인용정보 피인용 횟수 : 15  인용 특허 : 16
초록

A system is disclosed for ensuring that the pod door is firmly and securely retained on the port door of a process tool as the pod door is removed from the pod and stowed in the process tool during workpiece transfer between the pod and process tool. The system includes a latch key protruding outwardly from the outer surface of the port door. The latch key is provided to mate within a slot of a door latch assembly within the pod door. Once the latch key is properly seated within the slot, the latch key is rotated by mechanisms within the port door to dec...

대표
청구항

A system is disclosed for ensuring that the pod door is firmly and securely retained on the port door of a process tool as the pod door is removed from the pod and stowed in the process tool during workpiece transfer between the pod and process tool. The system includes a latch key protruding outwardly from the outer surface of the port door. The latch key is provided to mate within a slot of a door latch assembly within the pod door. Once the latch key is properly seated within the slot, the latch key is rotated by mechanisms within the port door to dec...

이 특허에 인용된 특허 (16)

  1. Wu Kim F. (Garden Grove CA). Adjustable latching apparatus and method of latchably pressing and holding together. USP1987084688835.
  2. Calzone Ronald J. (HCR 60 ; Box 296 Dixon MO 65459). Clamp for securing trailer ramp in transport position. USP1995105462249.
  3. Tullis Barclay J. (Palo Alto CA) ..AP: Hewlett-Packard Company (Palo Alto CA 02). Interlocking door latch for dockable interface for integrated circuit processing. USP1985084534389.
  4. McCormack Edward (Media PA). Latch assembly. USP1992115165738.
  5. Leaver John Y. (Elkhart IN) Huggins Harold D. (Quincy IL). Latching mechanism for panels. USP1983114413848.
  6. Mages Andreas,DEX ; Scheler Werner,DEX ; Blaschitz Herbert,DEX ; Schulz Alfred,DEX ; Schneider Heinz,DEX. Loading and unloading station for semiconductor processing installations. USP1998065772386.
  7. Hnel Joachim (Bblingen DEX) Hberle Fritz (Sindelfingen DEX) Mtting Gtz (Bblingen DEX) Mnsinger Walter (Bblingen-Dagersheim DEX). Lock with a lock cylinder for a floor lid of a motor vehicle. USP1988034730469.
  8. Bonora Anthony C. ; Neads Michael A. ; Oen Joshua T.. Method and apparatus for vertical transfer of a semiconductor wafer cassette. USP1998085788458.
  9. Tullis Barclay J. (Palo Alto CA) Parikh Mihir (San Jose CA) Thrasher David L. (Menlo Park CA) Johnston Mark E. (Saratoga CA). Particle-free dockable interface for integrated circuit processing. USP1985084532970.
  10. Bonora Anthony C. ; Fosnight William J. ; Martin Raymond S.. Rotated, orthogonal load compatible front-opening interface. USP1999085944475.
  11. Bonora Anthony C. (Menlo Park CA) Fosnight William J. (Newark CA) Martin Raymond S. (San Jose CA) Rhine Bruce C. (Fremont CA). SMIF port interface adaptor. USP1997085653565.
  12. Beard Eugene R. (3186 Reva Dr. Concord CA 94519). Screw lock for interlocking sliding door and windows. USP1980024190272.
  13. Bonora Anthony C. (Menlo Park CA) Rosenquist Frederick T. (Redwood City CA). Sealable transportable container having improved latch mechanism. USP1991024995430.
  14. Ruoss Peter A. (P.O. Box 1234 Princeton ; British Columbia CAX V0X 1W0 ). Security grill system. USP1997115683123.
  15. Bonora Anthony C. ; Cortez Edward J. ; DiPaola J. Mark ; Netsch Robert R.. Universal tool interface and/or workpiece transfer apparatus for SMIF and open pod applications. USP2000106135698.
  16. Mascotte Lawrence L. (9106 SE. 82nd Portland OR 97266). Window guard locking device. USP1996125584514.

이 특허를 인용한 특허 피인용횟수: 15

  1. Gonzalez, Pablo; Watts, Gary Roy. Access arbitration module and system for semiconductor fabrication equipment and methods for using and operating the same. USP2014118881297.
  2. Kimoto, Shinyo; Tokunaga, Kenji; Sakata, Katsunori; Kajita, Norio. Cylinder, load port using it, and production system. USP2003116652212.
  3. Kim,James. Deadbolt interior. USP200809D576019.
  4. Bacchi, Paul; Filipski, Paul S.. Detection of motive force applied to transport box mounted on a fims system. USP2004076765222.
  5. Hontz, Jeffrey Walter; Mickelson, Eric Neil. Door latch. USP2011020631727.
  6. Myers, Gary L.; Roatis, Calin V.; Denison, William D.; Barnas, Thomasz; Captarencu, Catalin; Paeth, Richard. Electronic cam locking systems for vending machines and the like. USP2016029260886.
  7. Yokoyama, Shinji. FOUP opener. USP2011077976262.
  8. Figueroa, Gilberto; Hruska, Daniel; Yam, Hon Hung; White, Michael S.. Injection/ejection mechanism. USP2010127850260.
  9. Fang, Rui. LCD glass substrate storage tray. USP2014128915368.
  10. Kowalczyk, Piotr Leonard. Locking arrangement. USP2018029890562.
  11. Shien, Kwen-Mu; Lo, Fu-Sun; Peng, Ray-Chung. Method and apparatus for testing cassette pod door. USP2003076595075.
  12. Miyajima, Toshihiko; Okabe, Tsutomu; Emoto, Jun. Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unit. USP2009117621714.
  13. Min, Hao; Gong, Zhangping. Safety locking mechanism for lockset. USP2017119822555.
  14. Ciminello,Nicholas Frank; Schmoke,David L.; Sherwood,Edward. Secondary latchkey mechanism and method for reticle SMIF pods. USP2008027325685.
  15. Bacchi, Paul; Filipski, Paul S.. Specimen scanning mechanism adapted for implementation in a FIMS system. USP2004116815661.